83885 ⎘
Basic microelectromechanical structures Electrodes
MEMS switch and electronic device
#602Microphone and manufacturing method therefor
#603Physical quantity sensor, method for manufacturing physical quantity sensor, complex sensor, inertia measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
#604Fence structure to prevent stiction in a MEMS motion sensor
#605Capacitive MEMS microphone and electronic apparatus
#606Encapsulated microelectromechanical structure
#607DIFFERENTIAL Z-AXIS RESONANT MEMS ACCELEROMETERS AND RELATED METHODS
#608MEMS DEVICES AND PROCESSES
#609MEMS DEVICES AND PROCESSES
#610MEMS sensors, methods for providing same and method for operating a MEMS sensor
#611MEMS device comprising a membrane and an actuator
#612Electrostatic actuator with tri-electrode topology
#613Forming an offset in an interdigitated capacitor of a microelectromechanical systems (MEMS) device
#614MEMS component and production method for a MEMS component
#615MEMS device and process
#616Manufacturing method for semiconductor structure
#617Microelectromechanical transducer
#618Spacer for side loaded EWOD device
#619MEMS microphone system with low pressure gap and back volume
#620Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element
#621Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
#622CMOS-MEMS structure and method of forming the same
#623Microelectromechanical device with at least one translationally guided moveable element
#624MEMS devices and processes
#625MEMS devices and processes
#626ELECTROSTATIC ACOUSTIC TRANSDUCER
#627MEMS acoustic pressure sensor device and method for making same
#628Manufacturing method of semiconductor structure including heater
#629Planar cavity MEMS and related structures, methods of manufacture and design structures
#630MEMS device with enhanced sensing structure and manufacturing method thereof
#631Charge pump systems, devices, and methods
#632Pressure sensors and method for forming a MEMS pressure sensor
#633MEMS pressure sensing element
#634Micromechanical sensor
#635Micromechanical structure for an acceleration sensor
#636Microelectronic devices for isolating drive and sense signals of sensing devices
#637Device and method of fabricating such a device
#638MEMS microphone and method for manufacturing the same
#639Current handling in legs and anchors of RF-switch
#640Charge pump systems, devices, and methods
#641Device arrangement
#642High performance sealed-gap capacitive microphone
#643Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process
#644Plurality of electrodes on a substrate having different range of spacing
#645MEMS transducer package
#646Physical quantity sensor, electronic device, and vehicle
#647Physical quantity sensor
#648Physical quantity sensor manufacturing method, physical quantity sensor, electronic device, and vehicle
#649MEMS microphone and method for manufacturing the same
#650Planar cavity MEMS and related structures, methods of manufacture and design structures
#651Method for producing structured surfaces
#652Method for obtaining multilayer graphene
#653Planar cavity MEMS and related structures, methods of manufacture and design structures
#654Microelectromechanical microphone
#655Anchor tracking for MEMS accelerometers
#656Membrane components and method for forming a membrane component
#657Microelectromechanical device with multiple hinges
#658Microelectromechanical microphone
#659Semiconductor structure and manufacturing method for the same
#660MEMS microphone and method for manufacturing the same
#661Physical quantity sensor, electronic device, and moving object
#662Low contact resistance semiconductor structure and method for manufacturing the same
#663Micro-mirror array having pillars which form portions of electrical paths between mirror electrodes and mirrors
#664MEMS sensors with selectively adjusted damping of suspension
#665Rough anti-stiction layer for MEMS device
#666Thin film metal silicides and methods for formation
#667COMPUTATION DEVICES AND ARTIFICIAL NEURONS BASED ON NANOELECTROMECHANICAL SYSTEMS
#668Movable reflection device and reflection surface drive system utilizing same
#669MEMS device
#670Semiconductor device, microphone and method for producing a semiconductor device
#671Computation devices and artificial neurons based on nanoelectromechanical systems
#672INERTIA SENSOR
#673MEMS device and method for producing a MEMS device
#674MEMS DEVICE
#675MEMS microphone having reduced leakage current and method of manufacturing the same
#676Contact material for MEMS devices
#677MEMS microphone
#678Vibration transducer
#679Piezoelectric MEMS sensor, such as force, pressure, deformation sensor or microphone, with improved sensitivity
#680Microphone and method of manufacturing the same
#681Contact point structure, electronic device, and electronic apparatus
#682Semiconductor MEMS structure
#683Electromechanical switching device with electrodes having 2D layered materials with distinct functional areas
#684Silicon carbide microelectromechanical structure, device, and method
#685Planar cavity MEMS and related structures, methods of manufacture and design structures
#686Planar cavity MEMS and related structures, methods of manufacture and design structures
#687Planar cavity MEMS and related structures, methods of manufacture and design structures
#688Micromechanical component and production method for a micromechanical component
#689Planar cavity MEMS and related structures, methods of manufacture and design structures
#690Planar cavity MEMS and related structures, methods of manufacture and design structures
#691MEMS device and process
#692Integrated structure of mems pressure sensor and mems inertia sensor
#693MEMS DEVICE AND PROCESS
#694MEMS sensor, especially pressure sensor, for metrological registering of a measured variable
#695MEMS device and process
#696Integration scheme for microelectromechanical systems (MEMS) devices and complementary metal-oxide-semiconductor (CMOS) devices
#697Microelectromechanical device, a microelectromechanical system, and a method of manufacturing a microelectromechanical device
#698Acceleration sensor having spring force compensation
#699Planar cavity MEMS and related structures, methods of manufacture and design structures
#700MEMS sensor with high voltage switch
#701MEMS device, head and liquid jet device
#702Electrostatic actuator and switch
#703Semiconductor pressure sensor
#704Small wafer are MEMS switch
#705Small wafer area MEMs switch
#706MEMS acoustic transducer with combfingered electrodes and corresponding manufacturing process
#707Antenna having MEMS-tuned RF resonators
#708RF RESONATORS WITH TUNABLE CAPACITOR AND METHODS FOR FABRICATING THE SAME
#709Getter electrode to improve vacuum level in a microelectromechanical systems (MEMS) device
#710Epi-poly etch stop for out of plane spacer defined electrode
#711MEMS accelerometric sensor having high accuracy and low sensitivity to temperature and aging
#712PIEZOELECTRIC PACKAGE-INTEGRATED SWITCHING DEVICES
#713Offset rejection electrodes
#714Microelectromechanical system and a method of manufacturing a microelectromechanical system
#715MEMS DEVICE WITH A STABILIZED MINIMUM CAPACITANCE
#716Method for forming a multielectrode conformal penetrating array
#717MEMS acoustic pressure sensor device and method for making same
#718Rough anti-stiction layer for MEMS device
#719Electrode for a microelectromechanical device
#720MICRO-ELECTROMECHANICAL APPARATUS HAVING CENTRAL ANCHOR
#721Electrostatic device
#722MEMS device
#723Method for manufacturing MEMS torsional electrostatic actuator
#724MEMS sensor cap with multiple isolated electrodes
#725SEMICONDUCTOR TYPE GAS SENSOR, METHOD OF MANUFACTURING SEMICONDUCTOR TYPE GAS SENSOR, AND SENSOR NETWORK SYSTEM
#726Manufacturing method of micro-electro-mechanical system sensor capable of preventing diffusion phenomenon and reflow phenomenon
#727Small wafer area MEMS switch
#728Fully wafer-level-packaged MEMS microphone and method for manufacturing the same
#729Electromechanical switching device with electrodes having 2D layered materials with distinct functional areas
#730Planar cavity MEMS and related structures, methods of manufacture and design structures
#731Very low power microelectromechanical devices for the internet of everything
#732System and method for a perpendicular electrode transducer
#733MEMS DEVICE WITH CAPACITANCE ENHANCEMENT ON QUADRATURE COMPENSATION ELECTRODE
#734Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures
#735Semiconductor structure and manufacturing method thereof
#736Substrate structure, semiconductor structure and method for fabricating the same
#737Electronic device having a bonding wire connected to a terminal at an alloyed portion
#738Planar cavity MEMS and related structures, methods of manufacture and design structures
#739Semiconductor sensing structure
#740Silicon microphone with suspended diaphragm and system with the same
#741Micro-electro-mechanical system and manufacturing method thereof
#742Planar cavity MEMS and related structures, methods of manufacture and design structures
#743MEMS devices and fabrication methods thereof
#744MEMS devices and fabrication methods thereof
#745MEMS device with electrodes permeable to outgassing species
#746MEMS chip package
#747Fabrication of microfluidic chips having electrodes level with microchannel walls
#748MICROMECHANICAL COMPONENT HAVING A SPLIT, GALVANICALLY ISOLATED ACTIVE STRUCTURE, AND METHOD FOR OPERATING SUCH A COMPONENT
#749Planar cavity MEMS and related structures, methods of manufacture and design structures
#750MEMS sensor with high voltage switch
#751Multi-level micromechanical structure
#752Planar cavity MEMS and related structures, methods of manufacture and design structures
#753Planar cavity MEMS and related structures, methods of manufacture and design structures
#754Planar cavity MEMS and related structures, methods of manufacture and design structures
#755Three-dimensional multi-electrode array
#756Sensor including moving masses and means for detecting relative movements of the masses
#757Electromechanical device including a suspended structure and method of fabricating the same
#758Capacitive MEMS-sensor element having bond pads for the electrical contacting of the measuring capacitor electrodes
#759Semiconductor pressure sensor and method of fabricating same
#760MEMS DEVICE
#761Method of fabricating MEMS devices using plasma etching and device therefor
#762Mirco-electro-mechanical system device
#763Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures
#764Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures
#765Planar cavity MEMS and related structures, methods of manufacture and design structures
#766Curved RF electrode for improved Cmax
#767MEMS PRESSURE SENSOR AND METHOD FOR FORMING THE SAME
#768Thin film metal silicides and methods for formation
#769Semiconductor structures and fabrication method thereof
#770Electrostatically deflectable micromechanical device
#771Encapsulated microelectromechanical structure
#772MEMS device and process
#773Microelectromechanical systems devices with improved reliability
#774MEMS capacitive pressure sensors
#775Electromechanical switching device with electrodes having 2D layered materials with distinct functional areas
#776Micro-electromechanical apparatus with multiple chambers and method for manufacturing the same
#777Epi-poly etch stop for out of plane spacer defined electrode
#778MEMS sensor cap with multiple isolated electrodes
#779Method for producing an integrated circuit pointed element comprising etching first and second etchable materials with a particular etchant to form an open crater in a projection
#780Non-symmetric arrays of MEMS digital variable capacitor with uniform operating characteristics
#781Substrate for diaphragm-type resonant MEMS devices, diaphragm-type resonant MEMS device and method for manufacturing same
#782Electronic device having a first electrode formed on a movable suspended mass opposing a second electrode formed on a cover layer
#783Resonance Frequency Adjustment Module
#784Planar cavity MEMS and related structures, methods of manufacture and design structures
#785Planar cavity MEMS and related structures, methods of manufacture and design structures
#786PIEZOELECTRIC MICROPHONE WITH INTEGRATED CMOS
#787Planar cavity MEMS and related structures, methods of manufacture and design structures
#788Electrostatic actuator and method for producing the same
#789Semiconductor package with air pressure sensor
#790Physical quantity detection device, electronic apparatus, and moving object
#791Physical quantity sensor, electronic device, and mobile body
#792Planar cavity MEMS and related structures, methods of manufacture and design structures
#793Planar cavity MEMS and related structures, methods of manufacture and design structures
#794Electromechanical switching device with electrodes having 2D layered materials with distinct functional areas
#795Planar cavity MEMS and related structures, methods of manufacture and design structures
#796Method for manufacturing a microelectromechanical systems (MEMS) device with different electrical potentials and an etch stop
#797Microelectromechanical component and manufacturing method for microelectromechanical components
#798Strain detection element, pressure sensor, microphone, blood pressure sensor, and touch panel
#799Micromechanical component having a diaphragm structure
#800Precise definition of transducer electrodes
#801Capacitive MEMS sensor and method
#802MEMS sensor with dynamically variable reference capacitance
#803Mirror drive device and driving method thereof
#804Systems, devices, and methods for reducing surface dielectric charging in a RF MEMS actuator element
#805MEMS DEVICE
#806Differential sensing acoustic sensor
#807Semiconductor arrangement and formation thereof
#808MEMS device and method for manufacturing the same
#809MEMS capacitive pressure sensors
#810System and methods for actuation using electro-osmosis
#811Capacitive transducer and method of manufacturing the same
#812Microelectromechanical component and corresponding production method
#813ELECTRODE SYSTEM FOR A MICROMECHANICAL COMPONENT
#814Method for manufacturing modular microfluidic paper chips using inkjet printing
#815Micro-electro-mechanical system device and micro-electro-mechanical system compensation structure
#816Stress buffer layer for integrated microelectromechanical systems (MEMS)
#817Nanochanneled device with electrodes and related methods
#818Method and apparatus for fabricating electrostatic capacitance-type acceleration sensor and electrostatic capacitance-type acceleration sensor
#819Micromechanical component and method for producing a micromechanical component
#820Planar cavity MEMS and related structures, methods of manufacture and design structures
#821Physical quantity sensor, electronic device, and moving object
#822MEMS capacitive pressure sensors and fabrication method thereof
#823Electric device and method of manufacturing the same
#824Computation devices and artificial neurons based on nanoelectromechanical systems
#825Electrical device including a functional element in a cavity
#826Micropatterned component and method for manufacturing a micropatterned component
#827Actuator plate partitioning and control devices and methods
#828Electromechanical transducer and method of producing the same
#829Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures
#830Planar cavity MEMS and related structures, methods of manufacture and design structures
#831Thin film device and method for manufacturing thin film device
#832MEMS device with independent rotation in two axes of rotation
#833MEMS device, electronic apparatus, and manufacturing method of MEMS device
#834Reflective device to scan light to project an image on a display surface
#835Semiconductor package with air pressure sensor
#836MEMS devices and fabrication methods thereof
#837Capacitance type sensor
#838Method for fabricating MEMS device with protection rings
#839Planar cavity MEMS and related structures, methods of manufacture and design structures
#840Planar cavity MEMS and related structures, methods of manufacture and design structures
#841Microelectromechanical sensor with out-of-plane sensing and process for manufacturing a microelectromechanical sensor
#842Method for making a suspended membrane structure with buried electrode
#843Horizontal coplanar switches and methods of manufacture
#844Electric device and method of manufacturing the same
#845Micromechanical component, intermediate product produced by a manufacturing method, and manufacturing method for a micromechanical component
#846Electrical device including a functional element in a cavity
#847MEMS devices and methods of forming same
#848Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures
#849Electromechanical transducer and method of producing the same
#850Wiring connection method and functional device
#851Capacitance type MEMS sensor
#852MEMS sensor and method for producing MEMS sensor, and MEMS package
#853METHOD OF FORMING HIERARCHICAL MICROSTRUCTURE USING PARTIAL CURING
#854Horizontal coplanar switches and methods of manufacture
#855Electrode assembly
#856Via structure and method thereof
#857MEMS Device Comprising a Hermetically Sealed Cavity and Devices Obtained Thereof
#858Planar cavity MEMS and related structures, methods of manufacture and design structures
#859Planar cavity MEMS and related structures, methods of manufacture and design structures
#860Planar cavity MEMS and related structures, methods of manufacture and design structures
#861Planar cavity MEMS and related structures, methods of manufacture and design structures
#862Planar cavity MEMS and related structures, methods of manufacture and design structures
#863Methods of manufacture for micro-electro-mechanical system (MEMS)
#864Planar cavity MEMS and related structures, methods of manufacture and design structures
#865Planar cavity MEMS and related structures, methods of manufacture and design structures
#866Method of manufacturing a micro-electro-mechanical system (MEMS)
#867MEMS DEVICE AND PROCESS
#868Process for eliminating delamination between amorphous silicon layers
#869CMP process flow for MEMS
#870PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING PHYSICAL QUANTITY SENSOR
#871MEMS device with protection rings
#872PHYSICAL QUANTITY SENSOR, MANUFACTURING METHOD OF PHYSICAL QUANTITY SENSOR, AND ELECTRONIC APPARATUS
#873MICRO-ELECTROMECHANICAL DEVICE AND METHOD FOR FABRICATING THE SAME
#874Method of manufacturing a capacitive electromechanical transducer
#875MEMS device with independent rotation in two axes of rotation
#876Drive element and method for operating a drive element
#877Method of forming carbon nanotube on semiconductor substrate, method of forming semiconductor metal wire using the same, and method of fabricating inductor using the same
#878Fabrication of microstructures integrated with nanopillars along with their applications as electrodes in sensors
#879Polymer pattern and metal film pattern, metal pattern, plastic mold using thereof, and method of the forming the same
#880Microelectromechanical system diaphragm and fabricating method thereof
#881Decreased actuation voltage in MEMS devices by constraining membrane displacement without using conductive “landing pad”
#882Arrangement of micromechanical elements
#883Process for eliminating delamination between amorphous silicon layers
#884MEMS device with independent rotation in two axes of rotation
#885MEMS transducer
#886Electrical device including a functional element in a cavity
#887Contact device and method for producing the same
#888MICROELECTROMECHANICAL CAPACITOR BASED DEVICE
#889Method for manufacturing a pendulous accelerometer
#890Semiconductor device
#891Ultra-low noise MEMS piezoelectric accelerometers
#892Devices having horizontally-disposed nanofabric articles and methods of making the same
#893Assembly of a microswitch and of an acoustic resonator
#894Method for generating a micromechanical structure
#895Micro electro-mechanical system and method of manufacturing the same
#896Devices having horizontally-disposed nanofabric articles and methods of making the same
#897Method of manufacturing a MEMS device and MEMS device
#898Wafer encapsulated microelectromechanical structure and method of manufacturing same
#899Wafer encapsulated microelectromechanical structure and method of manufacturing same
#900Wafer encapsulated microelectromechanical structure and method of manufacturing same