83887 ⎘
Basic microelectromechanical structures; Type of movement Translation according to an axis parallel to the substrate
Method and Device for Measuring a Voltage
#2MEMS DEVICE
#3TRIAXIAL MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED PERFORMANCES
#4MICROELECTROMECHANICAL ACCELERATION SENSOR
#5MEMS DEVICE
#6MICRO-ELECTROMECHANICAL GYROSCOPE WITH IN-PLANE ACTUATION AND PITCH/ROLL SENSING
#7MEMS DEVICE WITH MOTION LIMITER
#8MEMS DEVICE
#9ANTI-STICTION ELECTRODES
#10Piezoelectric Motion Limiters for MEMS Autofocus Actuator
#11MEMS ELECTRICALLY CONNECTED PRECISION MOTION STAGE WITH POSITION SENSOR
#12COUPLING DEVICE FOR COUPLING VIBRATION SYSTEMS
#13MICROELECTROMECHANICAL DEVICE WITH RECOVERY FROM STICTION CONDITIONS
#14Dual-Layer Micro-ribbon MEMS Light Modulator
#15MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED VIBRATION REJECTION
#16ACCELERATION DETECTION DEVICE AND ACCELERATION SENSOR
#17IN-PLANE AND OUT-OF-PLANE ACCELEROMETER
#18MEMS STRUCTURE
#19MEMS DEVICE, NEARFIELD LOUDSPEAKER, HEARABLE, MEMS PUMP, LOUDSPEAKER AND METHOD FOR CONTROLLING AN MEMS DEVICE
#20Dual-layer micro-ribbon MEMS light modulator
#21Optoelectronic component comprising, on a single substrate, an optical transducer made of a semi-conductor material III-V and an optically scanning microelectromechanical system
#22MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE
#23Micro-electromechanical system package having movable platform
#24Multiaxial strain engineering of defect doped materials
#25MEMS HAVING A LARGE FLUIDICALLY EFFECTIVE SURFACE
#26Micromechanical structure and method of providing the same
#27Micromechanical structure, micromechanical system and method of providing a micromechanical structure
#28Sensor device and method of fabrication
#29Switchable displays with movable pixel units
#30LINEAR ACTUATOR
#31Microdevice comprising at least two movable elements
#32Sensor package having a movable sensor
#33Mechanical connection for a MEMS and NEMS device for measuring a variation in pressure, and device comprising such a mechanical connection
#34Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process
#35Sensor package having a movable sensor
#36Fabrication process for a symmetrical MEMS accelerometer
#37MEMS and method of manufacturing the same
#38Device for transmitting a movement and a force between two zones that are insulated from one another
#39Sensor package having a movable sensor
#40Manufacturing method of sensor package
#41Microelectromechanical and/or nanoelectromechanical device offering improved robustness
#42Sensor assembly and arrangement and method for manufacturing a sensor assembly
#43Physical quantity sensor, electronic device, and mobile body
#44Micromechanical sensor
#45Micromechanical structure for an acceleration sensor
#46Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process
#47Multi-axis accelerometers with reduced cross-axis sensitivity
#48MEMS transducer for interacting with a volume flow of a fluid and method for manufacturing the same
#49INERTIA SENSOR
#50Microelectromechanical system with spring for magnet placement
#51Contact point structure, electronic device, and electronic apparatus
#52Systems and methods for a MEMS actuation systems device with one or more slidable connection assemblies
#53MEMS actuation systems and methods
#54Composite vibratory in-plane accelerometer
#55Acceleration sensor having spring force compensation
#56Miniature kinetic energy harvester for generating electrical energy from mechanical vibrations
#57Electrostatic actuator and switch
#58OPTICAL ELEMENT
#59Fabrication process for a symmetrical MEMS accelerometer
#60Rapid micro electro mechanical system switching apparatus
#61Microelectromechanical displacement structure and method for controlling displacement
#62MICRO-ELECTROMECHANICAL APPARATUS HAVING CENTRAL ANCHOR
#63MEMS device to selectively measure excitation in different directions
#64Microelectromechanical displacement structure and method for controlling displacement
#65Microelectronic packages having split gyroscope structures and methods for the fabrication thereof
#66Physical quantity sensor having a frame-shaped movable mass, electronic device, and mobile body
#67Physical quantity sensor, physical quantity sensor device, electronic apparatus, and moving object
#68Physical quantity sensor, electronic device, and mobile body
#69Display device
#70Extracting inertial information from nonlinear periodic signals
#71Micromachined monolithic 3-axis gyroscope with single drive
#72Actuator, shutter device, fluid control device, switch, and two-dimensional scanning sensor device
#73Device to convert out-of-plane motion to in-plane motion and/or conversely
#74Accelerometer with little cross effect
#75Capacitive physical quantity sensor
#76Three-axis microelectromechanical systems devices
#77Micromechanical structure and method for fabricating the same
#78Symmetrical MEMS accelerometer and its fabrication process
#79Capacitive microelectronic and/or nanoelectronic device with increased compactness
#80Micro-electromechanical device comprising a mobile mass that can move out-of-plane
#81Microelectromechanical structure with frames
#82Microelectromechanical structure with motion limiter
#83Micro electromechanical system sensor and method of forming the same
#84MEMS pressure transducer assembly
#85Micropatterned component and method for manufacturing a micropatterned component
#86Display apparatus with narrow gap electrostatic actuators
#87Low-voltage MEMS shutter assemblies
#88MEMS pressure transducer assembly and method of packaging same
#89Motion conversion system
#90Display device
#91MEMS actuator/sensor
#92Electromechanical system structures with ribs having gaps
#93DRIVING APPARATUS
#94Motion conversion system
#95Capacitance type MEMS sensor
#96MEMS switches and fabrication methods
#97Reduction of the dynamic deformation of translational mirrors using inertial masses
#98MEMS dynamic pressure sensor, in particular for applications to microphone production
#99Force sensor with reduced noise
#100Polymer linear actuator for micro electro mechanical system and micro manipulator for measurement device of cranial nerve signal using the same
#101Forming a micro electro mechanical system
#102MICROMECHANICAL ACTUATOR
#103Long range travel MEMS actuator
#104Method of epitaxially growing piezoresistors
#105Multi-stable micro electromechanical switches and methods of fabricating same
#106Fabry-Perot type tunable filter and fabrication method thereof
#107Method and apparatus for electromagnetic actuation
#108Actuator using comb-tooth
#109Electromechanical transducer—artificial muscle
#110MEMS actuators with even stress distribution
#111Deflectable structure, micromechanical structure comprising same, and method for adjusting a micromechanical structure
#112Motion conversion system
#113Micro electro mechanical system
#114Polymer linear actuator for micro electro mechanical system and micro manipulator for measurement device of cranial nerve signal using the same
#115Flexible membrane comprising notches
#116Inertial sensor
#117Method of fabricating micro actuator having media stage
#118Multi-stable micro electromechanical switches and methods of fabricating same
#119Quantum tunnelling transducer device
#120Post-release capacitance enhancement in micromachined devices and a method of performing the same
#121Apparatus and method for anchoring micromachined structures
#122Micromechanical device and method of manufacture thereof
#123Dual position linear displacement micromechanism
#124Electrostatic comb drive actuator, and optical controller using the electrostatic comb drive actuator
#125Microelectricalmechanical system with improved beam suspension
#126Unilateral thermal buckle beam actuator