83886 ⎘
Basic microelectromechanical structures Type of movement
Sub-classes:Thermal metamaterial for low power MEMS thermal control
#2MEMS actuator package architecture
#3MEMS locking system
#4Microelectronic structure with viscous damping controlled by controlling a thermo-piezoresistive effect
#5MEMS device with enhanced sensing structure and manufacturing method thereof
#6MEMS actuator package architecture
#7MEMS actuator package architecture
#8MEMS component for generating pressure pulses