83888 ⎘
Basic microelectromechanical structures; Type of movement Translation according to an axis perpendicular to the substrate
MEMS DEVICE
#2MEMS DEVICE WITH MOTION LIMITER
#3MICROELECTROMECHANICAL SYSTEMS (MEMS) INTEGRATION FOR ANALOG TUNABILITY IN RECONFIGURABLE INTELLIGENT SURFACES
#4MICROELECTROMECHANICAL DEVICE FOR IMAGE SENSOR STABILIZATION PURPOSES
#5Piezoelectric Motion Limiters for MEMS Autofocus Actuator
#6MICROELECTROMECHANICAL MOTION SENSOR DEVICE HAVING A SINGLE PROOF MASS
#7METHOD FOR SENSOR STATE DETECTION, ENVIRONMENTAL SENSOR SYSTEM AND MOBILE CONSUMER DEVICE
#8MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS
#9Vehicle Operator Awareness System
#10PRESSURE VALVE FOR MICROELECTROMECHANICAL SYSTEM DIE
#11ELECTROSTATICALLY-EXCITED HERMETIC MULTI-CELL MICROELECTROMECHANICAL ACTUATOR AND PRODUCTION METHOD THEREOF
#12MICROELECTROMECHANICAL SYSTEMS (MEMS) ACTUATOR WITH MAGNETIC LATCHING AND METHODS FOR MANUFACTURING AND USING THE SAME
#13MEMS SWITCH DEVICE AND ELECTRONIC APPARATUS
#14MICROMECHANICAL Z-ACCELERATION SENSOR
#15Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt, and Piston Beamsteering
#16MEMS Device for Interaction with Fluids
#17MEMS OPTICAL MICROPHONE
#18MEMS OPTICAL MICROPHONE
#19Compliant Structure
#20MEMS with cover drive and method of operating the same
#21GRATING REFLECTOR
#22LONG STROKE MEMS ACTUATOR RESILIENT TO THE PULL-IN AND ELECTRONIC SYSTEM INCLUDING THE SAME
#23PIEZOELECTRIC MEMS ACTUATOR FOR COMPENSATING UNWANTED MOVEMENTS AND MANUFACTURING PROCESS THEREOF
#24Sensor
#25COMB-DRIVEN MEMS RESONANT SCANNER WITH FULL-CIRCUMFERENTIAL RANGE AND LARGE OUT-OF-PLANE TRANSLATIONAL DISPLACEMENT
#26MEMS Device for Large Angle Beamsteering
#27Multiaxial strain engineering of defect doped materials
#28Micromechanical structure and method of providing the same
#29Micromechanical structure, micromechanical system and method of providing a micromechanical structure
#30Manufacturing method of micro fluid actuator
#31SEMICONDUCTOR DEVICE, DISPLAY UNIT, AND ELECTRONIC APPARATUS
#32Sensor device and method of fabrication
#33MEMS device comprising a membrane and an actuator
#34Cellular array electrostatic actuator
#35Vehicle operator awareness system
#36Optical non-uniformity correction (NUC) for active mode imaging sensors using micro-electro-mechanical system (MEMS) micro-mirror arrays (MMAs)
#37Electronically steered inter-satellite optical communication system with micro-electromechanical (MEM) micromirror array (MMA)
#38Piezoelectric MEMS actuator for compensating unwanted movements and manufacturing process thereof
#39Method of manufacturing a microelectromechanical systems (MEMS) device
#40Sidewall stopper for MEMS device
#41Post-processing techniques on mems foundry fabricated devices for large angle beamsteering
#42Deployable KiriForm flexures
#43Out-of-plane hinge for micro and nanoelectromechanical systems with reduced non-linearity
#44MEMS device comprising a membrane and an actuator
#45MEMS actuator package architecture
#46Fence structure to prevent stiction in a MEMS motion sensor
#47MEMS actuation systems and methods
#48Sidewall stopper for MEMS device
#49Micromechanical component including diaphragm, manufacturing method for such a component and method for operating a pressure sensor
#50MEMS microphone
#51Actuator plate partitioning and control devices and methods
#52Integrated mechanical device with vertical movement
#53Micromechanical spring structure
#54Actuating and sensing module
#55Fence structure to prevent stiction in a MEMS motion sensor
#56MEMS device for large angle beamsteering
#57MEMS device comprising a membrane and an actuator
#58Electrostatic actuator with tri-electrode topology
#59MEMS pressure sensing element
#60Microelectromechanical component
#61Devices for deflecting a laser beam in a two-dimensional manner
#62Microelectronic devices for isolating drive and sense signals of sensing devices
#63MEMS sound transducer, MEMS microphone and method for providing a MEMS sound transducer
#64Piezo-electric actuators
#65Systems and methods for micro-cantilever actuation by base excitation
#66Microelectromechanical system microphone
#67Flexure-based, tip-tilt-piston actuation micro-array
#68Contact point structure, electronic device, and electronic apparatus
#69MEMS actuation systems and methods
#70Microelectromechanical or/and nanoelectromechanical device with out-of-plane displacement having capacitive elements having a variable surface
#71Electric connection flexures
#72MEMS acoustic transducer with combfingered electrodes and corresponding manufacturing process
#73MEMS actuator, system having a plurality of MEMS actuators, and method for producing a MEMS actuator
#74Epi-poly etch stop for out of plane spacer defined electrode
#75MICRO-ELECTROMECHANICAL APPARATUS HAVING CENTRAL ANCHOR
#76MEMS actuator package architecture
#77Refractory seed metal for electroplated MEMS structures
#78Microelectronic packages having split gyroscope structures and methods for the fabrication thereof
#79Systems and methods for a time-based optical pickoff for MEMS sensors
#80System and methods for highly integrated optical readout MEMS sensors
#81Micromachined monolithic 3-axis gyroscope with single drive
#82Electromechanical system substrate attachment for reduced thermal deformation
#83Translating Z axis accelerometer
#84MEMS electrostatic actuator device for RF varactor applications
#85Device for converting thermal energy into electrical energy
#86Epi-poly etch stop for out of plane spacer defined electrode
#87Resonance Frequency Adjustment Module
#88MEMS device
#89MEMS electrostatic actuator
#90Micromechanical Z-sensor
#91Integrated mechanical device with vertical movement
#92ELECTRONIC DEVICE
#93Inertial sensor and method of manufacturing the same
#94MEMS device
#95Actuator plate partitioning and control devices and methods
#96Integrated structure with bidirectional vertical actuation
#97MEMS autofocus actuator
#98MEMS electrostatic actuator
#99Surface mount actuator
#100Out-of plane travel restriction structures
#101Electrostatic force generator and force measurement system and accelerometer having the same
#102Vertical pressure sensitive structure
#103Surface mount actuator
#104Rotationally deployed actuator devices
#105Capacitive transducer and methods of manufacturing and operating the same
#106Pressure measurement device having an optimized sensitivity
#107ELECTROMECHANICAL DEVICE CONFIGURED TO MINIMIZE STRESS-RELATED DEFORMATION AND METHODS FOR FABRICATING SAME
#108Fabricating MEMS composite transducer including compliant membrane
#109Forming a membrane having curved features
#110MEMS sensor with movable Z-axis sensing element
#111Micromechanical component
#112Method for creating a micromechanical membrane structure and MEMS component
#113MEMS actuator device deployment
#114Micromechanical component and manufacturing method for a micromechanical component
#115MEMS element and method for manufacturing same
#116Inertial sensor and method of manufacturing the same
#117Microstructure and method of manufacturing the same
#118Electromechanical devices having support structures
#119Microactuator, optical device and exposure apparatus, and device manufacturing method
#120Actuator apparatus with comb-drive component and methods useful for manufacturing and operating same
#121MEMS devices having overlying support structures
#122Micromechanical assembly having a displaceable component
#123Translating and rotation micro mechanism
#124Forming a micro electro mechanical system
#125METHODS FOR FORMING LAYERS WITHIN A MEMS DEVICE USING LIFTOFF PROCESSES
#126Membrane, especially for an optical device having a deformable membrane
#127Electrothermal microactuator for large vertical displacement without tilt or lateral shift
#128Physical quantity sensor
#129Electromechanical device configured to minimize stress-related deformation and methods for fabricating same
#130Display device with openings between sub-pixels and method of making same
#131MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same
#132Methods for forming layers within a MEMS device using liftoff processes
#133Process for producing fluorocarbon microstructure, fluorocarbon microstructure, and microsystem
#134PREMOLD HOUSING HAVING INTEGRATED VIBRATION ISOLATION
#135Methods of fabricating MEMS devices having overlying support structures
#136Decreased actuation voltage in MEMS devices by constraining membrane displacement without using conductive “landing pad”
#137Arrangement of micromechanical elements
#138MEMS based RF components with vertical motion and parallel-plate structure and manufacture thereof using standard CMOS technologies
#139MEMS DEVICE HAVING A LAYER MOVABLE AT ASYMMETRIC RATES
#140Chip housing having reduced induced vibration
#141Microactuator, optical device and exposure apparatus, and device manufacturing method
#142Switch array
#143Movable device
#144Aluminum Based Bonding of Semiconductor Wafers
#145Methods for etching layers within a MEMS device to achieve a tapered edge
#146MEMS sensor with cap electrode
#147Micro electro mechanical system
#148Sacrificial spacer process and resultant structure for MEMS support structure
#149MEMS device having distance stops
#150Electrostatic actuator and method of making the electrostatic actuator
#151Desiccant in a MEMS device
#152Method of manufacturing a MEMS device and MEMS device
#1536-axis electromagnetically-actuated meso-scale nanopositioner
#154MEMS device having a layer movable at asymmetric rates
#155Assembly process for out-of-plane MEMS and three-axis sensors
#156MEMS devices having support structures
#157MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same
#158Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge
#159MEMS device having support structures configured to minimize stress-related deformation and methods for fabricating same
#160Electromechanical devices having overlying support structures
#161Electrically controlled tiltable microstructures
#162Mems element and method of producing the same, and diffraction type mems element
#163Microactuator having increased rigidity with reduced mass
#164Micro-actuator utilizing electrostatic and lorentz forces, and micro-actuator device, optical switch and optical switch array using the same
#165Dual position linear displacement micromechanism
#166Microstructure with movable mass
#167Actuator systems and methods
#168Five degrees of freedom MEMS actuator for autofocus, optical image stabilization, and super resolution imaging in miniature cameras
#169Microphone