83889 ⎘
Basic microelectromechanical structures; Type of movement Translation in a plane parallel to the substrate, i.e. enabling movement along any direction in the plane
MICROELECTROMECHANICAL ACCELEROMETER WITH FORCE FEEDBACK LOOP
#2MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTABILITY
#3INTEGRATED OPTICAL MICROELECTRONIC MECHANICAL SYSTEMS DEVICES AND METHODS
#4TORSION SPRING ELEMENT
#5MEMS DIE AND MEMS-BASED VIBRATION SENSOR
#6PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A SINGLE SEMICONDUCTOR WAFER AND RELATED MEMS DEVICE
#7Micro-electromechanical system package having movable platform
#8MEMS actuator system
#9Sensor package having a movable sensor
#10Sensor package having a movable sensor
#11MEMS sensor compensation for off-axis movement
#12Sensor package having a movable sensor
#13Manufacturing method of sensor package
#14MEMS actuator structures resistant to shock
#15MEMS actuator structures resistant to shock
#16Droplet control and detection device, operating method thereof, and microfluidic device
#17Physical quantity sensor, complex sensor, inertial measurement unit, portable electronic device, electronic device, and vehicle
#18Multi-axis accelerometers with reduced cross-axis sensitivity
#19Miniature kinetic energy harvester for generating electrical energy from mechanical vibrations
#20MICRO-ELECTROMECHANICAL APPARATUS HAVING CENTRAL ANCHOR
#21MEMS DEVICE WITH CAPACITANCE ENHANCEMENT ON QUADRATURE COMPENSATION ELECTRODE
#22Miniature hermetic acceleration detection device
#23Micromachined monolithic 3-axis gyroscope with single drive
#24Surface mount actuator
#25Surface mount actuator
#26MICROMACHINED MOVER
#27Movable device
#286-axis electromagnetically-actuated meso-scale nanopositioner
#29Inertial sensor
#30Assembly process for out-of-plane MEMS and three-axis sensors
#31Apparatus and method for anchoring micromachined structures