ClassID:

83889

B81B2203/055 - CPC Classification

Classification description:

Basic microelectromechanical structures; Type of movement Translation in a plane parallel to the substrate, i.e. enabling movement along any direction in the plane

Recent Application in this class:
#1
20240391757
2024-11-28

MICROELECTROMECHANICAL ACCELEROMETER WITH FORCE FEEDBACK LOOP

#2
20230373781
2023-11-23

MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTABILITY

#3
20230358975
2023-11-09

INTEGRATED OPTICAL MICROELECTRONIC MECHANICAL SYSTEMS DEVICES AND METHODS

#4
20230219805
2023-07-13

TORSION SPRING ELEMENT

#5
20230192475
2023-06-22

MEMS DIE AND MEMS-BASED VIBRATION SENSOR

#6
20230107094
2023-04-06

PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A SINGLE SEMICONDUCTOR WAFER AND RELATED MEMS DEVICE

#7
20230002214
2023-01-05

Micro-electromechanical system package having movable platform

#8
20210088804
2021-03-25

MEMS actuator system

#9
20210053817
2021-02-25

Sensor package having a movable sensor

#10
20200172391
2020-06-04

Sensor package having a movable sensor

#11
20190359479
2019-11-28

MEMS sensor compensation for off-axis movement

#12
20190308872
2019-10-10

Sensor package having a movable sensor

#13
20190241426
2019-08-08

Manufacturing method of sensor package

#14
20190152765
2019-05-23

MEMS actuator structures resistant to shock

#15
20190152764
2019-05-23

MEMS actuator structures resistant to shock

#16
20190092623
2019-03-28

Droplet control and detection device, operating method thereof, and microfluidic device

#17
20190064204
2019-02-28

Physical quantity sensor, complex sensor, inertial measurement unit, portable electronic device, electronic device, and vehicle

#18
20180188283
2018-07-05

Multi-axis accelerometers with reduced cross-axis sensitivity

#19
20170373611
2017-12-28

Miniature kinetic energy harvester for generating electrical energy from mechanical vibrations

#20
20170184628
2017-06-29

MICRO-ELECTROMECHANICAL APPARATUS HAVING CENTRAL ANCHOR

#21
20170138734
2017-05-18

MEMS DEVICE WITH CAPACITANCE ENHANCEMENT ON QUADRATURE COMPENSATION ELECTRODE

#22
20170059607
2017-03-02

Miniature hermetic acceleration detection device

#23
20160264404
2016-09-15

Micromachined monolithic 3-axis gyroscope with single drive

#24
20140055971
2014-02-27

Surface mount actuator

#25
20130077948
2013-03-28

Surface mount actuator

#26
20090190254
2009-07-30

MICROMACHINED MOVER

#27
20090021884
2009-01-22

Movable device

#28
20070220882
2007-09-27

6-axis electromagnetically-actuated meso-scale nanopositioner

#29
20070180912
2007-08-09

Inertial sensor

#30
20070087474
2007-04-19

Assembly process for out-of-plane MEMS and three-axis sensors

#31
20050262942
2005-12-01

Apparatus and method for anchoring micromachined structures