83890 ⎘
Basic microelectromechanical structures; Type of movement Rotation in a plane parallel to the substrate
DESIGNS AND METHODS FOR MAUFACTURING OUT-OF-PLANE ROTATION STOPS FOR MEMS DEVICES
#2ACOUSTIC RESONATING DEVICES AND ASSEMBLIES
#3TRIAXIAL MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED PERFORMANCES
#4MICROELECTROMECHANICAL ACCELERATION SENSOR
#5MICROELECTROMECHANICAL STRUCTURE WITH IMPROVED MECHANICAL ROBUSTNESS
#63-AXIS ANGULAR ACCELEROMETER
#7THREE-AXIS GYROSCOPE
#8MICRO-ELECTROMECHANICAL GYROSCOPE WITH IN-PLANE ACTUATION AND PITCH/ROLL SENSING
#9MEMS TRANSDUCER
#10MEMS SENSOR HAVING A HIGH ROBUSTNESS AGAINST THE STICTION PHENOMENON
#11HIGH-Q MICROMECHANICAL TORSION RESONATOR BASED ON SUSPENDING A TEST MASS FROM A NANORIBBON
#12ACCELERATION SENSOR
#13NANO ELECTROMECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF
#14ANTI-STICTION ELECTRODES
#15MEMS Device
#16MEMS ELECTRICALLY CONNECTED PRECISION MOTION STAGE WITH POSITION SENSOR
#17MICROMECHANICAL INERTIAL SENSOR, AND METHOD FOR OPERATING A MICROMECHANICAL INERTIAL SENSOR
#18Inertial Sensor
#19Three-axis Gyroscope
#20MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED VIBRATION REJECTION
#21METHOD FOR CONTROLLING A MICROELECTROMECHANICAL SYSTEM
#22STOPPER BUMP ON ROTOR
#23MOTION LIMITER WITH REDUCED STICTION
#24MEMS transducer
#25A SCANNING MEMS MIRROR DEVICE
#26MICRO SCANNING MIRROR
#27MEMS transducer
#28Anchor structure for reducing temperature-based error
#29BIDIRECTIONAL MEMS DRIVING ARRANGEMENTS WITH A FORCE ABSORBING SYSTEM
#303-axis angular accelerometer
#31Multiaxial strain engineering of defect doped materials
#32Micromachined multi-axis gyroscopes with reduced stress sensitivity
#33Switchable displays with movable pixel units
#34MEMS element with increased density
#35Waterproof MEMS button device, input device comprising the MEMS button device and electronic apparatus
#36BIDIRECTIONAL MEMS DRIVING ARRANGEMENTS WITH A FORCE ABSORBING SYSTEM
#373-axis angular accelerometer
#38Multidirectional translating and tilting platform using bending actuators as active entity
#39Microelectronic sensor device with an out-of-plane detection having a controlled cross sensitivity
#40Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis
#41Actuator, optical scanning device, and manufacturing methods
#42Micromachined multi-axis gyroscopes with reduced stress sensitivity
#43Bidirectional MEMS driving arrangements with a force absorbing system
#44Micro-electro-mechanical device having tiltable structure, with detection of the position of the tiltable structure
#45Physical quantity sensor
#46Movable reflection device and reflection surface drive system utilizing same
#47Device and method for quasi-resonant-mode voltage control of a switching converter
#48Micro-electro-mechanical device having a tiltable structure, with detection of the position of the tiltable structure
#49Miniature kinetic energy harvester for generating electrical energy from mechanical vibrations
#50Micromechanical component and method for adjusting an adjustable part simultaneously about two axes of rotation inclined in relation to one another
#513-axis angular accelerometer
#52Micromachined monolithic 3-axis gyroscope with single drive
#53Mechanical component and manufacturing method for a mechanical component
#54Micromechanical sensor with multiple spring bars
#55CMOS-compatible movable microstructure based devices
#56Method for fabricating lateral-moving micromachined thermal bimorph
#57Radially Staged Microscale Turbomolecular Pump
#58Movable device
#59Mems moving platform with lateral zipping actuators
#60Calibration for automated microassembly
#61Micro-mirror with rotor structure
#62Nanostructured liquid bearing
#63Optical scanning using vibratory diffraction gratings