83891 ⎘
Basic microelectromechanical structures; Type of movement Rotation out of a plane parallel to the substrate
High-Frequency BIAXIAL Bi-Resonant Microelectromechanical Mirror Structure
#2MEMS DEVICE
#3LIGHT DEFLECTOR
#4TRIAXIAL MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED PERFORMANCES
#5NON-CONTACT MICROELECTROMECHANICAL SYSTEMS
#6MICROELECTROMECHANICAL STRUCTURE WITH IMPROVED MECHANICAL ROBUSTNESS
#7THREE-AXIS GYROSCOPE
#8MEMS DEVICE WITH MOTION LIMITER
#9MEMS DEVICE HAVING A TILTABLE STRUCTURE AND QUASI-STATIC PIEZOELECTRIC ACTUATION, IN PARTICULAR MICROMIRROR, WITH IMPROVED EFFICIENCY
#10DRIVE ELEMENT AND OPTICAL DEFLECTION ELEMENT
#11ELECTROSTATIC ACTUATOR
#12MICROELECTROMECHANICAL SYSTEMS DEVICE AND METHOD FOR FORMING THE SAME
#13ACTUATOR DEVICE
#14MEMS SENSOR HAVING A HIGH ROBUSTNESS AGAINST THE STICTION PHENOMENON
#15ACCELERATION SENSOR
#16MEMS ACCELEROMETER HAVING A HIGH MECHANICAL ROBUSTNESS
#17MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE
#18MEMS DEVICE
#19ANTI-STICTION ELECTRODES
#20MEMS Device
#21MICROELECTROMECHANICAL MOTION SENSOR DEVICE HAVING A SINGLE PROOF MASS
#22COMB STRUCTURE FOR MEMS ACCELEROMETER
#23MICROELECTROMECHANICAL DEVICE WITH RECOVERY FROM STICTION CONDITIONS
#24Inertial Sensor
#25Three-axis Gyroscope
#26PIEZOELECTRIC ACTUATING APPARATUS
#27ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS
#28OPTICAL REFLECTIVE DEVICE
#29IN-PLANE AND OUT-OF-PLANE ACCELEROMETER
#30SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY
#31MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION
#32Actuator device
#33Fabrication of MEMS device with automated dispensing of damping fluid and viscosity control
#34MEMS device with damping fluid vertically sandwiched between moving and non-moving structures
#35Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt, and Piston Beamsteering
#36SCANNING MIRROR SYSTEMS AND METHODS OF MANUFACTURE
#37MEMS device with improved dynamic mechanical performance through damping by localized viscoelastic medium
#38FLIP CHIP MICROMIRROR TECHNOLOGY
#39PIEZOELECTRIC DRIVE ELEMENT
#40Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics
#41TORSION SPRING ELEMENT
#42PIEZOELECTRIC MEMS ACTUATOR FOR COMPENSATING UNWANTED MOVEMENTS AND MANUFACTURING PROCESS THEREOF
#43MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE
#44LIGHT SCANNER PACKAGE AND METHOD FOR MANUFACTURING SAME
#45Optical scanning system using micro-electro-mechanical system (mems) micro-mirror arrays (MMAs)
#46MICROACTUATOR APPARATUS AND SYSTEM
#47MEMS device with improved dynamic mechanical performance through damping by localized viscoelastic medium
#48MICRO-ELECTRO-MECHANICAL SYSTEMS AND PREPARATION METHOD THEREOF
#49Sensor
#50Thermal metamaterial for low power MEMS thermal control
#51Actuator device
#52COMB-DRIVEN MEMS RESONANT SCANNER WITH FULL-CIRCUMFERENTIAL RANGE AND LARGE OUT-OF-PLANE TRANSLATIONAL DISPLACEMENT
#53MEMS Device for Large Angle Beamsteering
#54Electrode configuration for tilting micro-electro-mechanical systems mirror
#55Micromechanical structure and method of providing the same
#56Micromechanical structure, micromechanical system and method of providing a micromechanical structure
#57MEMS and method of manufacturing the same
#58Physical quantity sensor, electronic apparatus, and vehicle
#59Self-aligned vertical comb drive assembly
#60MEMS device
#61Hinged microelectromechanical and/or nanoelectromechanical device with out-of-plane movement
#62Piezoelectric MEMS actuator for compensating unwanted movements and manufacturing process thereof
#63MICROMECHANICAL COIL DEVICE
#64MEMS device with optimized geometry for reducing the offset due to the radiometric effect
#65Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics
#66Multidirectional translating and tilting platform using bending actuators as active entity
#67Actuator device
#68Light deflection device, distance measurement device, and mobile body
#69MICRO-MECHANICAL DEVICE WITH LOCAL ELECTROMAGNETIC ACTUATION
#70Linearized micromechanical sensor
#71Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis
#72MMS, MMS array, MEMS actuator and method for providing an MMS
#73Device for transmitting a movement and a force between two zones that are insulated from one another
#74Forming an offset in an interdigitated capacitor of a microelectromechanical systems (MEMS) device
#75Actuator, optical scanning device, and manufacturing methods
#76Actuator
#77Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof
#78Physical quantity sensor, complex sensor, inertial measurement unit, portable electronic device, electronic device, and vehicle
#79Rotation rate sensor, method for manufacturing a rotation rate sensor
#80MEMS device for large angle beamsteering
#81Actuator device
#82Actuator device
#83Devices for deflecting a laser beam in a two-dimensional manner
#84Micromechanical constituent and method for adjusting an adjustable element
#85Compact modular scanners for scanning laser devices
#86Flexure-based, tip-tilt-piston actuation micro-array
#87Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof
#88Micromechanical spring device and method for manufacturing a micromechanical spring device
#89Micromechanical component and method for adjusting an adjustable part simultaneously about two axes of rotation inclined in relation to one another
#90MEMS device and process
#91Motion controlled actuator
#92Electrical tuning of resonant scanning
#93Micromirror device and projection device
#94MICROMECHANICAL COMPONENT HAVING TWO AXES OF OSCILLATION AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT
#95Drive apparatus
#96MEMS device
#97Micromirror arrangement
#98Micromachined monolithic 3-axis gyroscope with single drive
#99MEMS electrostatic actuator device for RF varactor applications
#100In-plane-strain-actuated out-of-plane actuator
#101MEMS accelerometer with Z axis anchor tracking
#102Three-axis microelectromechanical systems devices
#103Electrostatic actuator and method for producing the same
#104Micro-electromechanical device comprising a mobile mass that can move out-of-plane
#105Optical scanner, image display device, and head mounted display
#106MEMS DEVICE
#107Detecting failure of scanning mirror
#108Microelectromechanical device with motion limiters
#109MEMS electrostatic actuator
#110Electrostatically driven MEMS device
#111Microelectromechanical component and corresponding production method
#112Micromechanical sensor and method for manufacturing a micromechanical sensor
#113MEMS device and methods for manufacturing and using same
#114Electromagnetic actuator for optical device to reduce temperature and deformation
#115Mechanical connection forming a pivot for MEMS and NEMS mechanical structures
#116Micro-electromechanical structure with low sensitivity to thermo-mechanical stress
#117MEMS device having variable gap width and method of manufacture
#118Stiction resistant mems device and method of operation
#119Mechanical component and manufacturing method for a mechanical component
#120Motion controlled actuator
#121MEMS device with independent rotation in two axes of rotation
#122Micromechanically assembly, method for manufacturing a micromechanical assembly and method for operating a micromechanical assembly
#123Light deflector
#124Microelectromechanical sensor with out-of-plane sensing and process for manufacturing a microelectromechanical sensor
#125Motion conversion system
#126COMB ELECTRODE STRUCTURE
#127Microelectromechanical system device with electrical interconnections and method for fabricating the same
#128Micromechanical component, intermediate product produced by a manufacturing method, and manufacturing method for a micromechanical component
#129METHOD OF PREVENTING STICTION OF MEMS DEVICES
#130Method for forming a mirror MEMS device
#131Pivotable MEMS device
#132NEMS comprising AlSi alloy based transducer
#133ACTUATOR, OPTICAL SCANNER, AND IMAGE FORMING APPARATUS
#134DRIVING APPARATUS
#135DRIVING APPARATUS
#136Motion conversion system
#137MEMS device and methods for manufacturing and using same
#138MEMS device having variable gap width and method of manufacture
#139Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#140Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#141Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#142Motion controlled actuator
#143Micromirror unit and method of making the same
#144Cascaded micromechanical actuator structure
#145SENSOR AND METHOD FOR MANUFACTURING A SENSOR
#146Microactuator, optical device and exposure apparatus, and device manufacturing method
#147Optical scanner
#148Process for fabricating MEMS devices
#149Piezoelectric actuator, optical reflection element using the same and piezoelectric driver
#150Multi-axis, large tilt angle, wafer level micromirror array for large scale beam steering applications
#151Translating and rotation micro mechanism
#152MEMS DEVICE AND METHOD OF FABRICATING THE MEMS DEVICE
#153MEMS device and fabrication method of the same
#154MEMS device with independent rotation in two axes of rotation
#155OPTIMIZED BI-DIRECTIONAL ELECTROSTATIC ACTUATORS
#156MEMS device with integrated via and spacer
#157Oscillator device
#158Micro movable element and micro movable element array
#159MEMS device and a MEMS device array
#160Micro movable device and optical switching apparatus
#161Actuator, image projection apparatus and production method for actuator
#162MINUTE FLOW PATH STRUCTURE BODY AND DIE
#163Arrangement of micromechanical elements
#164MEMS device with independent rotation in two axes of rotation
#165Microactuator, optical device and exposure apparatus, and device manufacturing method
#166Micro-oscillating element and method of making the same
#167Micro-structure fabrication method
#168Movable device
#169Micro-oscillation element provided with weight portion, and array utilizing the same
#170Micro-electro-mechanical system micro mirror
#171Deflectable structure, micromechanical structure comprising same, and method for adjusting a micromechanical structure
#172Method of fabricating a micromechanical structure out of two-dimensional elements and micromechanical device
#173Vertical Comb Drive and Uses Thereof
#174Apparatus, method and system for providing enhanced mechanical protection of thin beams
#175MEMS device and fabrication method of the same
#176Actuator, optical scanner and image forming device
#177Motion conversion system
#178NON-CONTACT MICRO MIRRORS
#179Micromirror device with a hybrid actuator
#180Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#181Large area induced assembly of nanostructures
#182Micromechanical Component With Active Elements and Method Producing a Component of This Type
#183MEMS device
#184Hinge assembly for a digital micromirror device
#185Reflective spatial light modulator with high stiffness torsion spring hinge
#186Tiltable-body apparatus, and method of fabricating the same
#187Staggered vertical comb drive fabrication method
#1886-axis electromagnetically-actuated meso-scale nanopositioner
#189Flexible membrane comprising notches
#190Magnetically actuated microelectromechanical systems actuator
#191Micromirror and micromirror device
#192Out-of-plane electrostatic actuator
#193Micro-mechanical beam protective support structures wherein at least two adjacent support structures touch each other upon reaching a predetermined bending action
#194Torsion spring for MEMS structure
#195Micromirror unit and method of making the same
#196MEMS actuator
#197Minute flow path structure body and die
#198Electrically controlled tiltable microstructures
#199Device and method for stacked multi-level uncoupled electrostatic actuators
#200TMOS-infrared uncooled sensor and focal plane array
#201Tiltable-body apparatus, and method of fabricating the same
#202Micro-oscillating element and method of making the same
#203Magnetically actuated microelectromechanical systems actuator
#204Micromechanical actuator with multiple-plane comb electrodes and methods of making
#205Microactuator having increased rigidity with reduced mass
#206Dimensions for a MEMS scanning mirror with ribs and tapered comb teeth
#207Micro-machined electromechanical system (MEMS) accelerometer device having arcuately shaped flexures
#208Micro mirror device with adjacently suspended spring and method for the same
#209Micromechanical actuator with multiple-plane comb electrodes and methods of making
#210Electrode design and positioning for controlled movement of a moveable electrode and associated support structure
#211Micromirror unit and method of making the same
#212Method for supplying multiple voltages to a movable part of a MEMS device
#213Micro-oscillating element provided with torsion bar
#214MEMS device and method of forming MEMS device
#215Tiltable-body apparatus, and method of fabricating the same
#216Microstructure with movable mass
#217Microfabricated torsional drive utilizing lateral electrostatic force