83897 ⎘
Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS Smart-MEMS not provided for in -
COMPACT ENHANCED SENSITIVITY TEMPERATURE SENSOR USING AN ENCAPSULATED CLAMPED-CLAMPED MEMS BEAM RESONATOR
#2PROTECTIVE BONDLINE CONTROL STRUCTURE
#3Semiconductor device and method for manufacturing a semiconductor device
#4MEMS sensor as well as method for operating a mems sensor
#5Apparatus having a bondline structure and a diffusion barrier with a deformable aperture
#6Sound producing device
#7Sound producing device
#8CMOS-MEMS integrated device including multiple cavities at different controlled pressures and methods of manufacture
#9System with an increased surface density of microelectromechanical or nanoelectromechanical devices
#10SYSTEMS AND METHODS FOR SELECTING AN OPERATING VOLTAGE OF A DISPLAY APPARATUS
#11Micromechanical sensor device
#12CMOS-MEMS integrated device including multiple cavities at different controlled pressures and methods of manufacture
#13Method and apparatus for a semiconductor structure
#14Methods for forming a micro electro-mechanical device
#15Shielding for a micro electro-mechanical device and method therefor
#16METHOD OF FABRICATING MICRO ELECTRO-MECHANICAL COMPONENT
#17Stacked MEMS device
#18Alignment method of two substrates by microcoils
#19Stacked MEMS device
#20Stacked mounting structure