B81B2207/00 - CPC Classification

Microstructural systems or auxiliary parts thereof

• B81B2207/01 » comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS 16
• B81B2207/03 » Electronic circuits for micro-mechanical devices which are not application specific, e.g. for controlling, power supplying, testing, protecting. 123
• B81B2207/05 » Arrays 28
• B81B2207/07 » Interconnects 661
• B81B2207/09 » Packages 77
• B81B2207/11 » Structural features, others than packages, for protecting a device against environmental influences 46
• B81B2207/99 » Micro-structural systems or auxiliary parts thereof not provided for in to 37