83898 ⎘
Microstructural systems or auxiliary parts thereof Electronic circuits for micromechanical devices which are not application specific, e.g. for controlling, power supplying, testing, protecting
MEMS APPARATUS FOR FORMING PHYSICAL UNCLONABLE FUNCTION KEY AND OPERATION METHOD OF MEMS APPARATUS
#2MEMS COMPONENT COMPRISING A MEMS ELEMENT HAVING A CAVITY AND COMPRISING AN ASIC COMPONENT
#3MEMS Optical Modulator Independently Controlled with Integrated ASIC Device and Making the Same
#4CONSTANT CHARGE OR CAPACITANCE FOR CAPACITIVE MICRO-ELECTRICAL-MECHANICAL SYSTEM SENSORS
#5MICROELECTROMECHANICAL SYSTEM
#6MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE
#7PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SYSTEMS
#8Controller for sound producing device with dynamic vent function
#9REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE
#10METHOD FOR DETECTING CONTAMINATION OF A MEMS SENSOR
#11MICROELECTROMECHANICAL SENSOR DEVICE WITH WAFER-LEVEL INTEGRATION OF PRESSURE AND INERTIAL DETECTION STRUCTURES AND CORRESPONDING MANUFACTURING PROCESS
#12MICROMECHANICAL COMPONENT WITH EXTERNAL CONTACTING
#13STOPPER BUMP STRUCTURES FOR MEMS DEVICE
#14MICROMECHANICAL COMPONENT AND SCANNING DEVICE
#15MEMS OPTICAL DEFLECTOR AND OPTICAL SCANNING DEVICE
#16MEMS MICROPHONE
#17Micro-electro-mechanical system fluid control
#18Venting device, manufacturing method of venting device, venting method and device
#19Microelectromechanical Systems Sensor with Frequency Dependent Input Attenuator
#20MICROELECTROMECHANICAL SENSOR DEVICE WITH IMPROVED MANAGEMENT OF A POWER-DOWN CONDITION
#21FLUIDIC SENSING ASSEMBLY WITH FLEXIBLE SUBSTRATE
#22FLUIDIC SENSING ASSEMBLY WITH THERMAL PLATFORM
#23Signal processing circuit for triple-membrane MEMS device
#24Device and method of equalizing low frequency roll off for wearable sound device
#25ACTIVE CHARGE BLEED METHODS FOR MEMS SWITCHES
#26Application specific integrated circuit (ASIC) chip, and sensor and electric toothbrush using same
#27MICROELECTROMECHANICAL MEMBRANE TRANSDUCER WITH ACTIVE DAMPER
#28MEMS DEVICE
#29Piezoelectric anti-stiction structure for microelectromechanical systems
#30CMUT-on-CMOS ultrasonic transducer by bonding active wafers and manufacturing method thereof
#31Method of electrical trimming of sensitivity and frequency response for piezoelectric MEMS
#32STOPPER BUMP STRUCTURES FOR MEMS DEVICE
#33Method to estimate phase and amplitude for control of a resonant MEMS mirror
#34MICRO ELECTRO-MECHANICAL SYSTEM SENSOR
#35Constant charge or capacitance for capacitive micro-electrical-mechanical system sensors
#36Microphone assembly with disturbance compensation
#37Reduction of ringing and intermodulation distortion in a MEMS device
#38CHARGE TRANSFER CIRCUITRY FOR MEMS DEVICES
#39SENSOR CHIP WITH A PLURALITY OF INTEGRATED SENSOR CIRCUITS
#40MANUFACTURING METHOD OF DEVICE
#41MEMS CHIP AND ELECTRIC DEVICE
#42Reduced noise MEMS device with force feedback
#43Demodulation phase calibration using external input
#44Device, package structure and manufacturing method of device
#45Piezoelectric anti-stiction structure for microelectromechanical systems
#46Semi-finished product of electronic device and electronic device
#47Scalable high-voltage control circuits using thin film electronics
#48Microphone assembly with transducer sensitivity drift compensation and electrical circuit therefor
#49Digital microphone assembly with improved mismatch shaping
#50Signal processing circuit for triple-membrane MEMS device
#51Micromechanical sensor
#52SENSOR COMPONENT INCLUDING A MICROELECTROMECHANICAL Z INERTIAL SENSOR AND METHOD FOR ASCERTAINING AN ACCELERATION WITH THE AID OF THE MICROELECTROMECHANICAL Z INERTIAL SENSOR
#53REDUNDANT SENSOR SYSTEM WITH SELF-TEST OF ELECTROMECHANICAL STRUCTURES
#54NEUROMORPHIC MICRO-ELECTRO-MECHANICAL-SYSTEM DEVICE
#55Crossover circuit
#56Microelectromechanical membrane transducer with active damper
#57Piezoelectric actuator provided with a deformable structure having improved mechanical properties and fabrication method thereof
#58Sensor control method
#59Method for detecting contamination of a MEMS sensor element
#60Methods for vibration immunity to suppress bias errors in sensor devices
#61Sound producing device
#62Position sensing circuit for an electrostatically driven MEMS device
#63Active stiction recovery
#64REDUNDANT SENSOR SYSTEM WITH SELF-TEST OF ELECTROMECHANICAL STRUCTURES
#65Micro-mirror MEMS system
#66MEMS sensor detection device and MEMS sensor system
#67Piezoelectric anti-stiction structure for microelectromechanical systems
#68Dielectric comb for MEMS device
#69Moisture detector, moisture detection method, electronic device, and log output system
#70MEMS microphone
#71Method for checking a sensor value of a MEMS sensor
#72Microfluidic device, method of using microfluidic device and micro total analysis system
#73Microelectromechanical systems sensor testing device, system and method
#74MEMS transducer system and associated methods
#75Microelectromechanical systems (MEMS) switching circuit and related apparatus
#76MEMS assembly and method for producing a MEMS assembly
#77Techniques for removing particulate from an optical surface
#78MEMS transducer system
#79Vibration apparatus
#80MEMS component and mobile device comprising the MEMS component
#81Circuit device, oscillator, electronic apparatus, and vehicle
#82Demodulation phase calibration using external input
#83MEMS sensors, methods for providing same and method for operating a MEMS sensor
#84Laser diode optical frequency modulation linearization algorithm
#85Chip-scale coherent lidar with integrated high power laser diode
#86Calibration and alignment of coherent lidar system
#87Chip-scale LIDAR with a single MEMS scanner in a compact optical package
#88Heterogeneously integrated chip-scale lidar system
#89Chip-scale LIDAR with a single 2D MEMS scanner
#90Heterogeneous integration of curved mirror structure for passive alignment in chip-scale lidar
#91Dual-laser chip-scale lidar for simultaneous range-doppler sensing
#92Microelectromechanical system and control method to control a piezoelectric drive based on an admittance or impedance of the piezoelectric drive
#93Sensor device with integrated calibration system and calibration method
#94MEMS transducer system and associated methods
#95Transducer apparatus and methods
#96MEMS sound transducer with closed control system
#97MEMS device
#98TRANSDUCER PACKAGING
#99MEMS actuation systems and methods
#100MEMS actuation systems and methods
#101MEMS device and process
#102MEMS DEVICE WITH CAPACITANCE ENHANCEMENT ON QUADRATURE COMPENSATION ELECTRODE
#103System for driving an array of MEMS structures and corresponding driving method
#104SEMICONDUCTOR DEVICE PACKAGE WITH SEAL STRUCTURE
#105Pressure sensor and packaging method thereof
#106Chip structure
#107Device and method for protecting FEOL element and BEOL element
#108Method and apparatus for a seal ring structure
#109PRESSURE SENSOR HAVING CAP-DEFINED MEMBRANE
#110Isolation structure for MEMS 3D IC integration
#111Environmental sensor structure
#112OSCILLATION CIRCUIT, OSCILLATOR, ELECTRONIC APPARATUS, MOVING OBJECT, AND CONTROL METHOD OF OSCILLATOR
#113MEMS device with constant capacitance
#114Micro electromechanical system sensor and method of forming the same
#115Substrate plate for MEMS devices
#116Micro-electro-mechanical system device and micro-electro-mechanical system compensation structure
#117Actuator drive system, optical module, and electronic apparatus
#118Sensor device with integrated calibration system and calibration method
#119Controller for actuating a micromechanical actuator, actuating system for actuating a micromechanical actuator, micro-mirror system and method for actuating a micromechanical actuator
#120Low temperature ceramic Microelectromechanical structures
#121System and method for reducing offset variation in multifunction sensor devices
#122Method for MEMS structure with dual-level structural layer and acoustic port
#123Apparatus and method for measuring phase behavior
#124Sensor with an embedded thermistor for precise local temperature measurement
#125Tester and method for testing a strip of devices
#126System and method for detecting surface charges of a MEMS device
#127Apparatus for reconfiguring an integrated waveguide
#128Method of manufacturing a switch system
#129Integrated battery and IC
#130Low temperature ceramic microelectromechanical structures
#131Seismic acquisition system and sensor based on MEMS sensor with low power consumption
#132MEMs devices