83900 ⎘
Microstructural systems or auxiliary parts thereof; Arrays of movable structures
MEMS ELEMENT
#2Monolithic Microelectromechanical Systems Based Spatial Light Modulators Including Ribbon-Type Modulators
#3PACKAGE FOR MULTIPLE LOUDSPEAKERS
#4Monolithic Microelectromechanical Systems Based Spatial Light Modulators with Two-dimensional Modulators
#5MIRROR ARRANGEMENT WITH COOLED MIRROR ELEMENTS AND LITHOGRAPHY SYSTEM
#6MICROELECTROMECHANICAL SYSTEM DEVICE WITH OFFSET MIRROR
#7INTEGRATED ULTRASONIC TRANSDUCERS
#8COMPOUND SENSOR AND MANUFACTURING METHOD
#9MEMS ELECTRICALLY CONNECTED PRECISION MOTION STAGE WITH POSITION SENSOR
#10MICROELECTROMECHANICAL DEVICE AND MICROELECTROMECHANICAL LOUDSPEAKER
#11ACOUSTIC DETECTION SYSTEM AND METHOD AND ASSOCIATED KINETIC ENERGY HARVESTER
#12METHODS OF MANUFACTURE OF MEMS MIRROR ARRAYS WITH REDUCED CROSSTALK
#13MEMS OPTICAL CIRCUIT SWITCH
#14ULTRASONIC IMAGING SYSTEM AND METHOD
#15MEMS Device for Interaction with Fluids
#16MEMS, METHOD OF MANUFACTURING AN MEMS AND METHOD OF CONFIGURING AN MEMS
#17ACTIVE CHARGE BLEED METHODS FOR MEMS SWITCHES
#18MEMS DEVICE WITH AN IMPROVED CAP AND RELATED MANUFACTURING PROCESS
#19System for Converting Vibrations, in Particular Sound Vibrations into Usable Electric Energy
#20Microelectromechanical Acoustic Pressure-Generating Device with Improved Drive
#21Integrated ultrasonic transducers
#22INTEGRATED SHOWERHEAD
#23Distributed MEMS Switch Array Design with Multiple Input/Output Ports
#24MEMS MIRROR AND MEMS MIRROR ARRAY SYSTEM
#25Piezoelectric Micromachined Ultrasonic Transducer
#26FLEXIBLE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER ARRAYS
#27Optical scanning system using micro-electro-mechanical system (mems) micro-mirror arrays (MMAs)
#28Method for sealing cavities using membranes
#29Thermal metamaterial for low power MEMS thermal control
#30SUBMILLIMETER-WAVE PHASED ARRAYS FOR ELECTRONIC BEAM SCANNING
#31MEMS mirror arrays with reduced crosstalk
#32Micro-acoustic wafer-level package and method of manufacture
#33Micromechanical sensor unit and method for manufacturing a micromechanical sensor unit
#34SEMICONDUCTOR DEVICE, DISPLAY UNIT, AND ELECTRONIC APPARATUS
#35Integrated ultrasonic transducers
#36Charge pump systems, devices, and methods
#37Charge pump systems, devices, and methods
#38Integrated ultrasonic transducers
#39Charge pump systems, devices, and methods
#40Surface topography with ferromagnetic polymer pillars capable of movement in response to magnetic fields
#41Microelectromechanical and/or nanoelectromechanical device offering improved robustness
#42MEMS ELEMENTS ON NON-PLANAR SURFACE
#43Environmental sensor and manufacturing method thereof
#44Charge pump systems, devices, and methods
#45MEMS pressure sensing element
#46Contact pads for electrical module assembly with multidimensional transducer arrays
#47Charge pump systems, devices, and methods
#48Microelectromechanical device with multiple hinges
#49Microelectromechanical system (MEMS) on application specific integrated circuit (ASIC)
#50Ultrasonic transducer element, method of manufacturing the same, and ultrasonic image pickup device
#51System and method for wafer-scale fabrication of free standing mechanical and photonic structures by ion beam etching
#52Anodically bonded vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT)
#53Microelectromechanical system (MEMS) on application specific integrated circuit (ASIC)
#54System with an increased surface density of microelectromechanical or nanoelectromechanical devices
#55Use of shear to incorporate tilt into the microstructure of reversible gecko-inspired adhesives
#56Mixed-technology combination of programmable elements
#57System for driving an array of MEMS structures and corresponding driving method
#58MEMS devices on flexible substrate
#59SYSTEMS AND METHODS FOR SELECTING AN OPERATING VOLTAGE OF A DISPLAY APPARATUS
#60ENVIRONMENTALLY RESPONSIVE OPTICAL MICROSTRUCTURED HYBRID ACTUATOR ASSEMBLIES AND APPLICATIONS THEREOF
#61Microelectromechanical system (MEMS) on application specific integrated circuit (ASIC)
#62Hinged MEMS diaphragm
#63APERTURE PLATE PERIMETER ROUTING USING ENCAPSULATED SPACER CONTACT
#64Silicon wafer with a plurality of chip patterns
#65Use of shear to incorporate tilt into the microstructure of reversible gecko-inspired adhesives
#66Display device and method for manufacturing the same
#67Chip level sensor with multiple degrees of freedom
#68DEVICES AND METHODS FOR PROTECTING ELECTROMECHANICAL DEVICE ARRAYS
#69Graphene windows, methods for making same, and devices containing same
#70Display device and method for manufacturing the same
#71Nonvolatile nano-electromechanical system device
#72Laser rangefinder
#73METHODS FOR ALIGNED TRANSFER OF THIN MEMBRANES TO SUBSTRATES
#74Sensor device and manufacturing method thereof
#75SENSOR ARRAY
#76High aspect ratio adhesive structure and a method of forming the same
#77Semiconductor device using a silicon wafer with a pattern arrangement
#78Configurable power supply using MEMS switch
#79Nonvolatile nano-electromechanical system device
#80Method of manufacturing an ultrasonic transducer semiconductor device
#81Method for fabrication an electrical transducer
#82Display device with openings between sub-pixels and method of making same
#83Apparatus and method using patterned array with separated islands
#84Method of epitaxially growing piezoresistors
#85Device containing plurality of smaller MEMS devices in place of a larger MEMS device
#86NANO MATERIAL CLUSTER STRUCTURE
#87Substrate bonding method and electronic component thereof
#88APPLIANCE-SUPPORTING STRAP SYSTEM AND METHOD
#89Actuator systems and methods