83913 ⎘
Microstructural systems or auxiliary parts thereof; Structural features, others than packages, for protecting a device against environmental influences Protective layers applied directly to the device before packaging
METHODS AND APPARATUS FOR ELECTRONIC DEVICE PACKAGING
#2ASYMMETRIC FILLER AS TEMPERATURE TRANSIENT FIX
#3METHOD FOR DETECTING CONTAMINATION OF A MEMS SENSOR
#4PRESSURE SENSING MODULE AND MANUFACTURING METHOD THEREOF
#5MICRO-ELECTROMECHANICAL PACKAGING STRUCTURE
#6A MICROFLUIDIC SENSOR
#7MICRO-ELECTROMECHANICAL SYSTEM (MEMS) INCLUDING TANTALUM AS A STRUCTURAL MATERIAL
#8METHODS AND APPARATUS FOR ELECTRONIC DEVICE PACKAGING
#9PIEZOELECTRIC MEMS DEVICE WITH THERMAL COMPENSATION FROM DIFFERENT MATERIAL THICKNESSES
#10PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A SINGLE SEMICONDUCTOR WAFER AND RELATED MEMS DEVICE
#11PIEZOELECTRIC MEMS DEVICE WITH THERMAL COMPENSATION FROM DIFFERENT MATERIAL PROPERTIES
#12PIEZOELECTRIC MEMS DEVICE WITH THERMAL COMPENSATION FROM ONE OR MORE COMPENSATION LAYERS
#13MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE
#14Micromechanical component for a sensor device and manufacturing method for a micromechanical component for a sensor device
#15Support structure for MEMS device with particle filter
#16Method for producing monolithic integration of piezoelectric micromachined ultrasonic transducers and CMOS
#17Support structure for MEMS device with particle filter
#18PACKAGE STRUCTURE OF MICRO-ELECTRO-MECHANICAL-SYSTEM (MEMS) MICROPHONE PACKAGE AND PACKAGING METHOD THEREOF
#19ELEVATED MEMS DEVICE IN A MICROPHONE WITH INGRESS PROTECTION
#20CHIP PACKAGE AND CHIP PACKAGING METHOD
#21Monolithic integration of piezoelectric micromachined ultrasonic transducers and CMOS and method for producing the same
#22Elevated MEMS device in a microphone with ingress protection
#23Membrane for a capacitive MEMS pressure sensor and method of forming a capacitive MEMS pressure sensor
#24Micro-electro-mechanical system structure and method for forming the same
#25Semiconductor structure and manufacturing method thereof
#26Wafer-level package with enhanced performance
#27Method and system for CMOS based MEMS bump stop contact damage prevention
#28Membrane of amorphous carbon and MEMS including such a membrane
#29Semiconductor pressure sensor for harsh media application
#30Micro-electro-mechanical system structure and method for forming the same
#31Refractory seed metal for electroplated MEMS structures
#32Stress isolation features for stacked dies
#33Anodic bonding of dielectric substrates
#34Method for applying a structured coating to a component
#35Method of selectively removing an anti-stiction layer on a eutectic bonding area
#36Multi-level getter structure and encapsulation structure comprising such a multi-level getter structure
#37Physical quantity sensor, method for manufacturing physical quantity sensor, electronic device, and moving body
#38Top-port MEMS microphone and method of manufacturing the same
#39Hermetic encapsulation for microelectromechanical systems (MEMS) devices
#40Method and system for CMOS based MEMS bump stop contact damage prevention
#41MEMS device with constant capacitance
#42MICRO ELECTRO MECHANICAL SYSTEMS PACKAGE AND MANUFACTURING METHOD THEREOF
#43MEMS device having a suspended diaphragm and manufacturing process thereof
#44Sensor device
#45MEMS pressure transducer assembly
#46DEVICES AND METHODS FOR PROTECTING ELECTROMECHANICAL DEVICE ARRAYS
#47Durable, heat-resistant multi-layer coatings and coated articles
#48MEMS pressure transducer assembly and method of packaging same
#49Sensor device manufacturing method and sensor device
#50PROCESS FOR A SEALED MEMS DEVICE WITH A PORTION EXPOSED TO THE ENVIRONMENT
#51MEMS and protection structure thereof
#52Micromechanical system and method for manufacturing a micromechanical system
#53MEMS and a protection structure thereof
#54MEMS sensor and production method of MEMS sensor
#55Device with protective layer
#56MEMS sensor and production method of MEMS sensor
#57Durable, heat-resistant multi-layer coatings and coated articles
#58Procedural Functional Element of a Stack of Films
#59Microfabricated devices and method for fabricating microfabricated devices
#60Micromechanical device having integrated heating
#61Receiver electronics proximate antenna
#62High temperature environment tool system and method
#63High temperature electronic devices
#64MEMS packaging techniques