83914 ⎘
Microstructural systems or auxiliary parts thereof Microstructural systems or auxiliary parts thereof not provided for in -
EXPANSION MEDIATED ADHESIVE DEVICE
#2IMPACT-RESISTANT MICROMECHANICAL ARMS
#3MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUBSTRATES USING SEED LAYERS
#4DIE STACKING WITH CONTROLLED TILT AND ANGULAR ALIGNMENT
#5MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DEVICE
#6Anchor and cavity configuration for MEMS-based cooling systems
#7INTEGRATED SHOWERHEAD
#8Method of forming monocrystalline nickel-titanium films on single crystal silicon substrates using seed layers
#9Anchor and cavity configuration for MEMS-based cooling systems
#10IMPACT-RESISTANT MICROMECHANICAL ARMS
#11Pop-Up Laminate Structures with Integrated Electronics
#12LIQUID-RESISTANT AIR INLET PASSIVE DEVICE AND METHODS OF MAKING SAME
#13EXPANSION MEDIATED ADHESIVE DEVICE
#14MEMS device with particle filter and method of manufacture
#15Structures for packaging stress-sensitive micro-electro-mechanical system stacked onto electronic circuit chip
#16Microfluidic mixing
#17Waterproof microphone and associated packing techniques
#18Directional microphone and associated packing techniques
#19Pop-up laminate structures with integrated electronics
#20Electronic device including a capacitor
#21Structures for packaging stress-sensitive micro-electro-mechanical system stacked onto electronic circuit chip
#22Tunable power amplifier with wide frequency range
#23Directional microphone and associated packing techniques
#24ESD protection of MEMS for RF applications
#25DISPLAY PANEL AND DEVICE USING THE SAME
#26Structures for packaging stress-sensitive micro-electro-mechanical system stacked onto electronic circuit chip
#27System and method for an ovenized silicon platform using Si/SiOhybrid supports
#28Structure and method for packaging stress-sensitive micro-electro-mechanical system stacked onto electronic circuit chip
#29Directional microphone and associated packing techniques
#30Waterproof microphone and associated packing techniques
#31SENSOR ELEMENT, METHOD FOR MANUFACTURING SENSOR ELEMENT, DETECTION DEVICE, AND METHOD FOR MANUFACTURING DETECTION DEVICE
#32Tunable power amplifier with wide frequency range
#33Method of lower profile MEMS package with stress isolations
#34MEMS pressure sensor and method for forming the same
#35Pop-up laminate structures with integrated electronics
#36Tunable power amplifier with wide frequency range
#37Method of manufacturing a switch system
#38MEMS device
#39Method and apparatus for cooling an integrated circuit