83745 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Arrangements for avoiding sticking of the flexible or moving parts Anti-stiction coatings
Anti-Stiction Process for Mems Device
#2ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION
#3SEMICONDUCTOR MEMS STRUCTURE AND METHOD OF FORMING THE SAME
#4FUNCTIONALIZED OXOACID LUBRICANTS IN MEMS DEVICES
#5METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
#6METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
#7ANTI-STICTION LAYER DEPOSITION
#8METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
#9FORMING A PASSIVATION COATING FOR MEMS DEVICES
#10COMPUTATIONAL METHODS FOR PREDICTING ADHESION CHARACTERISTICS OF MOLECULAR COATINGS
#11ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE
#12Semiconductor MEMS structure
#13MEMS Structure and Method of Forming Same
#14Roughness selectivity for MEMS movement stiction reduction
#15METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
#16Method and system for fabricating a MEMS device
#17Method and system for fabricating a MEMS device
#18MEMS device and method for making the same
#19SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
#20Anti-stiction enhancement of ruthenium contact
#21Anti-stiction process for MEMS device
#22MEMS microparticle sensor
#23Roughness selectivity for MEMS movement stiction reduction
#24Method for preparing silicon wafer with rough surface and silicon wafer
#25FORMING A PASSIVATION COATING FOR MEMS DEVICES
#26Dual back-plate and diaphragm microphone
#27Method for closing openings in a flexible diaphragm of a MEMS element
#28Selective self-assembled monolayer patterning with sacrificial layer for devices
#29Semiconductor MEMS structure
#30MEMS apparatus with anti-stiction layer
#31Fence structure to prevent stiction in a MEMS motion sensor
#32Anti-stiction process for MEMS device
#33Dual back-plate and diaphragm microphone
#34MEMS structure and method of forming same
#35Rough layer for better anti-stiction deposition
#36Method of stiction prevention by patterned anti-stiction layer
#37Semiconductor device and manufacture thereof
#38Membrane components and method for forming a membrane component
#39Method of fabricating semiconductor structure
#40Semiconductor MEMS structure
#41Comb MEMS Device and Method of Making a Comb MEMS Device
#42Method for manufacturing a micromechanical sensor
#43FORMING A PASSIVATION COATING FOR MEMS DEVICES
#44Rough anti-stiction layer for MEMS device
#45Electromechanical relay device
#46Fence structure to prevent stiction in a MEMS motion sensor
#47Systems and methods for uniform target erosion magnetic assemblies
#48Anti-stiction process for MEMS device
#49Method of stiction prevention by patterned anti-stiction layer
#50Method for manufacturing a micromechanical inertial sensor
#51Semiconductor device and manufacture thereof
#52Semiconductor device
#53Membrane components and method for forming a membrane component
#54Manufacturing method of micro-electro-mechanical systems device
#55Rough anti-stiction layer for MEMS device
#56Low friction coating formed of boron-doped zinc oxide thin film and micromachine
#57MEMS structure and method of forming same
#58Semiconductor MEMS structure
#59MEMS structure with graphene component
#60Semiconductor MEMS structure and manufacturing method thereof
#61Rough layer for better anti-stiction deposition
#62Method for controlling surface roughness in MEMS structure
#63Rough anti-stiction layer for MEMS device
#64Semiconductor devices with moving members and methods for making the same
#65Semiconductor structure and method for fabricating the same
#66RESONANCE-ACTUATION OF MICROSHUTTER ARRAYS
#67Comb MEMS device and method of making a comb MEMS device
#68Semiconductive structure and manufacturing method thereof
#69Movement microelectromechanical systems (MEMS) package
#70MEMS structure having rounded edge stopper and method of fabricating the same
#71METHOD FOR FORMING ANTI STICTION COATING AND ANTI STICTION COATING THEREOF
#72Self-removal anti-stiction coating for bonding process
#73Substrate structure, semiconductor structure and method for fabricating the same
#74Method of selectively removing an anti-stiction layer on a eutectic bonding area
#75Reducing MEMS stiction by deposition of nanoclusters
#76Coatings for relatively movable surfaces
#77Pressure sensor and manufacture method thereof
#78MEMS structure, cap substrate and method of fabricating the same
#79MEMS structure and method of forming same
#80MEMS structures and methods for forming the same
#81Reducing MEMS stiction by introduction of a carbon barrier
#82Reducing microelectromechanical systems stiction by formation of a silicon carbide layer
#83Apparatus and method for preventing stiction of MEMS devices encapsulated by active circuitry
#84Coatings for relatively movable surfaces
#85Comb MEMS device and method of making a comb MEMS device
#86Preventing glass particle injection during the oil fill process
#87Dynamic access point based positioning
#88Reducing MEMS stiction by deposition of nanoclusters
#89Reducing MEMS stiction by introduction of a carbon barrier
#90CAVITY LINERS FOR ELECTROMECHANICAL SYSTEMS DEVICES
#91METHOD TO INHIBIT METAL-TO-METAL STICTION ISSUES IN MEMS FABRICATION
#92Method for wafer-level surface micromachining to reduce stiction
#93MEMS structures and methods for forming the same
#94METHOD AND APPARATUS FOR APPLICATION OF ANTI-STICTION COATING
#95MEMS structure and method of forming same
#96Semiconductor devices with moving members and methods for making the same
#97Method and apparatus for selectively removing anti-stiction coating
#98Releasing and post-releasing processes in fabrications for micromirror array devices
#99Self-removal anti-stiction coating for bonding process
#100Preventing adhesion between nanostructures
#101Vapor deposition of anti-stiction layer for micromechanical devices
#102Package structure
#103Reducing adherence in a MEMS device
#104Micromechanical device with microfluidic lubricant channel
#105Reduced stiction MEMS device with exposed silicon carbide
#106Lubricating micro-machined devices using fluorosurfactants
#107MICROMECHANICAL COMPONENT HAVING AN ANTI-ADHESIVE LAYER
#108Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant
#109Microelectromechanical systems encapsulation process
#110MICRO ROCKING DEVICE AND METHOD FOR MANUFACTURING THE SAME
#111Microelectromechanical element and electromechanical switch using the same
#112Contact device and method for producing the same
#113Reducing adherence in a MEMS device
#114Anti-stiction technique for electromechanical systems and electromechanical device employing same
#115Method for Depositing an Anti-Adhesion Layer
#116Electromechanical device treatment with water vapor
#117Backside release and/or encapsulation of microelectromechanical structures and method of manufacturing same
#118MEMS Passivation with Phosphonate Surfactants
#119Method of Forming a Micromechanical Device with Microfluidic Lubricant Channel
#120Micromechanical device with microfluidic lubricant channel
#121Micromechanical device lubrication
#122PACKAGING MICRO DEVICES
#123Method of forming a micromechanical system containing a microfluidic lubricant channel
#124Micromechanical system containing a microfluidic lubricant channel
#125Method for providing an anti-stiction coating on a metal surface
#126MICRO DEVICES HAVING ANTI-STICTION MATERIALS
#127Anti-stiction coating
#128Lubricating micro-machined devices using fluorosurfactants
#129In SITU application of anti-stiction materials to micro devices
#130Microelectromechanical systems encapsulation process with anti-stiction coating
#131Microelectromechanical systems encapsulation process
#132Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor
#133Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
#134Method of using a preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
#135Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant
#136Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant
#137Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
#138Anti-stiction gas-phase lubricant for micromechanical systems
#139MEMS element having a dummy pattern
#140Spatial light modulator multi-layer mirror plate
#141Antistiction MEMS substrate and method of manufacture
#142Anti-stiction technique for electromechanical systems and electromechanical device employing same
#143Microelectronic device with anti-stiction coating
#144Method and apparatus for lubricating microelectromechanical devices in packages
#145Tungsten coated silicon fingers
#146Surface lubrication in microstructures
#147Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems
#148Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems
#149Packaged microelectromechanical device with lubricant
#150Microelectromechanical devices with lubricants and getters formed thereon
#151MEMS passivation with phosphonate surfactants
#152MEMS passivation with transition metals
#153Method for reducing the adhesive properties of MEMS and anti-adhesion-coated device
#154Surface processing method for a chip device and a chip device formed by he method
#155Surface processes in fabrications of microstructures
#156Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems
#157Methods for forming composite coatings on MEMS devices
#158AlOatomic layer deposition to enhance the deposition of hydrophobic or hydrophilic coatings on micro-electromechanical devices
#159Forming a eutectic bond between a wafer having an anti-stiction coating and a cap wafer
#160MEMS devices anti-stiction coating and encapsulant having opposing water resitive characteristics