B81B3/0002 - CPC Classification Index

ClassID:

83744 ⎘

B81B3/0002 - CPC Classification

Classification description:

Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes Arrangements for avoiding sticking of the flexible or moving parts

Sub-classes:

B81B3/0005 » {Anti-stiction coatings} 151
B81B3/0008 » {Structures for avoiding electrostatic attraction, e.g. avoiding charge accumulation} 106
B81B3/001 » {Structures having a reduced contact area, e.g. with bumps or with a textured surface} 225
B81B3/0013 » {Structures dimensioned for mechanical prevention of stiction, e.g. spring with increased stiffness} 66
B81B3/0016 » {Arrangements for avoiding sticking of the flexible or moving parts not provided for in groups to } 25

Recent Application in this class:

20220063995

2022-03-03

Method for preparing silicon wafer with rough surface and silicon wafer

20180275159

2018-09-27

Physical quantity sensor

20180249257

2018-08-30

Capacitive transducer and acoustic sensor

20150028434

2015-01-29

Resonant transducer, manufacturing method therefor, and multi-layer structure for resonant transducer