Patents-Review.com
ClassID:

83747 ⎘

B81B3/001 - CPC Classification

Classification description:

Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Arrangements for avoiding sticking of the flexible or moving parts Structures having a reduced contact area, e.g. with bumps or with a textured surface

Recent Application in this class:
#1
20260152380
2026-06-04

SEMICONDUCTOR DEVICE STRUCTURE WITH MOVABLE MEMBRANE

 #2
20260103375
2026-04-16

MEMS DEVICE AND MANUFACTURING METHOD FOR MEMS DEVICE

 #3
20260062280
2026-03-05

NON-CONTACT MICROELECTROMECHANICAL SYSTEMS

 #4
20260016500
2026-01-15

3-AXIS ANGULAR ACCELEROMETER

 #5
20260008668
2026-01-08

CAPACITIVE SENSOR AND METHOD FOR MANUFACTURING SAME

 #6
20260008667
2026-01-08

SEMICONDUCTOR MEMS STRUCTURE AND METHOD OF FORMING THE SAME

 #7
20250270086
2025-08-28

SEMICONDUCTOR DEVICES, MICROELECTROMECHANICAL SYSTEM AND METHODS

 #8
20250229292
2025-07-17

ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TRANSDUCER DEVICES

 #9
20250197192
2025-06-19

ANTI-STICTION PATTERNING WITHIN MEMS LAYER

 #10
20250115472
2025-04-10

MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS

 #11
20250076241
2025-03-06

Humidity Sensor, Manufacturing Method Therefor and Electronic Device

 #12
20240375937
2024-11-14

MEMS Device and Fabrication Process with Reduced Z-Axis Stiction

 #13
20240343558
2024-10-17

DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE

 #14
20240343551
2024-10-17

SEMICONDUCTOR DEVICE STRUCTURE WITH MOVABLE MEMBRANE

 #15
20240171918
2024-05-23

MEMS ELEMENT AND METHOD OF MANUFACTURING THE SAME

 #16
20240100566
2024-03-28

Anti-stiction bottom cavity surface for micromachined ultrasonic transducer devices

 #17
20240051816
2024-02-15

MOTION LIMITER WITH REDUCED STICTION

 #18
20240017986
2024-01-18

MEMS Device and Method for Manufacturing a MEMS Device

 #19
20230403514
2023-12-14

MEMS capacitance microphone and manufacturing method thereof

 #20
20230353066
2023-11-02

MEMS Structure and Method of Forming Same

 #21
20230348258
2023-11-02

MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBERANCES, AND MANUFACTURING METHODS THEREOF

 #22
20230345185
2023-10-26

MEMS MICROPHONE STRUCTURE AND MANUFACTURING METHOD THEREOF

 #23
20230242393
2023-08-03

MICROMECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MICROMECHANICAL COMPONENT FOR A SENSOR OR MICROPHONE DEVICE

 #24
20230224657
2023-07-13

SEMICONDUCTOR DEVICES HAVING A MEMBRANE LAYER WITH SMOOTH STRESS-RELIEVING CORRUGATIONS AND METHODS OF FABRICATION THEREOF

 #25
20230192480
2023-06-22

METHOD FOR STRUCTURAL LAYER FABRICATION IN MICROMECHANICAL DEVICES

 #26
20230174370
2023-06-08

MEMS CHIP, MANUFACTURING METHOD THEREOF, MEMS DEVICE, AND ELECTRONIC DEVICE

 #27
20230149976
2023-05-18

Anti-stiction bottom cavity surface for micromachined ultrasonic transducer devices

 #28
20230085284
2023-03-16

METHOD FOR PRODUCING AN INTEGRATED CIRCUIT POINTED ELEMENT COMPRISING ETCHING FIRST AND SECOND ETCHABLE MATERIALS WITH A PARTICULAR ETCHANT TO FORM AN OPEN CRATER IN A PROJECT

 #29
20230063234
2023-03-02

MEMS microphone

 #30
20230055809
2023-02-23

DIGITAL MICROMIRROR DEVICE WITH REDUCED STICTION

 #31
20220380209
2022-12-01

Actuator layer patterning with polysilicon and etch stop layer

 #32
20220363532
2022-11-17

Micromechanical device with contact pad

 #33
20220340407
2022-10-27

MEMS device and method for making the same

 #34
20220289565
2022-09-15

MEMS device having decreased contact resistance

 #35
20220227618
2022-07-21

Semiconductor device structure with movable membrane

 #36
20220217473
2022-07-07

MEMS acoustic sensor

 #37
20220212917
2022-07-07

Micro-electro mechanical system device containing a bump stopper and methods for forming the same

 #38
20220155336
2022-05-19

3-axis angular accelerometer

 #39
20220144628
2022-05-12

Modification to rough polysilicon using ion implantation and silicide

 #40
20220091154
2022-03-24

Micromechanical structure and micromechanical sensor

 #41
20220041428
2022-02-10

MEMS sensor including a diaphragm and method for manufacturing a MEMS sensor

 #42
20220038826
2022-02-03

DIAPHRAGM, MEMS MICROPHONE HAVING THE SAME AND METHOD OF MANUFACTURING THE SAME

 #43
20220033246
2022-02-03

Method to form a rough crystalline surface

 #44
20220011339
2022-01-13

Inertial sensor and inertial measurement unit

 #45
20210362999
2021-11-25

SURFACE MICROSTRUCTURES

 #46
20210337317
2021-10-28

Capacitive microphone with shaped electrode

 #47
20210302717
2021-09-30

MEMS micro-mirror device with stopper and method of making same

 #48
20210238027
2021-08-05

SYSTEMS, DEVICES, AND METHODS TO REDUCE DIELECTRIC CHARGING IN MICRO-ELECTRO-MECHANICAL SYSTEMS DEVICES

 #49
20210188619
2021-06-24

Active stiction recovery

 #50
20210179419
2021-06-17

Micro-electro mechanical system device containing a bump stopper and methods for forming the same

 #51
20210144485
2021-05-13

Structure of micro-electro-mechanical-system microphone

 #52
20210083169
2021-03-18

Method of making piezoelectric microphone with deflection control

 #53
20210047171
2021-02-18

MEMS element

 #54
20210044905
2021-02-11

MEMS devices

 #55
20200369512
2020-11-26

Method of manufacturing a microelectromechanical systems (MEMS) device

 #56
20200369511
2020-11-26

Sidewall stopper for MEMS device

 #57
20200346919
2020-11-05

MEMS apparatus with anti-stiction layer

 #58
20200290864
2020-09-17

MEMS device and method for producing the same

 #59
20200290863
2020-09-17

MEMS device

 #60
20200270123
2020-08-27

Modification to rough polysilicon using ion implantation and silicide

 #61
20200262699
2020-08-20

Micro-electro-mechanical device having two buried cavities and manufacturing process thereof

 #62
20200262697
2020-08-20

Stiction reduction system and method thereof

 #63
20200241036
2020-07-30

3-axis angular accelerometer

 #64
20200231429
2020-07-23

Method for manufacturing MEMS microphone

 #65
20200213797
2020-07-02

Method for manufacturing MEMS microphone

 #66
20200213774
2020-07-02

MEMS microphone

 #67
20200207608
2020-07-02

Isolated protrusion/recession features in microelectromechanical systems

 #68
20200156110
2020-05-21

Anti-stiction bottom cavity surface for micromachined ultrasonic transducer devices

 #69
20200140265
2020-05-07

Fence structure to prevent stiction in a MEMS motion sensor

 #70
20200140259
2020-05-07

Method of forming semiconductor device structure

 #71
20200102209
2020-04-02

Sidewall stopper for MEMS device

 #72
20200079642
2020-03-12

Microelectromechanical systems (MEMS) structure to prevent stiction after a wet cleaning process

 #73
20200067425
2020-02-27

MEMS structure and method of forming same

 #74
20200024125
2020-01-23

Rough layer for better anti-stiction deposition

 #75
20200024124
2020-01-23

Method of stiction prevention by patterned anti-stiction layer

 #76
20200021920
2020-01-16

MEMS microphone and method of manufacturing the same

 #77
20190310389
2019-10-10

Method for producing an integrated circuit pointed element comprising etching first and second etchable materials with a particular etchant to form an open crater in a project

 #78
20190297441
2019-09-26

Semiconductor Devices Having a Membrane Layer with Smooth Stress-Relieving Corrugations and Methods of Fabrication Thereof

 #79
20190241425
2019-08-08

Method and apparatus for reducing in-process and in-use stiction for MEMS devices

 #80
20190185315
2019-06-20

Comb MEMS Device and Method of Making a Comb MEMS Device

 #81
20190144263
2019-05-16

Actuator plate partitioning and control devices and methods

 #82
20190135610
2019-05-09

Structure and formation method of semiconductor device structure

 #83
20190124452
2019-04-25

Micro-electro-mechanical systems (MEMS) device and method for fabricating the MEMS

 #84
20190119099
2019-04-25

Rough anti-stiction layer for MEMS device

 #85
20190115179
2019-04-18

Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

 #86
20190062153
2019-02-28

Fence structure to prevent stiction in a MEMS motion sensor

 #87
20190062147
2019-02-28

Cover based adhesion force measurement system for microelectromechanical system (MEMS)

 #88
20190062146
2019-02-28

MEMS DEVICES AND PROCESSES

 #89
20190036003
2019-01-31

Piezoelectric microphone with deflection control and method of making the same

 #90
20190002273
2019-01-03

Method of stiction prevention by patterned anti-stiction layer

 #91
20180334381
2018-11-22

Microelectromechanical component

 #92
20180334378
2018-11-22

Microelectromechanical system device and method for manufacturing the same

 #93
20180315571
2018-11-01

MEMS RF-switch with controlled contact landing

 #94
20180290880
2018-10-11

Isolated protrusion/recession features in a micro electro mechanical system

 #95
20180249257
2018-08-30

Capacitive transducer and acoustic sensor

 #96
20180234774
2018-08-16

Microelectromechanical microphone

 #97
20180215606
2018-08-02

Semiconductor device and semiconductor device manufacturing method

 #98
20180208455
2018-07-26

MEMS microphone and method for manufacturing the same

 #99
20180179047
2018-06-28

Rough anti-stiction layer for MEMS device

 #100
20180148315
2018-05-31

MEMS devices and processes

 #101
20180148314
2018-05-31

Mirror drive device and method for producing same

 #102
20180145612
2018-05-24

MEMS structure and method of forming same

 #103
20180134542
2018-05-17

Method and apparatus for reducing in-process and in-use stiction for MEMS devices

 #104
20180127263
2018-05-10

MEMS structure with bilayer stopper and method for forming the same

 #105
20180115836
2018-04-26

Micro-electro-mechanical systems (MEMS) device and method for fabricating the MEMS

 #106
20180057350
2018-03-01

MICROMECHANICAL SYSTEM HAVING A STOP ELEMENT

 #107
20170328931
2017-11-16

3-axis angular accelerometer

 #108
20170313573
2017-11-02

Rough MEMS surface

 #109
20170311089
2017-10-26

MEMS microphone and method of manufacturing the same

 #110
20170305738
2017-10-26

Rough layer for better anti-stiction deposition

 #111
20170267516
2017-09-21

Microelectromechanical systems (MEMS) structure to prevent stiction after a wet cleaning process

 #112
20170217755
2017-08-03

Pressure sensor, manufacturing method of pressure sensor, altimeter, electronic apparatus, and moving object

 #113
20170166435
2017-06-15

Semiconductor devices with moving members and methods for making the same

 #114
20170164117
2017-06-08

Fully wafer-level-packaged MEMS microphone and method for manufacturing the same

 #115
20170133185
2017-05-11

Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

 #116
20170096328
2017-04-06

Method and apparatus for reducing in-process and in-use stiction for MEMS devices

 #117
20170082519
2017-03-23

Semi-flexible proof-mass

 #118
20170073213
2017-03-16

Comb MEMS device and method of making a comb MEMS device

 #119
20170057814
2017-03-02

MEMS and CMOS integration with low-temperature bonding

 #120
20170055085
2017-02-23

Silicon microphone with suspended diaphragm and system with the same

 #121
20170044007
2017-02-16

Assembly and packaging of MEMS device

 #122
20170008757
2017-01-12

CMOS-MEMS device structure, bonding mesa structure and associated method

 #123
20160362292
2016-12-15

Semiconductor sensing structure and manufacturing method thereof

 #124
20160318753
2016-11-03

Microelectromechanical systems (MEMS) structure to prevent stiction after a wet cleaning process

 #125
20160257556
2016-09-08

Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

 #126
20160257555
2016-09-08

Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

 #127
20160176707
2016-06-23

Reducing MEMS stiction by increasing surface roughness

 #128
20160176701
2016-06-23

MEMS electrostatic actuator device for RF varactor applications

 #129
20160167945
2016-06-16

Microelectromechanical systems (MEMS) stopper structure for stiction improvement

 #130
20160167944
2016-06-16

Reducing MEMS stiction by deposition of nanoclusters

 #131
20160137492
2016-05-19

MEMS and CMOS integration with low-temperature bonding

 #132
20160116631
2016-04-28

Method for producing an integrated circuit pointed element comprising etching first and second etchable materials with a particular etchant to form an open crater in a projection

 #133
20160115016
2016-04-28

Film induced interface roughening and method of producing the same

 #134
20160031699
2016-02-04

Micro-electro-mechanical system (MEMS) structures and design structures

 #135
20160031698
2016-02-04

Reducing MEMS stiction by deposition of nanoclusters

 #136
20150353342
2015-12-10

MEMS and method for forming the same

 #137
20150321901
2015-11-12

Semiconductor devices and methods of forming thereof

 #138
20150291413
2015-10-15

Method and system for CMOS based MEMS bump stop contact damage prevention

 #139
20150288297
2015-10-08

MEMS structure and method of forming same

 #140
20150279602
2015-10-01

Systems, devices, and methods for reducing surface dielectric charging in a RF MEMS actuator element

 #141
20150244289
2015-08-27

VIBRATOR, MANUFACTURING METHOD THEREFOR, AND ELECTRONIC APPLIANCE

 #142
20150230027
2015-08-13

Acoustic transducer

 #143
20150229241
2015-08-13

MEMS electrostatic actuator

 #144
20150183631
2015-07-02

Semiconductor device having a micro-mechanical structure

 #145
20150145079
2015-05-28

Semiconductor devices having a membrane layer with smooth stress-relieving corrugations and methods of fabrication thereof

 #146
20150130044
2015-05-14

Mechanism for MEMS bump side wall angle improvement

 #147
20150116893
2015-04-30

Electrostatic actuator, variable capacitance capacitor, electric switch, and method for driving electrostatic actuator

 #148
20150054100
2015-02-26

Method of forming a micro-electro-mechanical system (MEMS) structure

 #149
20150035122
2015-02-05

Micro-electro-mechanical system (MEMS) structures and design structures

 #150
20150028432
2015-01-29

Assembly and packaging of MEMS device

 #151
20150002982
2015-01-01

Recovery system and methods for MEMS devices

 #152
20140332913
2014-11-13

Micro-electro-mechanical system (MEMS) structures and design structures

 #153
20140298910
2014-10-09

Microelectromechanical z-axis out-of-plane stopper

 #154
20140268482
2014-09-18

Actuator plate partitioning and control devices and methods

 #155
20140264656
2014-09-18

MEMS acoustic sensor with integrated back cavity

 #156
20140264651
2014-09-18

Semiconductor devices and methods of forming thereof

 #157
20140231936
2014-08-21

Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

 #158
20140197502
2014-07-17

Comb MEMS device and method of making a comb MEMS device

 #159
20140167189
2014-06-19

Reducing MEMS stiction by deposition of nanoclusters

 #160
20140076697
2014-03-20

MEMS electrostatic actuator

 #161
20140035072
2014-02-06

Hybrid MEMS bump design to prevent in-process and in-use stiction

 #162
20140009379
2014-01-09

CAVITY LINERS FOR ELECTROMECHANICAL SYSTEMS DEVICES

 #163
20130168782
2013-07-04

Micro-electro-mechanical system (MEMS) structures and design structures

 #164
20130157005
2013-06-20

Method for wafer-level surface micromachining to reduce stiction

 #165
20130127036
2013-05-23

Mechanism for MEMS bump side wall angle improvement

 #166
20130082338
2013-04-04

MEMS structures and methods for forming the same

 #167
20130015743
2013-01-17

MEMS structure and method of forming same

 #168
20120319528
2012-12-20

Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

 #169
20120319527
2012-12-20

Methods of manufacturing a micro-electro-mechanical system (MEMS) structure

 #170
20120319217
2012-12-20

Method of manufacturing a semiconductor device comprising a membrane over a substrate by forming a plurality of features using local oxidation regions

 #171
20120313235
2012-12-13

Semiconductor devices with moving members and methods for making the same

 #172
20120299129
2012-11-29

Process and structure for high temperature selective fusion bonding

 #173
20120243095
2012-09-27

CONFIGURABLE MICROMECHANICAL DIFFRACTIVE ELEMENT WITH ANTI STICTION BUMPS

 #174
20120181637
2012-07-19

Bulk silicon moving member with dimple

 #175
20120139065
2012-06-07

MEMS device and manufacturing method

 #176
20120107992
2012-05-03

METHOD OF PRODUCING LAYERED WAFER STRUCTURE HAVING ANTI-STICTION BUMPS

 #177
20120105385
2012-05-03

ELECTROMECHANICAL SYSTEMS APPARATUSES AND METHODS FOR PROVIDING ROUGH SURFACES

 #178
20120060607
2012-03-15

Vibration transducer and its manufacturing method

 #179
20120055249
2012-03-08

Physical quantity sensor

 #180
20120038963
2012-02-16

MEMS device and method of manufacturing MEMS device

 #181
20110205615
2011-08-25

MEMS devices with multi-component sacrificial layers

 #182
20110186089
2011-08-04

Apparatus for preventing stiction of MEMS microstructure

 #183
20100258885
2010-10-14

MEMS structure preventing stiction

 #184
20100219716
2010-09-02

Micro device having a movable structure

 #185
20100181652
2010-07-22

SYSTEMS AND METHODS FOR STICTION REDUCTION IN MEMS DEVICES

 #186
20100165442
2010-07-01

MEMS devices with multi-component sacrificial layers

 #187
20100096714
2010-04-22

Method of manufacturing MEMS sensor and MEMS sensor

 #188
20100015744
2010-01-21

Micro-Electromechanical Device and Method of Making the Same

 #189
20090251508
2009-10-08

Printer with reduced co-efficient of static friction nozzle plate

 #190
20090200619
2009-08-13

Methods for forming metal layers for a MEMS device integrated circuit

 #191
20090191660
2009-07-30

Method for manufacturing a sensor device

 #192
20090170312
2009-07-02

Method for producing a micromechanical and/or nanomechanical device with anti-bonding stops

 #193
20090162534
2009-06-25

Method for producing a membrane

 #194
20090160028
2009-06-25

Method for forming gaps in micromechanical device and micromechanical device

 #195
20090134522
2009-05-28

Micro-Electromechanical System Memory Device and Method of Making the Same

 #196
20090111267
2009-04-30

Method of anti-stiction dimple formation under MEMS

 #197
20090059345
2009-03-05

MEMS DEVICES WITH PROTECTIVE COATINGS

 #198
20090022884
2009-01-22

System and method for micro-electromechanical operation of an interferometric modulator

 #199
20080315332
2008-12-25

Micromechanical component and manufacturing method

 #200
20080239455
2008-10-02

Microelectromechanical device and method utilizing conducting layers separated by stops

 #201
20080238257
2008-10-02

MEMS device with low operation voltage, large contact pressure force, and large separation force, and portable communication terminal with the MEMS device

 #202
20080230909
2008-09-25

Method for forming anti-stiction bumps on a micro-electro mechanical structure

 #203
20080218843
2008-09-11

Microelectromechanical device and method utilizing a porous surface

 #204
20080176382
2008-07-24

Process of forming and controlling rough interfaces

 #205
20080176381
2008-07-24

Surface roughening process

 #206
20080175417
2008-07-24

Silicon microphone

 #207
20080135386
2008-06-12

Micro-electro mechanical tunneling switch

 #208
20080081391
2008-04-03

MEMS device with roughened surface and method of producing the same

 #209
20080075308
2008-03-27

SILICON CONDENSER MICROPHONE

 #210
20080030825
2008-02-07

Microelectromechanical device and method utilizing a porous surface

 #211
20080016964
2008-01-24

MEMS device and method of reducing stiction in a MEMS device

 #212
20080001691
2008-01-03

MEMS switch and method of fabricating the same

 #213
20070279457
2007-12-06

Electrostatic actuator and method of making the electrostatic actuator

 #214
20070269920
2007-11-22

Method of making dimple structure for prevention of MEMS device stiction

 #215
20070247696
2007-10-25

Microelectromechanical device and method utilizing a porous surface

 #216
20070247401
2007-10-25

Microelectromechanical device and method utilizing nanoparticles

 #217
20070218630
2007-09-20

Microstructure, semiconductor device, and manufacturing method of the microstructure

 #218
20070206267
2007-09-06

Methods for producing MEMS with protective coatings using multi-component sacrificial layers

 #219
20070125486
2007-06-07

Vertically spaced plural microsprings

 #220
20070082420
2007-04-12

Surface preparation for selective silicon fusion bonding

 #221
20070081028
2007-04-12

Reduced stiction printhead surface

 #222
20060285191
2006-12-21

Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator

 #223
20060281212
2006-12-14

Stacked structure and production method thereof

 #224
20060278942
2006-12-14

Antistiction MEMS substrate and method of manufacture

 #225
20060234413
2006-10-19

Method for forming anti-stiction bumps on a micro-electro mechanical structure

 #226
20060144816
2006-07-06

Method for separating a useful layer and component obtained by said method

 #227
20060091983
2006-05-04

Electrostatic microswitch for low-voltage-actuation component

 #228
20060038301
2006-02-23

Micro structure with interlock configuration

 #229
20060024880
2006-02-02

System and method for micro-electromechanical operation of an interferometric modulator

 #230
20050241944
2005-11-03

Membrane and method for the production of the same

 #231
20050229706
2005-10-20

MEM structure having reduced spring stiction

 #232
20050077987
2005-04-14

Membrane switch components and designs

 #233
20050032266
2005-02-10

Micro structure with interlock configuration

 #234
20050012577
2005-01-20

Micro-electro-mechanical switch, and methods of making and using it