83748 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Arrangements for avoiding sticking of the flexible or moving parts Structures dimensioned for mechanical prevention of stiction, e.g. spring with increased stiffness
PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SYSTEMS
#2MEMS BUMP STOPPER SURFACE FEATURES
#3MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE
#4Sound producing cell
#5PACKAGE STRUCTURE, APPARATUS AND FORMING METHODS THEREOF
#6Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure
#7Piezoelectric anti-stiction structure for microelectromechanical systems
#8SYSTEMS AND METHODS TO REDUCE STICTION IN MEMS DEVICES
#9Sound producing cell and manufacturing method thereof
#10MICRO-ELECTRONIC NON-LANDING MIRROR SYSTEM
#11Piezoelectric anti-stiction structure for microelectromechanical systems
#12Manufacturing method of semiconductor structure
#13Micromechanical component and method for manufacturing a micromechanical component
#14Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure
#15Optical device
#16Optical device and method for manufacturing same
#17Optical device having fixed and movable comb electrodes
#18Piezoelectric anti-stiction structure for microelectromechanical systems
#19Electrostatic actuator and physical quantity sensor
#20Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure
#21Manufacturing method of semiconductor structure
#22MEMS transducer including free plate diaphragm with spring members
#23Micro check valve and system with multiple micro check valves and method for the production thereof
#24Thin film material transfer method
#25MEMS sensor compensation for off-axis movement
#26Vertical stopper for capping MEMS devices
#27MEMS sensor compensation for off-axis movement
#28Microelectromechanical component
#29Vertical stopper for capping MEMS devices
#30MEMS structure with bilayer stopper and method for forming the same
#31MEMS DEVICE WITH OFFSET ELECTRODE
#32Electrostatic actuator and switch
#33Semi-flexible proof-mass
#34MEMS device
#35Methods and structures of integrated MEMS-CMOS devices
#36Reducing MEMS stiction by increasing surface roughness
#37MEMS electrostatic actuator device for RF varactor applications
#38Micro-electro-mechanical system device with enhanced structural strength
#39Multi-phased MEMS plate lowering and lifting system and method
#40Physical quantity sensor, electronic apparatus, and moving body
#41Microelectromechanical system device having a hinge layer
#42Micro-electro-mechanical system (MEMS) structures and design structures
#43MEMS and method for forming the same
#44MEMS STRUCTURE, ELECTRONIC APPARATUS, AND MOVING OBJECT
#45Functional element, electronic apparatus, and moving object
#46MEMS electrostatic actuator
#47Micro-electro-mechanical system device with enhanced structural strength
#48Micro-electro-mechanical system (MEMS) structures and design structures
#49Functional device, electronic apparatus, and moving object
#50Microelectromechanical system (MEMS) device and fabrication method thereof
#51MEMS electrostatic actuator
#52Methods and structures of integrated MEMS-CMOS devices
#53Micro-electro-mechanical system (MEMS) structures and design structures
#54Microelectronic device and electronic apparatus
#55Micromechanical tunable Fabry-Perot interferometer, an intermediate product, and a method for producing the same
#56PRODUCTION METHOD OF MEMS SENSOR
#57Microelectromechanical device provided with an anti-stiction structure, and corresponding anti-stiction method
#58Microfabricated cantilever slider with asymmetric spring constant
#59Method of fabricating inkjet printhead with projections patterned across nozzle plate
#60MEMS sensor
#61Anti-stiction coating
#62Micro-electro mechanical systems switch and method of fabricating the same
#63Micro-electromechanical system (MEMS) switch
#64Method of forming low-stiction nozzle plate for an inkjet printhead
#65RF MEMS switch having asymmetrical spring rigidity
#66Ultra-low voltage capable zipper switch
#67Microelectronic device with anti-stiction coating
#68Method for preparing silicon wafer with rough surface and silicon wafer
#69Micro mechanical structure and method for fabricating the same