83757 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Constitution or structural means for controlling the movement of the flexible or deformable elements For increasing stroke, i.e. achieve large displacement of actuated parts
MEMS DEVICE WITH RECESSED COMBS
#2MICROELECTROMECHANICAL SYSTEMS (MEMS) INTEGRATION FOR ANALOG TUNABILITY IN RECONFIGURABLE INTELLIGENT SURFACES
#3MEMS DEVICE AND ELECTRO-ACOUSTIC TRANSDUCER
#4Electrostatic MEMS Transducer with Vertical Actuator Cells
#5MEMS DEVICE
#6ELECTROSTATICALLY-EXCITED HERMETIC MULTI-CELL MICROELECTROMECHANICAL ACTUATOR AND PRODUCTION METHOD THEREOF
#7Three-axis Gyroscope
#8MEMS DEVICE AND MANUFACTURING METHOD THEREOF
#9MEMS microphone
#10Pressure sensor including a microelectromechanical transducer and relating pressure-detection method
#11MEMS Acoustic Sensor
#12MEMS device and manufacturing method thereof
#13MEMS ACTUATOR AND MEMS ACTUATOR ARRAY WITH A PLURALITY OF MEMS ACTUATORS
#14Light reflecting element and spatial light modulator
#15Movable device, distance measurement device, image projection apparatus, vehicle, and mount
#16Method of manufacturing MEMS vibration element and MEMS vibration element
#17Mechanical microsystem and associated manufacturing method
#18MEMS acoustic sensor
#19Piezoelectric MEMS microphone
#20Post-processing techniques on mems foundry fabricated devices for large angle beamsteering
#21Pressure sensor including a microelectromechanical transducer and relating pressure-detection method
#22Gas sensor, sensor array, and manufacturing method thereof
#23Out-of-plane hinge for micro and nanoelectromechanical systems with reduced non-linearity
#24MEMS actuation systems and methods
#25Micro-electro-mechanical actuator device of piezoelectric type and apparatus integrating the micro-electro-mechanical actuator device
#26MEMS DEVICE
#27Micromechanical z-inertial sensor
#28Actuator, liquid discharge head, liquid discharge device, and liquid discharge apparatus
#29Micro-electro-mechanical actuator device of piezoelectric type and apparatus integrating the micro-electro-mechanical actuator device
#30Displacement increasing mechanism and shutter device
#31Electrostatic actuator with tri-electrode topology
#32MEMS loudspeaker having an actuator structure and a diaphragm spaced apart therefrom
#33Microphone and manufacturing method thereof
#34Ultrasonic transducer element, method of manufacturing the same, and ultrasonic image pickup device
#35Piezoelectric MEMS sensor, such as force, pressure, deformation sensor or microphone, with improved sensitivity
#36Coupled accordion springs in microelectromechanical systems (MEMS) devices
#37High displacement ultrasonic transducer
#38Systems and methods for a MEMS actuation systems device with one or more slidable connection assemblies
#39MEMS actuation systems and methods
#40MEMS actuation systems and methods
#41MEMS actuation systems and methods
#42Micromechanical component and production method for a micromechanical component
#43MEMS automatic alignment high-and-low comb tooth and manufacturing method thereof
#44Microelectromechanical displacement structure and method for controlling displacement
#45Microelectromechanical displacement structure and method for controlling displacement
#46Very low power microelectromechanical devices for the internet of everything
#47MEMS loudspeaker having an actuator structure and a diaphragm spaced apart therefrom
#48MEMS microphone
#49High displacement ultrasonic transducer
#50Micro-electromechanical apparatus utilizing folded spring for rotary element
#51Micromechanical pressure sensor device and corresponding manufacturing method
#52Spring-mass system with a small transverse displacement
#53Micromechanical component and manufacturing method for a micromechanical component
#54Rotationally deployed actuator devices
#55MEMS actuator/sensor
#56MEMS actuator device deployment
#57Microstructure and method of manufacturing the same
#58Micromechanical Structure and Method for Setting the Working Gap Width of a Micromechanical Structure
#59Structure of spring and actuator using the spring
#60Long range travel MEMS actuator
#61Actuator using comb-tooth
#62MICROMACHINED MOVER
#63Support apparatus for microphone diaphragm
#64Comb-type electrode structure capable of large linear-displacement motion
#65Micro-actuator utilizing electrostatic and lorentz forces, and micro-actuator device, optical switch and optical switch array using the same
#66Microelectromechanical device with continuously variable displacement
#67Electrostatic comb drive actuator, and optical controller using the electrostatic comb drive actuator
#68Unilateral thermal buckle beam actuator
#69Actuator systems and methods
#70Micro mechanical structure and method for fabricating the same