83756 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes Constitution or structural means for controlling the movement of the flexible or deformable elements
Sub-classes:Systems and Apparatus for Micromirror Designs with Electrode Contact
#2Vehicle Operator Awareness System
#3PRESSURE SENSING IMPLANT
#4Systems and apparatus for micromirror designs with electrode contact
#5TECHNOLOGIES FOR MICROELECTROMECHANICAL SYSTEMS WITH COMPOSABLE PIEZOELECTRIC ACTUATORS
#6Microphone MEMS diaphragm and self-test thereof
#7MEMS mirror structure with backside skeleton
#8Resonance device and method for manufacturing resonance device
#9MEMS type semiconductor gas detection element
#10Vehicle operator awareness system
#11MEMS micromirror and MEMS optical switch
#12Eight spring dual substrate MEMS plate switch and method of manufacture
#13Microelectromechanical systems vibration sensor
#14MEMS actuation systems and methods
#15Mirror driving apparatus and method for manufacturing thereof
#16Repulsive-attractive-force electrostatic actuator
#17Pressure sensing implant
#18Micromechanical spring structure
#19Microelectromechanical component
#20MEMS RF-switch with controlled contact landing
#21Display device and manufacturing method therefor
#22Microphone circuits for canceling out the leakage characteristics of a transducer
#23MEMS actuation systems and methods
#24MEMS actuation systems and methods
#25Method for producing a rolled-up electrical or electronic component
#26Method and structure of MEMS PLCSP fabrication
#27Microlattice damping material and method for repeatable energy absorption
#28MEMS device and method of making a MEMS device
#29Linearly deployed actuators
#30MEMS accelerometer
#31MEMS component
#32MEMS anchors
#33Integrated acoustic transducer in MEMS technology, and manufacturing process thereof
#34MEMS device and method of making a MEMS device
#35MEMS anchors
#36Linearly deployed actuators
#37Negative thermal expansion system (NTES) device for TCE compensation in elastomer composites and conductive elastomer interconnects in microelectronic packaging
#38Actuator on the basis of geometrically anisotropic nanoparticles
#39Integrated acoustic transducer in MEMS technology, and manufacturing process thereof
#40MEMS anchors
#41Fibrous micro-composite material
#42Thermal bend actuator material selection
#43Electromechanical devices having etch barrier layers
#44Negative thermal expansion system (NTEs) device for TCE compensation in elastomer compsites and conductive elastomer interconnects in microelectronic packaging
#45Microactuator having multiple degrees of freedom
#46MICRO--ELECTROMECHANICAL ACTUATOR WITH SPACER SEPARATED LAYERS
#47Hidden hinge MEMS device
#48Negative thermal expansion system (NTEs) device for TCE compensation in elastomer composites and conductive elastomer interconnects in microelectronic packaging
#49Yokeless hidden hinge digital micromirror device
#50Thermoelastic device with preselected resistivity, inertness and deposition characteristics
#51Thermoelastic device comprising an expansive element formed from a preselected material
#52Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure
#53Low compressive TiNmaterials and methods of making the same
#54Hidden hinge MEMS device
#55Interferometric modulator with internal polarization and drive method
#56Fibrous micro-composite material
#57Integrated circuit device including a bifunctional core material in a chamber
#58Micro-electromechanical actuator
#59MEMS device deflection stop
#60Micromachined electromechanical device
#61Double-electret mems actuator
#62MOS transistor with a deformable gate
#63Method for forming a chamber in an electronic device and device formed thereby
#64Apparatus and method for vacuum-based nanomechanical energy force and mass sensors
#65Method for fabricating a gyroscope
#66Thermoelastic device comprising an expansive element formed from a preselected material
#67Fabrication of diaphragms and “floating” regions of single crystal semiconductor for MEMS devices
#68Electro-mechanical device having a charge dissipation layer and a method of manufacture therefor
#69Micromechanical structure, device including the structure, and methods of forming and using same
#70Micromachined electromechanical device
#71Microfabricated torsional drive utilizing lateral electrostatic force
#72MEMS actuators having a physical gap filled with fluid
#73Detection of force applied by pick-up tool for transferring semiconductor devices
#74Method and structure of MEMS PLCSP fabrication
#75MEMS devices anti-stiction coating and encapsulant having opposing water resitive characteristics