83763 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Constitution or structural means for controlling the movement of the flexible or deformable elements For holding or placing an element in a given position
ELECTROACOUSTIC TRANSDUCER, ARRAY SPEAKER, WEARABLE DEVICE, SPEAKER, ULTRASONIC TRANSMITTER, AND METHOD OF MANUFACTURING ELECTROACOUSTIC TRANSDUCER
#2LOCKING MECHANISMS FOR PRECISION OFFSET/DEPLOYMENT OF MEMS STRUCTURES
#3COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A MEMS DEVICE
#4Electromechanical Microsystem for Moving a Mechanical Part in Two Opposite Directions
#5MEMS DIE AND MEMS-BASED SENSOR
#6Sound producing cell
#7PACKAGE STRUCTURE, APPARATUS AND FORMING METHODS THEREOF
#8ANCHOR DESIGN WITH REJECTION OF EXTERNAL SHEAR FORCE
#9CAPILLARY BRIDGE ENHANCED FLUID GRIP DEVICE
#10Composite spring structure to reinforce mechanical robustness of a MEMS device
#11MEMS die and MEMS-based sensor
#12Composite spring structure to reinforce mechanical robustness of a MEMS device
#13MICRO-ELECTROMECHANICAL ACTUATING DEVICE PROVIDING A MOVEMENT HAVING MULTIPLE DEGREES OF FREEDOM
#14Programmable surface
#15MEMS microphone and method of manufacturing the same
#16Three-dimensional electromechanical adhesive devices and related systems and methods
#17Sensor device employing MEMS
#18Hierarchical assembly of self-replicating spacecraft using distributed mechanisms and actuation in digital materials
#19Electromagnetically actuated microelectromechanical switch
#20Micro-electro-mechanical systems (MEMS) terminal structure of board-to-board electrical connector and manufacturing method thereof
#21MEMS sound transducer, MEMS microphone and method for providing a MEMS sound transducer
#22Rotational speed sensor with minimized interference movements in the driving mode
#23Integrated electroacoustic MEMS transducer with improved sensitivity and manufacturing process thereof
#24Microelectromechanical system with spring for magnet placement
#25Check-valve and microchemical chip using the same
#26Acceleration sensor having spring force compensation
#27Method for producing a rolled-up electrical or electronic component
#28Support pillar
#29Support pillar
#30Support pillar
#31Micro electromagnetically actuated latched switches
#32Scanning mirror device and a method for manufacturing it
#33Angular velocity acquisition device and electronic component for acquiring angular velocity
#34Micromirror device and projection device
#35Microelectronic component arrangement and production method for a microelectronic component arrangement
#36MEMS devices and fabrication methods thereof
#37Support pillar
#38Semiconductor pressure sensor and method of fabricating same
#39Actuator, shutter device, fluid control device, switch, and two-dimensional scanning sensor device
#40MEMS accelerometer with Z axis anchor tracking
#41Micro electromagnetically actuated latched switches
#42Sensor and method for manufacturing a sensor
#43MEMS DEVICE, PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT
#44Sensor structures, systems and methods with improved integration and optimized footprint
#45Display apparatus incorporating dual-level shutters
#46Method for forming normally closed micromechanical device comprising a laterally movable element
#47Out-of plane travel restriction structures
#48MEMS devices and fabrication methods thereof
#49Microelectromechanical system (MEMS) device, method of operating the same, and method of forming the same
#50MEMS-BASED ULTRA-LOW POWER DEVICES
#51Multi-axis, large tilt angle, wafer level micromirror array for large scale beam steering applications
#52Vertical sensor assembly method
#53Microsystem and method for the production of a microsystem
#54Multi-stable micro electromechanical switches and methods of fabricating same
#55Fabry-Perot type tunable filter and fabrication method thereof
#56Switch array
#57MEMS device with nanowire standoff layer
#58Deflectable structure, micromechanical structure comprising same, and method for adjusting a micromechanical structure
#59NON-CONTACT MICRO MIRRORS
#60Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
#61Micromechanical Component With Active Elements and Method Producing a Component of This Type
#62Energy storage structures using electromechanically active materials for micro electromechanical systems
#63Microelectrical Device With Space Charge Effect
#64Multi-stable micro electromechanical switches and methods of fabricating same
#65Versatile system for restricting movement of MEMS structures
#66Micro structure with interlock configuration
#67Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
#68Microelectromechanical system able to switch between two stable positions
#69Dual position linear displacement micromechanism
#70Micro structure with interlock configuration
#71Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same