83764 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Constitution or structural means for controlling the movement of the flexible or deformable elements Adjusting the distance between two elements, at least one of them being movable, e.g. air-gap tuning
MEMS WITH ADJUSTED SEMICONDUCTOR BEHAVIOR
#2MEMS CANTILEVER-ENCLOSURE SPACING
#3PRESSURE VALVE FOR MICROELECTROMECHANICAL SYSTEM DIE
#4VARIABLE INDUCTOR AND INDUCTOR MODULE
#5MEMS DEVICE AND METHOD FOR PRODUCING MEMS DEVICE
#6MEMS DEVICE
#7MICRO-MIRROR FRINGE FIELD ELECTRODE DESIGN WITH MISALIGNMENT COMPENSATION
#8MEMS MICROPHONE
#9MEMS DEVICE AND MANUFACTURING METHOD THEREOF
#10LAMINATED STRUCTURE AND METHOD OF MANUFACTURING LAMINATED STRUCTURE
#11Microphone assembly with disturbance compensation
#12Modification to rough polysilicon using ion implantation and silicide
#13Sculpted micromirror in a digital micromirror device
#14MICROMECHANICAL COMPONENT FOR A SENSOR OR MICROPHONE DEVICE
#15Vibration-Driven Energy Harvesting Element, Method of Manufacturing Vibration-Driven Energy Harvesting Element, Capacitive Element, and Method of Manufacturing Capacitive Element
#16OPTICAL DEVICE AND A METHOD FOR BONDING
#17Force feedback actuator for a MEMS transducer
#18MEMS element
#19Modification to rough polysilicon using ion implantation and silicide
#20Sidewall stopper for MEMS device
#21MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS
#22MEMS and method of manufacturing the same
#23Tunable MEMS etalon device
#24MEMS driving device, electronic apparatus, and MEMS driving method
#25Sensitivity compensation for capacitive MEMS device
#26Device comprising a micro-electro-mechanical system substrate with protrusions of different heights that has been integrated with a complementary metal-oxide-semiconductor substrate
#27Actuator plate partitioning and control devices and methods
#28Micromechanical constituent and method for adjusting an adjustable element
#29Capacitive transducer and acoustic sensor
#30Tunable MEMS etalon
#31MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS
#32Small wafer are MEMS switch
#33Small wafer area MEMs switch
#34Offset rejection electrodes
#35Small wafer area MEMS switch
#36Miniaturized and ruggedized wafer level MEMs force sensors
#37Three-dimensional inter-chip contact through vertical displacement MEMS
#38Methods and apparatus for MEMS devices with increased sensitivity
#39Micro normally-closed structure and method for manufacturing the same
#40Semiconductor package with air gap
#41Recovery system and methods for MEMS devices
#42Capacitance type sensor and method of manufacturing the same
#43Actuator plate partitioning and control devices and methods
#44Display apparatus with narrow gap electrostatic actuators
#45Integrated structure with bidirectional vertical actuation
#46MEMS device having variable gap width and method of manufacture
#47Hybrid radio frequency component
#48Three-dimensional inter-chip contact through vertical displacement MEMS
#49Microphone system with mechanically-coupled diaphragms
#50Variable capacitor
#51MEMS device having variable gap width and method of manufacture
#52MEMS SENSOR
#53MEMS-BASED ULTRA-LOW POWER DEVICES
#54MEMS device with controlled electrode off-state position
#55Post-release capacitance enhancement in micromachined devices and a method of performing the same
#56Moving mechanism, and compact camera, goniometer and fiberscope using the moving mechanism