83765 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Constitution or structural means for controlling the movement of the flexible or deformable elements Constitution or structural means for controlling the movement not provided for in groups -
COUPLING DEVICE FOR COUPLING VIBRATION SYSTEMS
#2FORCE SENSOR WITH AN INCREASED OPERATING RANGE
#3Controlling one or more electrostatic comb structures of a micro-electro-mechanical system device
#4MEMS speaker and manufacturing method for same
#5MEMS Speaker
#6MEMS microphone and package with integrated passive acoustic filter, extended soundport
#7Force feedback compensated absolute pressure sensor
#8Inertial sensor, method for manufacturing inertial sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
#9Optical device
#10Optical device and method for manufacturing same
#11Optical device having fixed and movable comb electrodes
#12Microdevice comprising at least two movable elements
#13Device for sealing two spaces filled with different fluids in a MEMS sensor system
#14Out-of-plane hinge for micro and nanoelectromechanical systems with reduced non-linearity
#15Linearized micromechanical sensor
#16Sensing devices, sensors, and methods for monitoring environmental conditions
#17Inertial sensor, method for manufacturing inertial sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
#18Vertical stopper for capping MEMS devices
#19MEMS DEVICE
#20Anchoring structure for a sensor insensitive to anchor movement
#21Accelerometers
#22MEMS sensors with selectively adjusted damping of suspension
#23Microelectromechanical system with spring for magnet placement
#24Vertical stopper for capping MEMS devices
#25Circuit for detection of failure of movable MEMS mirror
#26Cavity with silicon on insulator MEMS pressure sensing device with an extended shallow cross-shaped cavity
#27Acceleration sensor having spring force compensation
#28Method for producing a rolled-up electrical or electronic component
#29MEMS actuator, system having a plurality of MEMS actuators, and method for producing a MEMS actuator
#30Three-dimensional microstructure having a first dielectric element and a second multi-layer metal element configured to define a non-solid volume
#31Electromechanical system substrate attachment for reduced thermal deformation
#32MEMS capacitive pressure sensors
#33METHOD OF CONTROLLING MEMS VARIABLE CAPACITOR AND INTEGRATED CIRCUIT DEVICE
#34Methods and apparatus for MEMS devices with increased sensitivity
#35Force feedback loop for pressure sensors
#36Mechanisms for forming micro-electro mechanical system device
#37Wafer level sealing methods with different vacuum levels for MEMS sensors
#38Method of forming a micro-electro-mechanical system (MEMS) structure
#39MEMS device having a microphone structure, and method for the production thereof
#40Apparatus and method for preventing stiction of MEMS devices encapsulated by active circuitry
#41Methods and apparatus for MEMS devices with increased sensitivity
#42Implantation of gaseous chemicals into cavities formed in intermediate dielectrics layers for subsequent thermal diffusion release
#43MEMS devices and methods for forming the same
#44MEMS multi-axis gyroscope Z-axis electrode structure
#45MEMS multi-axis gyroscope with central suspension and gimbal structure
#46Methods and systems for micro bearings
#47Oblique parts or surfaces
#48Methods of manufacturing a micro-electro-mechanical system (MEMS) structure
#49Three-dimensional microstructures having a re-entrant shape aperture and methods of formation
#50Methods and systems for positioning micro elements
#51STICTION MITIGATION WITH INTEGRATED MECH MICRO-CANTILEVERS THROUGH VERTICAL STRESS GRADIENT CONTROL
#52Micromechanical assembly having a displaceable component
#53Optical scanner
#54Oblique parts or surfaces
#55Oblique parts or surfaces
#56Active materials-based compliant mechanisms
#57Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control
#58Three-dimensional microstructures and methods of formation thereof
#59Reduction of air damping in MEMS device
#60Hysteretic MEMS thermal device and method of manufacture
#61Movable device
#62Three-dimensional microstructures having an embedded support member with an aperture therein and method of formation thereof
#63Methods and systems for positioning micro elements
#64Apparatus and method for microfabricated multi-dimensional sensors and sensing systems
#65Methods and systems for micro bearings
#66Magnetic MEMS device
#67Pressure compensation structure for microelectromechanical systems
#68Spaced, bumped component structure
#69Oblique parts or surfaces
#70Adhesive microstructure and method of forming same
#71System and method for a differential comb drive MEMS