83776 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Constitution or structural means for improving or controlling the physical properties of a device Chemical or biological characteristics, e.g. layer which makes a surface chemically active
EXPANSION MEDIATED ADHESIVE DEVICE
#2Microfluidic chip and fabrication method
#3MICROFLUIDIC CHIP
#4Modification to rough polysilicon using ion implantation and silicide
#5MICRO-FLUIDIC CHIP, LIQUID LOADING METHOD THEREOF AND MICRO-FLUIDIC SYSTEM
#6EXPANSION MEDIATED ADHESIVE DEVICE
#7Vibration-Driven Energy Harvesting Element, Method of Manufacturing Vibration-Driven Energy Harvesting Element, Capacitive Element, and Method of Manufacturing Capacitive Element
#8Hybrid Metal and Carbon or Glassy Carbon MEMS u-ECOG Electrode and Microelectrode Structures
#9Sensor, composite material and method of manufacturing the same
#10Modification to rough polysilicon using ion implantation and silicide
#11Semiconductor device and method of producing a semiconductor device
#12MEMS transducer system for pressure and acoustic sensing
#13Anti-wetting coating for Si-based MEMS fluidic device, and method of application of same
#14Adhesive silicon oxynitride film
#15Pressure sensor
#16Micro-electro-mechanical device with ion exchange polymer
#17MOx-based gas sensor and manufacturing method thereof
#18Methods for depositing a measured amount of a species in a sealed cavity
#19OXIDE BARRIER COATED SEMICONDUCTOR GAS SENSORS
#20Sound transducer with housing and MEMS structure
#21Integrated particle and light filter for MEMS device
#22Pressure sensor
#23Sensor, composite material and method of manufacturing the same
#24Membrane of amorphous carbon and MEMS including such a membrane
#25MEMS device with electrodes permeable to outgassing species
#26Three-dimensional multi-electrode array
#27ELECTRONIC DEVICE
#28Surfaces physically transformable by environmental changes
#29DEPOSITION OF NANOWIRES AND OTHER NANOSCALE OBJECTS ON SURFACES
#30Nanofiber surfaces for use in enhanced surface area applications
#31Procedural Functional Element of a Stack of Films
#32Surfaces physically transformable by environmental changes
#33Resonant sensor and sensing system
#34Resonant sensor and sensing system
#35Graphene membrane microfluidic system
#36TFT-based sensor with multiple sensing modalities