B81B3/0064 - CPC Classification Index

ClassID:

83767 ⎘

B81B3/0064 - CPC Classification

Classification description:

Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes Constitution or structural means for improving or controlling the physical properties of a device

Sub-classes:

B81B3/0067 » {Mechanical properties} 54
B81B3/0081 » {Thermal properties} 118
B81B3/0083 » {Optical properties} 81
B81B3/0086 » {Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage} 312
B81B3/0089 » {Chemical or biological characteristics, e.g. layer which makes a surface chemically active} 33
B81B3/0091 » {Magnetic properties, e.g. guiding magnetic flux} 14
B81B3/0094 » {Constitution or structural means for improving or controlling physical properties not provided for in to } 45

Recent Application in this class:

20230192476

2023-06-22

MICROELECTROMECHANICAL SYSTEM DEVICE

20220277185

2022-09-01

Passive micromechanical counter

20210377652

2021-12-02

MEMS ULTRASONIC TRANSDUCER

20210221672

2021-07-22

Actuator and manufacture method thereof, operation method thereof, and movable device

20210136483

2021-05-06

Structure of micro-electro-mechanical-system microphone and method for fabricating the same

20200369514

2020-11-26

PACKAGING FOR A MEMS TRANSDUCER

20200225107

2020-07-16

Sensor unit and method of interconnecting a substrate and a carrier

20200102210

2020-04-02

Method for calibrating a sensor system

20200095527

2020-03-26

Microchannel device

#10

20180164241

2018-06-14

MICRO-ELECTROMECHANICAL DEVICE, SYSTEM AND METHOD FOR ENERGY HARVESTING AND SENSING

#11

20180127265

2018-05-10

Package for MEMS device and process

#12

20150021745

2015-01-22

Reactive ion etching

#13

20140117472

2014-05-01

Micromechanical component

#14

20140083164

2014-03-27

Calibration of MEMS sensor

#15

20130193533

2013-08-01

Embedded circuit in a MEMS device