83778 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Constitution or structural means for improving or controlling the physical properties of a device Constitution or structural means for improving or controlling physical properties not provided for in -
ELECTRODES FOR MICROELECTROMECHANICAL SYSTEM MICROPHONES
#2MEMS MICROPHONE
#3Actively controlled surfaces
#4Pressure sensor encapsulated in elastomeric material, and system including the pressure sensor
#5POSITION SENSING CIRCUIT FOR AN ELECTRONICALLY DRIVEN MEMS DEVICE
#6Actively-controlled superhydrophobic surfaces
#7Micromechanical structure having a copper circuit trace
#8Integrated circuit comprising multi-layer micromechanical structures with improved mass and reliability by using modified vias and method for forming the same
#9Pressure sensor encapsulated in elastomeric material, and system including the pressure sensor
#10Microphone and method of manufacturing the same
#11Microphone and manufacturing method thereof
#12Transducer with enlarged back volume
#13MEMS PROCESS AND DEVICE
#14Semiconductor structure and manufacturing method thereof
#15Multi-level micromechanical structure
#16MEMS process and device
#17ACTIVELY-CONTROLLED SUPERHYDROPHOBIC SURFACES
#18Packaging concept to improve performance of a micro-electro mechanical (MEMS) microphone
#19Methods for producing a cavity within a semiconductor substrate
#20MEMS sensor with dynamically variable reference capacitance
#21Micro-electro mechanical system (MEMS) device having a blocking layer formed between closed chamber and a dielectric layer of a CMOS substrate
#22MEMs device with outgassing shield
#23Electroactive polymer structures printed with varying compositions of ions
#24Device with MEMS structure and ventilation path in support structure
#25ELECTROMECHANICAL TRANSDUCER AND METHOD FOR FABRICATING THE SAME
#26Wafer-level packaging of integrated devices, and manufacturing method thereof
#27MEMS process and device
#28Transducer with enlarged back volume
#29Methods for producing a cavity within a semiconductor substrate
#30Microelectromechanical sensor with out-of-plane sensing and process for manufacturing a microelectromechanical sensor
#31MEMS pressure sensor device and manufacturing method thereof
#32RESONANT MATERIAL LAYER APPARATUS, METHOD AND APPLICATIONS
#33Method for fabricating an electromechanical transducer
#34MEMS process and device
#35Capacitive sensor and actuator
#36MICROFLUIDIC CIRCUIT ELEMENT COMPRISING MICROFLUIDIC CHANNEL WITH NANO INTERSTICES AND FABRICATION METHOD THEREOF
#37MICRO-NANO FLUIDIC BIOCHIP FOR ASSAYING BIOLOGICAL SAMPLE
#38Catalyst for microelectromechanical systems microreactors
#39MICROMECHANICAL COMPONENT AND METHOD FOR OPERATING A MICROMECHANICAL COMPONENT
#40Active materials-based compliant mechanisms
#41MEMS suspension and anchoring design
#42Resonant optical scanner using vibrating body with optimized resonant frequency characteristics and image forming apparatus having the same
#43Actuator element and production method therefor
#44Catalyst for microelectromechanical systems microreactors
#45Microstructure comprising a surface which is functionalized through the localized deposit of a thin layer and production method thereof