MEMS PLATFORM FOR THIN FILM NANOMECHANICS CHARACTERIZATION

SYSTEM AND METHOD FOR ARRAY OF MEMS ELEMENTS

DISTANCE MEASUREMENT APPARATUS, ANGLE-OF-VIEW CONTROL METHOD, AND COMPUTER-READABLE RECORDING MEDIUM STORING PROGRAM

Rotatable micromirror with improved shock and vibration performance

Microelectromechanical systems (MEMS) switch and related methods

METHOD OF ASSEMBLING MOBILE MICRO-MACHINES AND A MOBILE MICRO-MACHINE

PROGRAMMABLE, SELF-ASSEMBLING PATCHED NANOPARTICLES, AND ASSOCIATED DEVICES, SYSTEMS AND METHODS

FORMATION OF SELF-ASSEMBLED MONOLAYER FOR ULTRASONIC TRANSDUCERS

Inertial measurement device

Out-of-plane hinge for micro and nanoelectromechanical systems with reduced non-linearity

Micromirror with improved shock and vibration performance having differing hinge portions

TACTILE COMPUTING DEVICE

Micromechanical devices with mechanical actuators

Microelectromechanical device, which can be used as non-volatile memory module or relay, and memory including a plurality of microelectromechanical devices

Hierarchical assembly of self-replicating spacecraft using distributed mechanisms and actuation in digital materials

PROGRAMMABLE, SELF ASSEMBLING PATCHED NANOPARTICLES, AND ASSOCIATED DEVICES, SYSTEMS AND METHODS

Beam steering device and system employing same

Microelectromechanical device, which can be used as non-volatile memory module or relay, and memory including a plurality of microelectromechanical devices

Triaxial micro-electromechanical gyroscope

DEVICE AND METHOD FOR PRODUCING A DEVICE COMPRISING MICRO OR NANOSTRUCTURES

Refractory seed metal for electroplated MEMS structures

Electronic device having MEMS element and resistive element

Microelectromechanical system (MEMS) devices with dielectric microstructure motion stopper

Array structures of containers

THREE-DIMENSIONAL OBLIQUE MICROSTRUCTURE WITH PRESS DOWN AND ENGAGEMENT MECHANISMS

Dielectric microstructure for use in microelectromechanical systems and method of forming same

High-frequency circuit components

Self-assembling MEMS devices having thermal actuation

Micro mirror unit and its manufacturing process, and optical switch with the micro mirror unit employed therein

Self-assembly microstructure with polyimide thin-film elastic joint

Micro electro mechanical system and layered hinge for use in MEMS micromirror having first and second serpentine shapes