83781 ⎘
Microstructural systems; Auxiliary parts of microstructural devices or systems
Sub-classes:ULTRATHIN FREE-STANDING SOLID STATE MEMBRANE CHIPS AND METHODS OF MAKING
#2Photothermal conversion element, method of manufacturing the same, photothermal power generator, and microscopic object collection system
#3Artificial Placenta And Methods Of Preparation
#4Nanowire-coated microdevice and method of making and using the same
#5Artificial placenta and methods of preparation
#6Hermetic capsule and method
#7Microfluidic reaction system
#8Method of manufacturing a remote-controlled micro-scale three-dimensional self-assembly
#9Microphone array auto-directive adaptive wideband beamforming using orientation information from MEMS sensors
#10Infrared detector pixel structure and manufacturing method thereof
#11Wafer level packaging for MEMS device
#12Microfluidic device with capillary chamber
#13Proof mass and polysilicon electrode integrated thereon
#14Demodulator for in-phase and quadrature modulated signals, MEMS gyroscope including the same and demodulation method
#15CUSTOMIZATION OF SECURITY DISPLAY DEVICES
#16System and methods of concentrating airborne particles
#17Mirror plate for a fabry-perot interferometer and a fabry-perot interferometer
#18Artificial placenta and methods of preparation
#19Microfluidic transport
#20Nanowire-coated microdevice and method of making and using the same
#21Fully wafer-level-packaged MEMS microphone and method for manufacturing the same
#22Microfluidic chip, manufacturing method therefor and analysis device using same
#23Proximity focus imaging interferometer
#24Functional material, method for producing functional material, and functional liquid
#25MEMS microphone package
#263D stacked piezoresistive pressure sensor
#27Dual substrate electrostatic MEMS switch with multiple hinges and method of manufacture
#28Vertically integrated systems
#29MICROELECTROMECHANICAL SYSTEMS (MEMS) AUDIO SENSOR-BASED PROXIMITY SENSOR
#30Two-state charge-pump control-loop for MEMS DVC control
#31MEMS device structure and methods of forming same
#32Cell sorting system using microfabricated components
#33Device using glass substrate anodic bonding
#34Method using glass substrate anodic bonding
#35Centrifugal microfluidic mixing apparatus with deflection element, and method of mixing
#36Methods And Apparatuses For Droplet Mixing
#37Vertically integrated systems
#38PIEZORESISTANCE SENSOR MODULE AND MEMS SENSOR HAVING THE SAME
#39VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVING OBJECT
#40MEMS 2D air amplifier ion focusing device and manufacturing method thereof
#41MEMS device and methods for manufacturing and using same
#42Aerogel-based mold for MEMS fabrication and formation thereof
#43Varactor and varactor system
#44MEMS device anchoring
#45ELECTRICAL COMPONENT AND METHOD OF MANUFACTURING THE SAME
#46Electrical circuit and method for producing an electrical circuit
#47Vertically integrated systems
#48Vertically integrated systems
#49Wafer with recessed plug
#50Electronic device and its manufacturing method
#51Semiconductor device and method for manufacturing the same
#52Microelectromechanical system (MEMS) device and fabrication method thereof
#53Vertically integrated systems
#54Vertically integrated systems
#55Vertically integrated systems
#56Methods and apparatuses for MEMs based recovery of sequence verified DNA
#57Nano/micro roller bearing having tolerance compensation function and method of manufacturing the same
#58Wireless power transmission system
#59MEMS device structure and methods of forming same
#60Process for fabricating a magnetic tweezer
#61Artificial microstructure and artificial electromagnetic material using the same
#62Artificial microstructure and artificial electromagnetic material using the same
#63Wafer with recessed plug
#64MEMS device and methods for manufacturing and using same
#65Vertically integrated systems
#66Actuator motion control features
#67Aerogel-bases mold for MEMS fabrication and formation thereof
#68Sub-wavelength structures for reduction of reflective properties
#69Enhanced microfabrication using electrochemical techniques
#70Integrated circuit with efficient MEMS architecture