83804 ⎘
Microstructural systems; Auxiliary parts of microstructural devices or systems; Packages or encapsulation 3D packaging, i.e. encapsulation containing one or several MEMS devices arranged in planes non-parallel to the mounting board
MEMS Sensor Module
#2MULTI-CHIP SENSOR
#3MEMS SENSOR WITH PARTICLE FILTER AND METHOD FOR PRODUCING IT
#4SEAL FOR MICROELECTRONIC ASSEMBLY
#5MULTISENSOR MEMS INERTIAL SENSOR GUIDANCE FOR AUTOMATIC VEHICLES
#6THREE-DIMENSIONAL MICRO-ELECTRO-MECHANICAL, MICROFLUIDIC, AND MICRO-OPTICAL SYSTEMS
#7SENSOR PACKAGE AND SENSING MODULE THEREOF
#8INTEGRATED SENSOR DEVICE
#9HIGH RELIABILITY SENSOR
#10DIE STACKING WITH CONTROLLED TILT AND ANGULAR ALIGNMENT
#11VERTICALLY STACKED MEMS DEVICES AND CONTROLLER DEVICE
#12MICROELECTROMECHANICAL SYSTEMS (MEMS) RECTIFIER AND STORAGE ELEMENT FOR ENERGY HARVESTING
#13METHOD FOR MANUFACTURING A DEVICE COMPRISING TWO SEMICONDUCTOR DICE AND A DEVICE THEREOF
#14SEAL FOR MICROELECTRONIC ASSEMBLY
#15CHIP ASSEMBLY AND METHOD OF MAKING A CHIP ASSEMBLY
#16MICRO-ELECTRO-MECHANICAL SYSTEM MICROPHONE PACKAGE
#17SEMICONDUCTOR DEVICE AND SENSOR MODULE
#18ENVIRONMENTAL SYSTEM-IN-PACKAGE FOR HARSH ENVIRONMENTS
#19Semiconductor Device and Method of Making a MEMS Semiconductor Package
#20STACKED DIE PACKAGE AND METHODS OF FORMING THE SAME
#21Microelectromechanical systems (MEMS) rectifier and storage element for energy harvesting
#22Attachment of Stress Sensitive Integrated Circuit Dies
#23Semiconductor package device and method for manufacturing the same
#24Seal for microelectronic assembly
#25Wafer level stacked structures having integrated passive features
#26Sensor device and sensor
#27Sensing device and method for manufacturing sensing device
#28Chip package
#29MEMS SENSOR WITH PARTICLE FILTER AND METHOD FOR PRODUCING IT
#30Semiconductor package device and method for manufacturing the same
#31MEMS microphone with hybrid packaging structure
#32Integrated MEMS cavity seal
#33Wafer level stacked structures having integrated passive features
#34Semiconductor device
#35Chip package and manufacturing method thereof
#36Three-dimensional micro-electro-mechanical, microfluidic, and micro-optical systems
#37Microelectromechanical device with signal routing through a protective cap
#38Attachment of stress sensitive integrated circuit dies
#39Seal for microelectronic assembly
#40Seal for microelectronic assembly
#41Seal ring bonding structures
#42SEMICONDUCTOR DEVICE PACKAGE AND A METHOD OF MANUFACTURING THE SAME
#43Integrated micro-electromechanical device of semiconductor material having a diaphragm
#44Semiconductor package with multiple compartments
#45Inertial measurement units
#46Device for supporting a MEMS component
#47Multiple plated via arrays of different wire heights on same substrate
#48Method of manufacturing an electronic device
#49Contact pads for electrical module assembly with multidimensional transducer arrays
#50Multiple bond via arrays of different wire heights on a same substrate
#51Seal for microelectronic assembly
#52Semiconductor package with multiple compartments
#53SEMICONDUCTOR DEVICES WITH CAVITIES AND METHODS FOR FABRICATING SEMICONDUCTOR DEVICES WITH CAVITIES
#54Wiring-buried glass substrate, and inertial sensor element and inertial sensor using same
#55Low stress integrated device packages
#56Method and structure of MEMS PLCSP fabrication
#57Microelectromechanical device with signal routing through a protective cap
#58PIEZOELECTRIC PACKAGE-INTEGRATED SWITCHING DEVICES
#59ELECTRONIC DEVICE, PART MOUNTING BOARD, AND ELECTRONIC APPARATUS
#60Multiple MEMS device and methods
#61Low cost wafer level process for packaging MEMS three dimensional devices
#62INTEGRATION OF LAMINATE MEMS IN BBUL CORELESS PACKAGE
#63Micromechanical component and method for producing same
#64Production method for a detection apparatus and detection apparatuses
#65Protection structure for semiconductor device package
#66ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT
#67Semiconductor devices with cavities and methods for fabricating semiconductor devices with cavities
#68Multiple bond via arrays of different wire heights on a same substrate
#69ELECTRONIC SYSTEM, AS WELL AS MANUFACTURING METHOD, AND DEVICE FOR MANUFACTURING AN ELECTRONIC SYSTEM
#70Microelectronic packages having split gyroscope structures and methods for the fabrication thereof
#71MEMS-CMOS-MEMS platform
#72MEMS packages and methods of manufacture thereof
#73Device with vertically integrated sensors and method of fabrication
#74Semiconductor device
#75SEMICONDUCTOR PACKAGE USING A POLYMER SUBSTRATE
#76Integrated micro-electromechanical device of semiconductor material having a diaphragm, such as a pressure sensor and an actuator
#77Through-wafer interconnects for MEMS double-sided fabrication process (TWIDS)
#78Low stress compact device packages
#79Microelectromechanical device with signal routing through a protective cap
#80Isolation structure for MEMS 3D IC integration
#81CAVITY PACKAGE DESIGN
#82Package with chambers for dies and manufacturing process thereof
#83Packages for semiconductor devices and methods for assembling same
#84Methods for packaging a microelectromechanical system (MEMS) wafer and application-specific integrated circuit (ASIC) dies using wire bonding
#85Methods for packaging a microelectromechanical system (MEMS) wafer and application-specific integrated circuit (ASIC) dies using through mold vias (TMVs)
#86Semiconductor Structure with Multiple Active Layers in an SOI Wafer
#87MICROELECTRONIC DEVICES AND METHODS FOR MANUFACTURING MICROELECTRONIC DEVICES
#88Method of making a system-in-package device, and a system-in-package device
#89MEMS fabrication process with two cavities operating at different pressures
#90Glass wafer assembly
#91Microelectronic packages having stacked accelerometer and magnetometer die and methods for the production thereof
#92MEMS device and formation method thereof
#93Microelectronic packages having stacked accelerometer and magnetometer die and methods for the production thereof
#94Compact electronic package with MEMS IC and related methods
#95Method of stacking a plurality of dies to form a stacked semiconductor device, and stacked semiconductor device
#96Method for manufacturing a die assembly having a small thickness and die assembly relating thereto
#97Sensor device packages and related fabrication methods
#98Multi-port device package
#99Microelectromechanical device with signal routing through a protective cap
#100Two-axis vertical mount package assembly
#101Electronic device, electronic apparatus, and method of manufacturing electronic device
#102Multifunction sensor as PoP microwave PCB
#103Method for creating and packaging three dimensional stacks of biochips containing microelectro-mechanical systems
#104Package for a MEMS sensor and manufacturing process thereof
#105Systems and methods for three-axis sensor chip packages
#106Sensor module, sensor device, manufacturing method of sensor device, and electronic apparatus
#107Sensor module and method for manufacturing a sensor module
#108Vertical mount package for MEMS sensors
#109Edge-mounted sensor
#110Method for connecting substrate and method for manufacturing semiconductor device
#111Systems and methods for a three-layer chip-scale MEMS device
#112Apparatus and method for microelectromechanical systems device packaging
#113Three dimensional folded MEMS technology for multi-axis sensor systems
#114Systems and methods for mounting inertial sensors
#115Electronic device, electronic module, and methods for manufacturing the same
#116Silicon tab edge mount for a wafer level package
#117Chip module and method for producing a chip module having plains of extensions for chip and substrate
#118Vertically integrated MEMS acceleration transducer
#119PRECISION MICRO-ELECTROMECHANICAL SENSOR (MEMS) MOUNTING IN ORGANIC PACKAGING
#120Wiring substrate with a wire terminal
#121Package for electronic component, manufacturing method thereof and sensing apparatus
#122Apparatus with Side Mounted Microchip
#123Vertical mount package for MEMS sensors
#124INTEGRATED CIRCUIT DISTRIBUTED OVER AT LEAST TWO NON-PARALLEL PLANES AND ITS METHOD OF PRODUCTION
#125Surface mount multi-axis electronics package for micro-electrical mechanical systems(MEMS) devices
#126Method of manufacturing flexible semiconductor assemblies
#127Electronic device, electronic module, and methods for manufacturing the same
#128Three-dimensional multi-chips and tri-axial sensors and methods of manufacturing the same
#129SENSOR BLOCK
#130Miniature package for translation of sensor sense axis
#131Microelectronic devices and methods for manufacturing microelectronic devices
#132Three-dimensional semiconductor module having multi-sided ground block
#133Package for MEMS devices
#134Semiconductor package with multiple compartments
#135Metal mesh lid MEMS package and method