ClassID:

83804

B81B7/0074 - CPC Classification

Classification description:

Microstructural systems; Auxiliary parts of microstructural devices or systems; Packages or encapsulation 3D packaging, i.e. encapsulation containing one or several MEMS devices arranged in planes non-parallel to the mounting board

Recent Application in this class:
#1
20260097955
2026-04-09

MEMS Sensor Module

#2
20260062286
2026-03-05

MULTI-CHIP SENSOR

#3
20250376370
2025-12-11

MEMS SENSOR WITH PARTICLE FILTER AND METHOD FOR PRODUCING IT

#4
20250343086
2025-11-06

SEAL FOR MICROELECTRONIC ASSEMBLY

#5
20250224729
2025-07-10

MULTISENSOR MEMS INERTIAL SENSOR GUIDANCE FOR AUTOMATIC VEHICLES

#6
20250174566
2025-05-29

THREE-DIMENSIONAL MICRO-ELECTRO-MECHANICAL, MICROFLUIDIC, AND MICRO-OPTICAL SYSTEMS

#7
20250109972
2025-04-03

SENSOR PACKAGE AND SENSING MODULE THEREOF

#8
20250109011
2025-04-03

INTEGRATED SENSOR DEVICE

#9
20250074765
2025-03-06

HIGH RELIABILITY SENSOR

#10
20240425364
2024-12-26

DIE STACKING WITH CONTROLLED TILT AND ANGULAR ALIGNMENT

#11
20240199411
2024-06-20

VERTICALLY STACKED MEMS DEVICES AND CONTROLLER DEVICE

#12
20240166497
2024-05-23

MICROELECTROMECHANICAL SYSTEMS (MEMS) RECTIFIER AND STORAGE ELEMENT FOR ENERGY HARVESTING

#13
20240140783
2024-05-02

METHOD FOR MANUFACTURING A DEVICE COMPRISING TWO SEMICONDUCTOR DICE AND A DEVICE THEREOF

#14
20230420313
2023-12-28

SEAL FOR MICROELECTRONIC ASSEMBLY

#15
20230400788
2023-12-14

CHIP ASSEMBLY AND METHOD OF MAKING A CHIP ASSEMBLY

#16
20230345184
2023-10-26

MICRO-ELECTRO-MECHANICAL SYSTEM MICROPHONE PACKAGE

#17
20230257258
2023-08-17

SEMICONDUCTOR DEVICE AND SENSOR MODULE

#18
20230235664
2023-07-27

ENVIRONMENTAL SYSTEM-IN-PACKAGE FOR HARSH ENVIRONMENTS

#19
20230192478
2023-06-22

Semiconductor Device and Method of Making a MEMS Semiconductor Package

#20
20230163103
2023-05-25

STACKED DIE PACKAGE AND METHODS OF FORMING THE SAME

#21
20230138355
2023-05-04

Microelectromechanical systems (MEMS) rectifier and storage element for energy harvesting

#22
20230126598
2023-04-27

Attachment of Stress Sensitive Integrated Circuit Dies

#23
20230005841
2023-01-05

Semiconductor package device and method for manufacturing the same

#24
20220415734
2022-12-29

Seal for microelectronic assembly

#25
20220367339
2022-11-17

Wafer level stacked structures having integrated passive features

#26
20220364864
2022-11-17

Sensor device and sensor

#27
20220315413
2022-10-06

Sensing device and method for manufacturing sensing device

#28
20220219970
2022-07-14

Chip package

#29
20220033249
2022-02-03

MEMS SENSOR WITH PARTICLE FILTER AND METHOD FOR PRODUCING IT

#30
20210407910
2021-12-30

Semiconductor package device and method for manufacturing the same

#31
20210321184
2021-10-14

MEMS microphone with hybrid packaging structure

#32
20210147218
2021-05-20

Integrated MEMS cavity seal

#33
20210125918
2021-04-29

Wafer level stacked structures having integrated passive features

#34
20210047173
2021-02-18

Semiconductor device

#35
20210032096
2021-02-04

Chip package and manufacturing method thereof

#36
20210020576
2021-01-21

Three-dimensional micro-electro-mechanical, microfluidic, and micro-optical systems

#37
20200385260
2020-12-10

Microelectromechanical device with signal routing through a protective cap

#38
20200361764
2020-11-19

Attachment of stress sensitive integrated circuit dies

#39
20200140268
2020-05-07

Seal for microelectronic assembly

#40
20200140267
2020-05-07

Seal for microelectronic assembly

#41
20190378798
2019-12-12

Seal ring bonding structures

#42
20190295914
2019-09-26

SEMICONDUCTOR DEVICE PACKAGE AND A METHOD OF MANUFACTURING THE SAME

#43
20190292045
2019-09-26

Integrated micro-electromechanical device of semiconductor material having a diaphragm

#44
20190276306
2019-09-12

Semiconductor package with multiple compartments

#45
20190265268
2019-08-29

Inertial measurement units

#46
20190248648
2019-08-15

Device for supporting a MEMS component

#47
20190148344
2019-05-16

Multiple plated via arrays of different wire heights on same substrate

#48
20190062150
2019-02-28

Method of manufacturing an electronic device

#49
20180327256
2018-11-15

Contact pads for electrical module assembly with multidimensional transducer arrays

#50
20180301436
2018-10-18

Multiple bond via arrays of different wire heights on a same substrate

#51
20180273377
2018-09-27

Seal for microelectronic assembly

#52
20180251369
2018-09-06

Semiconductor package with multiple compartments

#53
20180170748
2018-06-21

SEMICONDUCTOR DEVICES WITH CAVITIES AND METHODS FOR FABRICATING SEMICONDUCTOR DEVICES WITH CAVITIES

#54
20180168034
2018-06-14

Wiring-buried glass substrate, and inertial sensor element and inertial sensor using same

#55
20170320725
2017-11-09

Low stress integrated device packages

#56
20170313578
2017-11-02

Method and structure of MEMS PLCSP fabrication

#57
20170297906
2017-10-19

Microelectromechanical device with signal routing through a protective cap

#58
20170283249
2017-10-05

PIEZOELECTRIC PACKAGE-INTEGRATED SWITCHING DEVICES

#59
20170263581
2017-09-14

ELECTRONIC DEVICE, PART MOUNTING BOARD, AND ELECTRONIC APPARATUS

#60
20170248628
2017-08-31

Multiple MEMS device and methods

#61
20170233247
2017-08-17

Low cost wafer level process for packaging MEMS three dimensional devices

#62
20170225946
2017-08-10

INTEGRATION OF LAMINATE MEMS IN BBUL CORELESS PACKAGE

#63
20170210621
2017-07-27

Micromechanical component and method for producing same

#64
20170205301
2017-07-20

Production method for a detection apparatus and detection apparatuses

#65
20170203959
2017-07-20

Protection structure for semiconductor device package

#66
20170197820
2017-07-13

ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT

#67
20170174507
2017-06-22

Semiconductor devices with cavities and methods for fabricating semiconductor devices with cavities

#68
20170154875
2017-06-01

Multiple bond via arrays of different wire heights on a same substrate

#69
20170073222
2017-03-16

ELECTRONIC SYSTEM, AS WELL AS MANUFACTURING METHOD, AND DEVICE FOR MANUFACTURING AN ELECTRONIC SYSTEM

#70
20170038209
2017-02-09

Microelectronic packages having split gyroscope structures and methods for the fabrication thereof

#71
20170008760
2017-01-12

MEMS-CMOS-MEMS platform

#72
20160347609
2016-12-01

MEMS packages and methods of manufacture thereof

#73
20160297673
2016-10-13

Device with vertically integrated sensors and method of fabrication

#74
20160229690
2016-08-11

Semiconductor device

#75
20160221820
2016-08-04

SEMICONDUCTOR PACKAGE USING A POLYMER SUBSTRATE

#76
20160176702
2016-06-23

Integrated micro-electromechanical device of semiconductor material having a diaphragm, such as a pressure sensor and an actuator

#77
20160167958
2016-06-16

Through-wafer interconnects for MEMS double-sided fabrication process (TWIDS)

#78
20160167951
2016-06-16

Low stress compact device packages

#79
20160145096
2016-05-26

Microelectromechanical device with signal routing through a protective cap

#80
20160145095
2016-05-26

Isolation structure for MEMS 3D IC integration

#81
20160137490
2016-05-19

CAVITY PACKAGE DESIGN

#82
20160107884
2016-04-21

Package with chambers for dies and manufacturing process thereof

#83
20160090301
2016-03-31

Packages for semiconductor devices and methods for assembling same

#84
20160046484
2016-02-18

Methods for packaging a microelectromechanical system (MEMS) wafer and application-specific integrated circuit (ASIC) dies using wire bonding

#85
20160046483
2016-02-18

Methods for packaging a microelectromechanical system (MEMS) wafer and application-specific integrated circuit (ASIC) dies using through mold vias (TMVs)

#86
20160043108
2016-02-11

Semiconductor Structure with Multiple Active Layers in an SOI Wafer

#87
20160031707
2016-02-04

MICROELECTRONIC DEVICES AND METHODS FOR MANUFACTURING MICROELECTRONIC DEVICES

#88
20150375996
2015-12-31

Method of making a system-in-package device, and a system-in-package device

#89
20150375995
2015-12-31

MEMS fabrication process with two cavities operating at different pressures

#90
20150353348
2015-12-10

Glass wafer assembly

#91
20150329352
2015-11-19

Microelectronic packages having stacked accelerometer and magnetometer die and methods for the production thereof

#92
20150274512
2015-10-01

MEMS device and formation method thereof

#93
20150251903
2015-09-10

Microelectronic packages having stacked accelerometer and magnetometer die and methods for the production thereof

#94
20150183637
2015-07-02

Compact electronic package with MEMS IC and related methods

#95
20150145077
2015-05-28

Method of stacking a plurality of dies to form a stacked semiconductor device, and stacked semiconductor device

#96
20150115378
2015-04-30

Method for manufacturing a die assembly having a small thickness and die assembly relating thereto

#97
20150108653
2015-04-23

Sensor device packages and related fabrication methods

#98
20150076628
2015-03-19

Multi-port device package

#99
20140230546
2014-08-21

Microelectromechanical device with signal routing through a protective cap

#100
20140196540
2014-07-17

Two-axis vertical mount package assembly

#101
20130320803
2013-12-05

Electronic device, electronic apparatus, and method of manufacturing electronic device

#102
20130256919
2013-10-03

Multifunction sensor as PoP microwave PCB

#103
20130134604
2013-05-30

Method for creating and packaging three dimensional stacks of biochips containing microelectro-mechanical systems

#104
20130032936
2013-02-07

Package for a MEMS sensor and manufacturing process thereof

#105
20120279077
2012-11-08

Systems and methods for three-axis sensor chip packages

#106
20120256307
2012-10-11

Sensor module, sensor device, manufacturing method of sensor device, and electronic apparatus

#107
20120247205
2012-10-04

Sensor module and method for manufacturing a sensor module

#108
20120235253
2012-09-20

Vertical mount package for MEMS sensors

#109
20120193731
2012-08-02

Edge-mounted sensor

#110
20120190153
2012-07-26

Method for connecting substrate and method for manufacturing semiconductor device

#111
20120126349
2012-05-24

Systems and methods for a three-layer chip-scale MEMS device

#112
20120080764
2012-04-05

Apparatus and method for microelectromechanical systems device packaging

#113
20120032286
2012-02-09

Three dimensional folded MEMS technology for multi-axis sensor systems

#114
20120025332
2012-02-02

Systems and methods for mounting inertial sensors

#115
20110162452
2011-07-07

Electronic device, electronic module, and methods for manufacturing the same

#116
20110108935
2011-05-12

Silicon tab edge mount for a wafer level package

#117
20100252939
2010-10-07

Chip module and method for producing a chip module having plains of extensions for chip and substrate

#118
20100242600
2010-09-30

Vertically integrated MEMS acceleration transducer

#119
20100221860
2010-09-02

PRECISION MICRO-ELECTROMECHANICAL SENSOR (MEMS) MOUNTING IN ORGANIC PACKAGING

#120
20100193939
2010-08-05

Wiring substrate with a wire terminal

#121
20100155862
2010-06-24

Package for electronic component, manufacturing method thereof and sensing apparatus

#122
20100078804
2010-04-01

Apparatus with Side Mounted Microchip

#123
20100078739
2010-04-01

Vertical mount package for MEMS sensors

#124
20090315129
2009-12-24

INTEGRATED CIRCUIT DISTRIBUTED OVER AT LEAST TWO NON-PARALLEL PLANES AND ITS METHOD OF PRODUCTION

#125
20090152653
2009-06-18

Surface mount multi-axis electronics package for micro-electrical mechanical systems(MEMS) devices

#126
20090148983
2009-06-11

Method of manufacturing flexible semiconductor assemblies

#127
20090095510
2009-04-16

Electronic device, electronic module, and methods for manufacturing the same

#128
20070170228
2007-07-26

Three-dimensional multi-chips and tri-axial sensors and methods of manufacturing the same

#129
20070102810
2007-05-10

SENSOR BLOCK

#130
20070101812
2007-05-10

Miniature package for translation of sensor sense axis

#131
20070045807
2007-03-01

Microelectronic devices and methods for manufacturing microelectronic devices

#132
20070001282
2007-01-04

Three-dimensional semiconductor module having multi-sided ground block

#133
20060042382
2006-03-02

Package for MEMS devices

#134
15448177
2018-04-03

Semiconductor package with multiple compartments

#135
13969052
2015-10-20

Metal mesh lid MEMS package and method