ClassID:

83921

B81C1/00039 - CPC Classification

Classification description:

Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements Anchors

Recent Application in this class:
#1
20250033951
2025-01-30

ANCHOR STRUCTURE

#2
20240199413
2024-06-20

MICRO-DEVICE STRUCTURES WITH ETCH HOLES

#3
20220326275
2022-10-13

CAPACITIVE MICROELECTROMECHANICAL DEVICE AND METHOD FOR FORMING A CAPACITIVE MICROELECTROMECHANICAL DEVICE

#4
20220324698
2022-10-13

PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY

#5
20220112078
2022-04-14

Micro-device structures with etch holes

#6
20210055177
2021-02-25

Pressure sensor module

#7
20200300886
2020-09-24

Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device

#8
20200021920
2020-01-16

MEMS microphone and method of manufacturing the same

#9
20200014994
2020-01-09

MEMS microphone and method of manufacturing the same

#10
20190342670
2019-11-07

MEMS microphone, method of manufacturing the same and MEMS microphone package including the same

#11
20190248646
2019-08-15

MEMS devices with an element having varying widths

#12
20190082269
2019-03-14

MEMS microphone and method of manufacturing the same

#13
20180312399
2018-11-01

Device arrangement

#14
20170081172
2017-03-23

Multi-faced component-based electromechanical device

#15
20160046482
2016-02-18

Methods of forming micro-electro-mechanical devices including a conductive feature extending through an escort ring

#16
20150217996
2015-08-06

Dual layer microelectromechanical systems device and method of manufacturing same

#17
20150031159
2015-01-29

MEMS devices and methods of forming the same

#18
20140300249
2014-10-09

MEMS device anchoring

#19
20140295606
2014-10-02

Method for producing a device comprising cavities formed between a suspended element resting on insulating pads semi-buried in a substrate and this substrate

#20
20130299926
2013-11-14

Method for MEMS device fabrication and device formed

#21
20130277770
2013-10-24

MEMS devices and methods of forming the same

#22
20130234270
2013-09-12

Atomic layer deposition strengthening members and method of manufacture

#23
20120295058
2012-11-22

MEMS anchor and spacer structure

#24
20120261830
2012-10-18

MEMS device etch stop

#25
20120251799
2012-10-04

Micromechanical system and corresponding manufacturing method

#26
20120181638
2012-07-19

Method for MEMS device fabrication and device formed

#27
20120070931
2012-03-22

Methods for reduced stress anchors

#28
20110068422
2011-03-24

MEMS coupler and method to form the same

#29
20110068419
2011-03-24

MICROMECHANICAL SYSTEM

#30
20100252897
2010-10-07

Performance-enhancing two-sided MEMS anchor design for vertically integrated micromachined devices

#31
20100006840
2010-01-14

MEMS/NEMS structure comprising a partially monocrystalline anchor and method for manufacturing same

#32
20100003460
2010-01-07

Micro-posts having improved uniformity and a method of manufacture thereof

#33
20090321857
2009-12-31

Systems and methods for reduced stress anchors

#34
20090017579
2009-01-15

Method of manufacturing micro electro mechanical systems device

#35
20060283272
2006-12-21

Micro-mechanical device comprising suspended element which is connected to a support by means of a pier and producing method thereof

#36
14805924
2016-10-04

Systems and methods for anchoring components in MEMS semiconductor devices