83921 ⎘
Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements Anchors
ANCHOR STRUCTURE
#2MICRO-DEVICE STRUCTURES WITH ETCH HOLES
#3CAPACITIVE MICROELECTROMECHANICAL DEVICE AND METHOD FOR FORMING A CAPACITIVE MICROELECTROMECHANICAL DEVICE
#4PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY
#5Micro-device structures with etch holes
#6Pressure sensor module
#7Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device
#8MEMS microphone and method of manufacturing the same
#9MEMS microphone and method of manufacturing the same
#10MEMS microphone, method of manufacturing the same and MEMS microphone package including the same
#11MEMS devices with an element having varying widths
#12MEMS microphone and method of manufacturing the same
#13Device arrangement
#14Multi-faced component-based electromechanical device
#15Methods of forming micro-electro-mechanical devices including a conductive feature extending through an escort ring
#16Dual layer microelectromechanical systems device and method of manufacturing same
#17MEMS devices and methods of forming the same
#18MEMS device anchoring
#19Method for producing a device comprising cavities formed between a suspended element resting on insulating pads semi-buried in a substrate and this substrate
#20Method for MEMS device fabrication and device formed
#21MEMS devices and methods of forming the same
#22Atomic layer deposition strengthening members and method of manufacture
#23MEMS anchor and spacer structure
#24MEMS device etch stop
#25Micromechanical system and corresponding manufacturing method
#26Method for MEMS device fabrication and device formed
#27Methods for reduced stress anchors
#28MEMS coupler and method to form the same
#29MICROMECHANICAL SYSTEM
#30Performance-enhancing two-sided MEMS anchor design for vertically integrated micromachined devices
#31MEMS/NEMS structure comprising a partially monocrystalline anchor and method for manufacturing same
#32Micro-posts having improved uniformity and a method of manufacture thereof
#33Systems and methods for reduced stress anchors
#34Method of manufacturing micro electro mechanical systems device
#35Micro-mechanical device comprising suspended element which is connected to a support by means of a pier and producing method thereof
#36Systems and methods for anchoring components in MEMS semiconductor devices