83924 ⎘
Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements; Grooves Trenches
Method for singulating a wafer and suitable device
#2WAFER LEVEL PROXIMITY SENSOR AND METHOD OF MAKING SAME
#3STRESS ISOLATION PROCESS
#4Micro-electromechanical system device including a precision proof mass element and methods for forming the same
#5High Rate Printing of Microscale and Nanoscale Patterns Using Interfacial Convective Assembly
#6Method for etching gaps of unequal width
#7Micro-electromechanical system device including a precision proof mass element and methods for forming the same
#8Method for preparing micro-cavity array surface product with inclined smooth bottom surface based on air molding method
#9Method for forming a trench in a first semiconductor layer of a multi-layer system
#10Low-parasitic capacitance MEMS inertial sensors and related methods
#11Stress-isolated MEMS device comprising substrate having cavity and method of manufacture
#12MEMS devices comprising spring element and comb drive and associated production methods
#13Method for manufacturing a micromechanical structure and micromechanical structure
#14Segmented pedestal for mounting device on chip
#15NANO-PATTERNED SURFACES FOR MICROFLUIDIC DEVICES AND METHODS FOR MANUFACTURING THE SAME
#16Low-parasitic capacitance MEMS inertial sensors and related methods
#17Segmented pedestal for mounting device on chip
#183D stack configuration for 6-axis motion sensor
#19METHOD FOR FORMING MICROSTRUCTURES
#20Process for manufacturing a microelectromechanical device having a suspended buried structure and corresponding microelectromechanical device
#21Deposition of protective material at wafer level in front end for early stage particle and moisture protection
#22Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths
#23Infrared detector pixel structure and manufacturing method thereof
#24Deposition of protective material at wafer level in front end for early stage particle and moisture protection
#25MEMS SENSOR AND METHOD FOR MANUFACTURING SAME
#26Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths
#27Method for making nanoscale channels
#28Method for manufacturing a micromechanical inertial sensor
#29Semiconductor element and methods for manufacturing the same
#30Stress decoupled piezoresistive relative pressure sensor and method for manufacturing the same
#31Mechanical stress-decoupling in semiconductor device
#32Microfabricated gas flow structure
#33Substrate etch
#34Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles
#35Mechanical stress-decoupling in semiconductor device
#36Electromagnetic wave oscillator having multi-tunnel and electromagnetic wave generating apparatus including the electromagnetic wave oscillator
#37Component of a biosensor and process for production
#38Method of forming wide trenches using a sacrificial silicon slab
#39Defect free deep trench method for semiconductor chip
#40Methods of forming semiconductor structures
#41System and method for probe-based high precision spatial orientation control and assembly of parts for microassembly using computer vision
#42Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles
#43Etching trenches in a substrate
#44Base surface processing method and MEMS device
#45Method for forming recess defect on carbon nanotube
#46Microstructure with an enhanced anchor
#47Using edges of self-assembled monolayers to form narrow features
#48Microelectromechanical system device and method of manufacturing the microelectromechanical system device
#49Low temperature ceramic microelectromechanical structures
#50Focused ion beam deep nano-patterning apparatus and method
#51MICROSTRUCTURE AND MANUFACTURING METHOD THEREOF
#52Micromachined titanium for high pressure microfluidic applications
#53Method of fabricating a biosensor
#54Method for producing etched holes and/or etched trenches as well as a diaphragm sensor unit
#55Microstructure and manufacturing method thereof
#56Wide and narrow trench formation in high aspect ratio MEMS
#57Method of fabricating semiconductor device including forming a protective layer and removing after etching a trench
#58Method for simultaneous patterning of features with nanometer scales gaps
#59Gap tuning for surface micromachined structures in an epitaxial reactor
#60MEMS with over-voltage protection
#61MEMS with over-voltage protection
#62MEMS with over-voltage protection