83926 ⎘
Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements; Grooves Grooves not provided for in groups -
Method for preparing micro-cavity array surface product with inclined smooth bottom surface based on air molding method
#2MEMS device and manufacturing method thereof
#3Cavity forming method for a sensor chip, manufacturing method thereof, chip and electronics apparatus
#4Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles
#5Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles
#6Method for microstructuring surfaces of a workpiece and its use