LARGE-SCALE PLASMONIC HYBRID FRAMEWORK WITH BUILT-IN NANOHOLE ARRAYS AS MULTIFUNCTIONAL OPTICAL SENSING PLATFORMS

MICROFLUIDIC VALVE AND METHOD OF MAKING SAME

MICROFLUIDIC CARTRIDGE AND METHOD OF MAKING SAME

METHOD FOR PROCESSING SILICON SUBSTRATE AND METHOD FOR PROCESSING LIQUID EJECTION HEAD SUBSTRATE

A Method of Manufacturing a MEMS Device

Method of manufacturing a micro-fluid probe

Method for Manufacturing a Microfluidic Device

LARGE-SCALE PLASMONIC HYBRID FRAMEWORK WITH BUILT-IN NANOHOLE ARRAYS AS MULTIFUNCTIONAL OPTICAL SENSING PLATFORMS

ELECTROSTATICALLY GATED NANOFLUIDIC MEMBRANES FOR CONTROL OF MOLECULAR TRANSPORT

Deep reactive ion etching process for fluid ejection heads

MANUFACTURING METHODS FOR DUAL PORE SENSORS

Pore formation in a substrate

STABLE LIPID BILAYERS ON NANOPORE ARRAYS

Stable nanopores and nanopore arrays for ionic and other measurements

Microfluidic cartridge and method of making same

Method for producing a sequencing unit for sequencing a biochemical material and sequencing unit

Method for manufacturing a fluid-ejection device with improved resonance frequency and fluid ejection velocity, and fluid-ejection device

Microfluidic valve and method of making same

Use of an uncoupling structure for assembling a component having a casing

Pore formation in a substrate

DNA sequencing with stacked nanopores

STABLE LIPID BILAYERS ON NANOPORE ARRAYS

Method to reduce pore diameter using atomic layer deposition and etching

Electronic package including cavity formed by removal of sacrificial material from within a cap

Scroll type micro-compressor, and method for machining fixed scroll plate and orbit scroll plate thereof

MEMS microphone and method of manufacturing the same

Method for producing at least one recess in a material by means of electromagnetic radiation and subsequent etching process

Nanopore-forming method, nanopore-forming device and biomolecule measurement device

Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths

METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE

Method for manufacturing a fluid-ejection device with improved resonance frequency and fluid-ejection velocity, and fluid-ejection device

Method of forming semiconductor device

Method to create a free-standing membrane for biological applications

Method to reduce pore diameter using atomic layer deposition and etching

Pore formation in a substrate

Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths

Method of manufacturing membrane device, membrane device, and nanopore device

Device including micromechanical components in cavities having different pressures and method for its manufacture

Method for forming film and method for manufacturing inkjet print head

SILICON SUBSTRATE PROCESSING METHOD, ELEMENT EMBEDDED SUBSTRATE, AND CHANNEL FORMING SUBSTRATE

Nozzle substrate, ink-jet print head, and method for producing nozzle substrate

Device and method for forming same

Electronic package including cavity formed by removal of sacrificial material from within a cap

Method of manufacturing a plurality of through-holes in a layer of first material

Method of manufacturing a plurality of through-holes in a layer of material

Method of manufacturing a plurality of through-holes in a layer of first material

INTEGRATION OF LAMINATE MEMS IN BBUL CORELESS PACKAGE

MEMS pressure sensor and method of manufacturing the same

Controlled fabrication of nanopores in nanometric solid state materials

Nanopore structure, ionic device using nanopore structure and method of manufacturing nanomembrane structure

Substrate structure, semiconductor structure and method for fabricating the same

Nanogap structure for micro/nanofluidic systems formed by sacrificial sidewalls

Nanogap structure for micro/nanofluidic systems formed by sacrificial sidewalls

Process for filling etched holes

Method for producing a micromechanical component, and micromechanical component

Fabricating self-formed nanometer pore array at wafer scale for DNA sequencing

Method for controlling the size of solid-state nanopores

Fabrication of nanopores using high electric fields

Nanopore device including graphene nanopore and method of manufacturing the same

Manufacturing method of an apparatus for the processing of single molecules

Substrate processing method

Process for manufacturing an integrated membrane of nozzles in MEMS technology for a spray device and spray device using such membrane

Micropores and methods of making and using thereof

Controlled fabrication of nanopores in nanometric solid state materials

Crossed slit structure for nanopores

Crossed slit structure for nanopores

Fabricate self-formed nanometer pore array at wafer scale for DNA sequencing

Fabricate self-formed nanometer pore array at wafer scale for DNA sequencing

Methods for obtaining hollow nano-structures

Generation of holes using multiple electrodes

Fluidic structure with nanopore array

Forming nozzles

Through hole forming method, nozzle plate and MEMS device

Dry etching method

Laser processing method

Method of fabricating a membrane having a tapered pore

Sensor device and a method of manufacturing the same

Method to form nanopore array

Structure and method to form nanopore

Process for manufacturing a micromechanical structure having a buried area provided with a filter

Method of forming and patterning conformal insulation layer in vias and etched structures

Method for making via interconnection

Methods and devices for immobilization of single particles in a virtual channel in a hydrodynamic trap

Micropores and methods of making and using thereof

Composite micromechanical component and method of fabricating the same

Process for the Production of Micro-Structured Construction Units by Means of Optical Lithography

Forming nozzles

PROCESS FOR MANUFACTURING AN INTEGRATED MEMBRANE OF NOZZLES IN MEMS TECHNOLOGY FOR A SPRAY DEVICE AND SPRAY DEVICE USING SUCH MEMBRANE

Method for manufacturing an intergrated pressure sensor

Method of forming openings in selected material

SYSTEM-IN-PACKAGE WITH THROUGH SUBSTRATE VIA HOLES

MICRO-HOLE SUBSTRATES AND METHODS OF MANUFACTURING THE SAME

SOLID STATE MEMBRANE CHANNEL DEVICE FOR THE MEASUREMENT AND CHARACTERIZATION OF ATOMIC AND MOLECULAR SIZED SAMPLES

Method of fabricating a membrane having a tapered pore

Micro-Hole Substrates and Methods of Manufacturing the Same

Nanoporous Membrane and Method of Preparation Thereof

Formation of a slot in a silicon substrate

SEMICONDUCTOR DEVICE HAVING STRUCTURE WITH SUB-LITHOGRAPHY DIMENSIONS

Printed metal mask for UV, e-beam, ion-beam and X-ray patterning

High aspect ratio via etch

System and method for forming through wafer vias using reverse pulse plating

Method for dry etching fluid feed slots in a silicon substrate

FLUID INJECTION APPARATUS AND FABRICATION METHOD THEREOF

Micronozzle plate and manufacturing method

Integrated microfluidic vias, overpasses, underpasses, septums, microfuses, nested bioarrays and methods for fabricating the same

Nanopore structure and method using an insulating substrate

Method for dry etching fluid feed slots in a silicon substrate

Method and apparatus for controlled manufacturing of nanometer-scale apertures

Method for producing at least one small opening in a layer on a substrate and components produced according ot said method

Method of forming an assembly to house one or more micro components

Slotted substrates and methods of forming

Nanopore device and methods of fabricating and using the same

Apparatus and method for making a low capacitance artificial nanopore

Nanopore chip with n-type semiconductor

Substrate structure, semiconductor structure and method for fabricating the same