83929 ⎘
Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements Structures having a predefined profile, e.g. sloped or rounded grooves
METHOD FOR ATTACHING A BRIDGING METAL LAYER IN VIA HOLES FOR SUPPORTING POSTS
#2METHOD FOR CREATING SURFACE MICROSTRUCTURES
#3Membrane support for dual backplate transducers
#4Dual membrane transducer
#5PIEZOELECTRIC ACTUATOR STACK WITH TAPERED SIDEWALL
#6Method for preparing micro-cavity array surface product with inclined smooth bottom surface based on air molding method
#7Method for forming a trench in a first semiconductor layer of a multi-layer system
#8Ion generating device, method for manufacturing same, and air conditioner
#9Methods for manufacturing micromechanical components and method for manufacturing a mould insert component
#10Membrane support for dual backplate transducers
#11Membrane support for dual backplate transducers
#12Microfluidic device and preparation method therefor, and microfluidic system
#13Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure
#14Method for manufacturing MEMS microphone
#15METHOD FOR FORMING MICROSTRUCTURES
#16Component especially for horology with surface topology and method for manufacturing the same
#17Methods for manufacturing micromechanical components and method for manufacturing a mould insert component
#18Method for forming a cavity and a component having a cavity
#19Use of Shear to Incorporate Tilt into the Microstructure of Reversible Gecko-Inspired Adhesives
#20Spectrally and temporally engineered processing using photoelectrochemistry
#21Forming a microelectromechanical systems (MEMS) device using silicon-on-nothing and epitaxy
#22MEMS microphone and method for manufacturing the same
#23Method of fabricating a MEMS and/or NEMS structure comprising at least two elements suspended from a support at different distances from said support
#24MANUFACTURING METHOD FOR A MICROMECHANICAL WINDOW STRUCTURE AND CORRESPONDING MICROMECHANICAL WINDOW STRUCTURE
#25Micromechanical component and method for producing a micromechanical component
#26Method for creating patterns
#27Fabrication of three-dimensional structures using reflowed molding
#28Microfluidic pump and valve structures and fabrication methods
#29Method for forming a cavity and a component having a cavity
#30Use of shear to incorporate tilt into the microstructure of reversible gecko-inspired adhesives
#31Silicon-based component with at least one chamfer and its fabrication method
#32Micromechanical component with a reduced contact surface and its fabrication method
#33Method for obtaining at least one structure approximating a sought structure by reflow
#34Nanochannel device with three dimensional gradient by single step etching for molecular detection
#35Spectrally and temporally engineered processing using photoelectrochemistry
#36Method for producing a micromechanical component, and micromechanical component
#37Methods of forming a substrate opening
#38Use of shear to incorporate tilt into the microstructure of reversible gecko-inspired adhesives
#39Method for fabrication of high aspect ratio trenches and formation of nanoscale features therefrom
#40Reduction of chipping damage to MEMS structure
#41Process for fabricating MEMS device
#42Method for etching a complex pattern
#43Microfluidic pump and valve structures and fabrication methods
#44Bowl-shaped structure, method for manufacturing same, and bowl array
#45Method for producing an optical window device for a MEMS device
#46Microfluidic pump and valve structures and fabrication methods
#47PLATFORM WITH ASPHERICAL MEMBRANE BED, PRESSURE SENSOR WITH SUCH A PLATFORM AND METHOD FOR THEIR MANUFACTURE
#48Process for making nanocone structures and using the structures to manufacture nanostructured glass
#49Display device
#50METHOD OF FABRICATING LIQUID FILM, METHOD OF ARRANGING NANO PARTICLES AND SUBSTRATE HAVING LIQUID THIN FILM FABRICATED USING THE SAME
#51PROTUBERANT STRUCTURE AND METHOD FOR MAKING THE SAME
#52PROTUBERANT STRUCTURE AND METHOD FOR MAKING THE SAME
#53Method of forming non-planar membranes using CMP
#54Forming curved features using a shadow mask
#55Micromechanical sound transducer having a membrane support with tapered surface
#56COMPOSITIONS AND METHODS OF GENERATING REPROGRAMMED ADIPOCYTE CELLS AND METHODS OF USE THEREFORE
#57METHOD FOR MANUFACTURING STRUCTURE
#58Method for producing oblique surfaces in a substrate and wafer having an oblique surface
#59Method for producing micromechanical patterns having a relief-like sidewall outline shape or an adjustable angle of inclination
#60Method of manufacturing semiconductor device
#61Method of forming an undercut microstructure
#62MICROFLUID CONTROL DEVICE AND METHOD OF MANUFACTURING THE SAME
#63Micromechanical component having a rear volume
#64Micromechanical component having an inclined structure and corresponding manufacturing method
#65Polymers, methods of use thereof, and methods of decomposition thereof
#66METHOD FOR THE PRODUCTION OF MULTI-STEPPED SUBSTRATE
#67Microfluidic pump and valve structures and fabrication methods
#68MICROFLUIDIC CIRCUIT ELEMENT COMPRISING MICROFLUIDIC CHANNEL WITH NANO INTERSTICES AND FABRICATION METHOD THEREOF
#69MICRO-NANO FLUIDIC BIOCHIP FOR ASSAYING BIOLOGICAL SAMPLE
#70Microchip and Method of Manufacturing Same
#71Methods for Manufacturing a Microstructure
#72Fluid cartridge, pump and fluid valve arrangement
#73MEMS device with reduced stress in the membrane and manufacturing method
#74Mitigation of high stress areas in vertically offset structures
#75Polymers, Methods Of Use Thereof, And Methods Of Decomposition Thereof
#76Apparatus and method for converting energy
#77Systems and methods for fabricating an out-of-plane MEMS structure
#78Micro-electro-mechanical transducer having embedded springs
#79Polymers, Methods Of Use Thereof, And Methods Of Decomposition Thereof
#80Method of fabricating liquid film, method of arranging nano particles and substrate having liquid thin film fabricated using the same
#81Fabrication methods for microfluidic pump and valve structures
#82Microfluidic pump and valve structures and fabrication methods
#83METHOD OF MAKING HIERARCHICAL ARTICLES
#84Method of making contact posts for a microelectromechanical device
#85Microfabrication
#86Method for generating a micromechanical structure
#87Forming a sacrificial layer in order to realise a suspended element
#88Semiconductor device package, semiconductor apparatus, and methods for manufacturing the same
#89Catalytically Grown Mano-Bent Nanostructure and Method for Making the Same
#90Forming of a cavity in an insulating layer
#91Method and apparatus for wafer-level micro-glass-blowing
#92Method for manufacturing a mass-spring system
#93MEMS acoustic filter and fabrication of the same
#94Carbon nanotube hybrid structures
#95Polymers, methods of use thereof, and methods of decomposition thereof
#96$M(c)method for producing inclined flank patterns by photolithography
#97Silicon substrate comprising positive etching profiles with a defined slope angle, and production method
#98Method for making fluid emitter orifice
#99Method for structuring of silicon substrates for microsystem technological device elements and associated silicon substrate
#100Microfluidic pump and valve structures and fabrication methods
#101Micromachined structures made by combined wet and dry etching