83932 ⎘
Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements Static structures not provided for in groups -
Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates
#2Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates
#3Nanoprocessing and heterostructuring of silk
#4Single-drive rigid-flexible coupling precision motion platform and realization method and application thereof
#5Microlattice damping material and method for repeatable energy absorption
#6Method for manufacturing a device having a three-dimensional magnetic structure
#7Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates
#8Semiconductor arrangement and formation thereof
#9Tilt structure
#10Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates
#11Wafer with recessed plug
#12Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids
#13Multi-layer encapsulated structures
#14Sloped structure, method for manufacturing sloped structure, and spectrum sensor
#15Wafer with recessed plug
#16Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids
#17Method for Electrochemical Fabrication
#18Method for electromechanical fabrication
#19Method for producing microstructure
#20Method of manufacturing a structure comprising a graphene sheet provided with metal pins, structure thus obtained and use thereof
#21Method for preparing small volume reaction containers
#22Method for manufacturing porous microstructures, porous microstructures manufactured according to this method, and the use thereof
#23Method for electrochemical fabrication
#24Tilt structure
#25Methods of and Apparatus for Electrochemically Fabricating Structures Via Interlaced Layers or Via Selective Etching and Filling of Voids
#26Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates
#27Method for Electrochemical Fabrication
#28Method for electrochemical fabrication
#29Truss structure and manufacturing method thereof
#30Parallel fabrication of nanogaps and devices thereof
#31Method for producing a retention matrix comprising a functional liquid
#32Manufacturing method of three-dimensional structure
#33Method for electrochemically structuring a conductive or semiconductor material, and device for implementing it
#34Electronic part with affixed MEMS
#35Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates
#36Direct incident beam lithography for patterning nanoparticles, and the articles formed thereby
#37Method for Electrochemical Fabrication
#38Method for Electrochemical Fabrication
#39Method of forming a selective spacer in a semiconductor device
#40Method of electrochemical fabrication
#41Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates
#42Method of Electrochemical Fabrication
#43Method for electrochemical fabrication
#44Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
#45Methods of and Apparatus for Forming Three-Dimensional Structures Integral with Semiconductor Based Circuitry
#46Method for Electrochemical Fabrication
#47Electrochemical deposition method, electrochemical deposition apparatus, and microstructure
#48Method of and Apparatus for Forming Three-Dimensional Structures Integral With Semiconductor Based Circuitry
#49Method of and Apparatus for Forming Three-Dimensional Structures Integral With Semiconductor Based Circuitry
#50Method For Electrochemical Fabrication
#51Physical quantity sensor having optical part and method for manufacturing the same
#52Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids
#53Three-dimensional metal microfabrication process and devices produced thereby
#54Method of enhancing connection strength for suspended membrane leads and substrate contacts
#55Sacrificial layer technique to make gaps in MEMS applications
#56Method for the removal of a microscopic sample from a substrate
#57Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
#58Structure formed with template having nanoscale features
#59Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates
#60Multi-step release method for electrochemically fabricated structures
#61Methods for electrochemically fabricating multi-layer structures including regions incorporating maskless, patterned, multiple layer thickness depositions of selected materials
#62Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same