83934 ⎘
Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures Bridges
MICRO-ELECTROMECHANICAL DEVICES
#2MEMS DEVICE BUILT USING THE BEOL METAL LAYERS OF A SOLID STATE SEMICONDUCTOR PROCESS
#3STRETCHABLE ELECTRICAL INTERCONNECT, FLEXIBLE ELECTRONIC SYSTEM, AND FABRICATION METHOD THEREOF
#4MEMS Switch, Preparation Method thereof, and Electronic Apparatus
#5MEMS SWITCH DEVICE AND ELECTRONIC APPARATUS
#6Method for manufacturing mirror device
#7MEMS device built using the BEOL metal layers of a solid state semiconductor process
#8PIEZOELECTRIC MICRO MIRROR WITH CORRUGATED ACTUATOR AND SUSPENSION SYSTEM
#9Micro-electromechanical system package having movable platform
#10HIGH-VOLUME MILLIMETER SCALE MANUFACTURING
#11Micro-electromechanical device having a soft magnetic material electrolessly deposited on a palladium layer coated metal beam
#12MEMS device built using the BEOL metal layers of a solid state semiconductor process
#13Mems device built using the BEOL metal layers of a solid state semiconductor process
#14Sensor package having a movable sensor
#15Sensor package having a movable sensor
#16Fence structure to prevent stiction in a MEMS motion sensor
#17Multistage micromechanical timepiece and method for making same
#18Sensor package having a movable sensor
#19High-volume millimeter scale manufacturing
#20Manufacturing method of sensor package
#21Fence structure to prevent stiction in a MEMS motion sensor
#22Method for manufacturing MEMS devices and nano devices with varying degrees of hydrophobicity and hydrophilicity in a composite photoimageable dry film
#23METHOD FOR MANUFACTURING MEMS DEVICES USING MULTIPLE PHOTOACID GENERATORS IN A COMPOSITE PHOTOIMAGEABLE DRY FILM
#24MANUFACTURING METHOD OF SENSOR USING 3D PRINTING AND 3D PRINTER THEREOF
#25Contact in RF-switch
#26MEMS pressure gauge sensor and manufacturing method
#27MEMS transducer for interacting with a volume flow of a fluid and method for manufacturing the same
#28Integrated circuit comprising multi-layer micromechanical structures with improved mass and reliability by using modified vias and method for forming the same
#29Method for manufacturing thin-film support beam
#30Electronic device having a first electrode formed on a movable suspended mass opposing a second electrode formed on a cover layer
#31Electromechanical devices and methods for fabrication of the same
#32Micromechanical structure and method for fabricating the same
#33MEMS and method for forming the same
#34Mechanisms for forming micro-electro mechanical system device
#35Forming magnetic microelectromechanical inductive components
#36Forming magnetic microelectromechanical inductive components
#37Vibration device including support portion
#38Tri-axial MEMS accelerometer
#39Micro-electromechanical device having a soft magnetic material electrolessly deposited on a metal layer
#40Forming magnetic microelectromechanical inductive components
#41Method and structure for adding mass with stress isolation to MEMS structures
#42Nanoelectromechanical logic devices
#43Resonator and fabrication method thereof
#44Method for fabricating a transducer apparatus
#45Method and apparatus for building three-dimensional MEMS elements
#46ELECTROMECHANICAL DEVICE CONFIGURED TO MINIMIZE STRESS-RELATED DEFORMATION AND METHODS FOR FABRICATING SAME
#47Electromechanical devices and methods for fabrication of the same
#48Damascene process for use in fabricating semiconductor structures having micro/nano gaps
#49Micromirror unit and method of making the same
#50Resonator and production method thereof
#51Micromechanical component and manufacturing method for a micromechanical component
#52Manufacturing method for stress compensated X-Y gimbaled MEMS mirror array
#53Forming a micro electro mechanical system
#54METHODS FOR FORMING LAYERS WITHIN A MEMS DEVICE USING LIFTOFF PROCESSES
#55MEMS device having reduced deformations
#56Nanostructures and methods of making the same
#57Electromechanical device configured to minimize stress-related deformation and methods for fabricating same
#58MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same
#59Methods for forming layers within a MEMS device using liftoff processes
#60SUSPENDED MONO-CRYSTALLINE STRUCTURE AND METHOD OF FABRICATION FROM A HETEROEPITAXIAL LAYER
#61Method of positioning catalyst nanoparticle and nanowire-based device employing same
#62Nanotube-Based Structure and Method of Forming the Structure
#63FABRICATION AND USE OF SUBMICRON WIDE SUSPENDED STRUCTURES
#64Method Of Fabricating A Printhead IC
#65Self-welded metal-catalyzed carbon nanotube bridges and solid electrolytic non-volatile memories
#66Resonator and fabrication method thereof
#67Three-dimensional microstructures and methods for making same
#68Methods for formation of substrate elements
#69Method of fabricating reflective mirror by wet-etch using improved mask pattern and reflective mirror fabricated using the same
#70Resonant structure comprising wire and resonant tunneling transistor
#71Methods of fabricating a micromechanical structure
#72Methods of making electromechanical three-trace junction devices
#73Magnetic element and manufacturing method therefor
#74Devices having horizontally-disposed nanofabric articles and methods of making the same
#75Method of manufacturing vibrating micromechanical structures
#76Electromechanical resonator and manufacturing method thereof
#77Method of manufacturing vibrating micromechanical structures
#78Vacuum packaged single crystal silicon device
#79Vacuum packaged single crystal silicon device
#80Suspended nanowire sensor and method for fabricating the same
#81Methods for etching layers within a MEMS device to achieve a tapered edge
#82Piezoresistive sensing structure
#83Manufacturing method for stress compensated X-Y gimbaled MEMS mirror array
#84Micro electro mechanical system
#85Substrate preparation method for a MEMS fabrication process
#86Method of manufacturing semiconductor device
#87Method of fabricating a hinge
#88Methods of fabricating a micromechanical structure
#89Free-standing electrostatically-doped carbon nanotube device and method for making same
#90Devices having horizontally-disposed nanofabric articles and methods of making the same
#91Sensor elements with cantilevered bar structures made of semiconductors based on group III-nitride
#92Semiconductor device having a suspended micro-system
#93Micromirror unit and method of making the same
#94Method of fabricating suspended beam in a MEMS process
#95MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same
#96Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge
#97MEMS device having support structures configured to minimize stress-related deformation and methods for fabricating same
#98Method of fabricating submicron suspended objects and application to the mechanical characterization of said objects
#99Devices having vertically-disposed nanofabric articles and methods of making the same
#100Microstructure and manufacturing method of the same
#101Piezoresistive sensing structure
#102Small scale wires with microelectromechanical devices
#103Vacuum packaged single crystal silicon device
#104Method of manufacturing vibrating micromechanical structures
#105Method of fabricating a structure in a material
#106Method of producing a device with a movable portion
#107Devices having vertically-disposed nanofabric articles and methods of making the same
#108Method for the production of a micromechanical device, particularly a micromechanical oscillating mirror device
#109Method of fabricating a free-standing microstructure
#110Method of producing a movable lens structure for a light shaping unit
#111Method for manufacturing semiconductor physical quantity sensor
#112Methods of making electromechanical three-trace junction devices
#113Damascene process for use in fabricating semiconductor structures having micro/nano gaps
#114Microdevice with movable microplatform and process for making thereof
#115Micro-switching element fabrication method and micro-switching element
#116Free-standing electrostatically-doped carbon nanotube device
#117Micromirror unit and method of making the same
#118Deflectable microstructure and method of manufacturing the same through bonding of wafers
#119Method of making a micromechanical device
#120Process for fabricating a semiconductor device having a suspended micro-system and resultant device
#121Detection of force applied by pick-up tool for transferring semiconductor devices