Patents-Review.com
ClassID:

83935 ⎘

B81C1/0015 - CPC Classification

Classification description:

Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures Cantilevers

Recent Application in this class:
#1
20260084954
2026-03-26

MULTIDIMENSIONAL CANTILEVERS AND STRESS-PROGRAMMABLE OUT-OF-PLANE INTERPOSERS FOR 3-D PHOTONIC INTEGRATION AND CONTROL

 #2
20260076269
2026-03-12

SEMICONDUCTOR DEVICE AND OPERATING METHOD THEREOF

 #3
20260043701
2026-02-12

PIEZOELECTRIC ELEMENT, PIEZOELECTRIC DEVICE, AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT

 #4
20260015222
2026-01-15

Two stage plating for reduced Ni and NiO layer formation

 #5
20250361137
2025-11-27

MICROELECTROMECHANICAL SYSTEMS (MEMS) INTEGRATION FOR ANALOG TUNABILITY IN RECONFIGURABLE INTELLIGENT SURFACES

 #6
20250236507
2025-07-24

ALL-SILICON CARBIDE (SiC) ACCELERATION-PRESSURE INTEGRATED SENSOR CHIP AND PREPARATION METHOD THEREOF

 #7
20250230039
2025-07-17

MEMS ARM FOR MICROELECTROMECHANICAL SYSTEM

 #8
20250109014
2025-04-03

Method For Manufacturing Vibration Device

 #9
20250109013
2025-04-03

CANTILEVER-BASED OPTO-ELECTROMECHANICAL SYSTEMS AND FABRICATION METHODS

 #10
20240010489
2024-01-11

MEMS DEVICE COMPRISING A DEFORMABLE STRUCTURE AND MANUFACTURING PROCESS OF THE MEMS DEVICE

 #11
20230375397
2023-11-23

CONTACT-TYPE VIBRATION PHOTON SENSOR USING DOPPLER EFFECT AND MANUFACTURING METHOD THEREFOR

 #12
20230319484
2023-10-05

MEMS SENSOR WITH TWO COMPLIANCES

 #13
20230312334
2023-10-05

MEMS SENSOR WITH A THIN REGION

 #14
20230264948
2023-08-24

Method and system for scanning MEMS cantilevers

 #15
20230243710
2023-08-03

PIEZOELECTRIC ELEMENT, PIEZOELECTRIC DEVICE, AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT

 #16
20230136347
2023-05-04

METHOD OF MODIFYING A RESONANT FREQUENCY IN CANTILEVER SENSORS

 #17
20230135200
2023-05-04

CANTILEVER SENSOR WITH MODIFIED RESONANCE FREQUENCY

 #18
20230130082
2023-04-27

METHOD OF MAKING A PIEZOELECTRIC SENSOR WITH INCREASED SENSITIVITY AND DEVICES HAVING THE SAME

 #19
20230125523
2023-04-27

PIEZOELECTRIC SENSOR WITH INCREASED SENSITIVITY AND DEVICES HAVING THE SAME

 #20
20230064520
2023-03-02

MEMS device built on substrate with ruthenium based contact surface material

 #21
20230012046
2023-01-12

CANTILEVERED PIEZOELECTRIC MICROELECTROMECHANICAL SYSTEMS MICROPHONE

 #22
20220367339
2022-11-17

Wafer level stacked structures having integrated passive features

 #23
20220048759
2022-02-17

MICROELECTROMECHANICAL SYSTEM AND METHOD FOR MANUFACTURING A MICROELECTROMECHANICAL SYSTEM

 #24
20220043027
2022-02-10

PROBE MODULE HAVING MICROELECTROMECHANICAL PROBE AND METHOD OF MANUFACTURING THE SAME

 #25
20210363003
2021-11-25

Method and system for scanning MEMS cantilevers

 #26
20210304973
2021-09-30

MEMS device built on substrate with ruthenium based contact surface material

 #27
20210125918
2021-04-29

Wafer level stacked structures having integrated passive features

 #28
20200236470
2020-07-23

Microelectromechanical electroacoustic transducer with piezoelectric actuation and corresponding manufacturing process

 #29
20200231431
2020-07-23

Semiconductor manufacturing method and structure thereof

 #30
20200225180
2020-07-16

Gas sensor, sensor array, and manufacturing method thereof

 #31
20200198963
2020-06-25

Method for processing a monocrystalline substrate and micromechanical structure

 #32
20200165125
2020-05-28

Method of providing a plurality of through-holes in a layer of structural material

 #33
20200140265
2020-05-07

Fence structure to prevent stiction in a MEMS motion sensor

 #34
20200116758
2020-04-16

PROBE MODULE HAVING MICROELECTROMECHANICAL PROBE AND METHOD OF MANUFACTURING THE SAME

 #35
20200115227
2020-04-16

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #36
20200102211
2020-04-02

Microelectronic sensor device with an out-of-plane detection having a controlled cross sensitivity

 #37
20200084892
2020-03-12

Micro Devices Formed by Flex Circuit Substrates

 #38
20200024127
2020-01-23

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #39
20200017356
2020-01-16

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #40
20200017355
2020-01-16

Planar cavity mems and related structures, methods of manufacture and design structures

 #41
20190315619
2019-10-17

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #42
20190301956
2019-10-03

Pressure sensor and method of producing the same

 #43
20190285196
2019-09-19

Piezoelectric valve module, method for manufacturing the valve module, method for operating the valve module, and respiratory aid device including one or more of the valve modules

 #44
20190248644
2019-08-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #45
20190233277
2019-08-01

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #46
20190207581
2019-07-04

Bulk acoustic wave resonator on a stress isolated platform

 #47
20190185315
2019-06-20

Comb MEMS Device and Method of Making a Comb MEMS Device

 #48
20190169017
2019-06-06

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #49
20190161343
2019-05-30

III-V nitride resonate based photoacoustic sensor

 #50
20190152767
2019-05-23

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #51
20190115179
2019-04-18

Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

 #52
20190104616
2019-04-04

Micro devices formed by flex circuit substrates

 #53
20190062153
2019-02-28

Fence structure to prevent stiction in a MEMS motion sensor

 #54
20190035905
2019-01-31

Proof mass and polysilicon electrode integrated thereon

 #55
20190027559
2019-01-24

METHODS AND SYSTEMS FOR CHEMICALLY ENCODING HIGH-RESOLUTION SHAPES IN SILICON NANOWIRES

 #56
20180346319
2018-12-06

Manufacturing method of semiconductor structure including heater

 #57
20180346318
2018-12-06

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #58
20180319652
2018-11-08

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #59
20180312392
2018-11-01

Method for assembling conductive particles into conductive pathways and sensors thus formed

 #60
20180275000
2018-09-27

MEMS pressure gauge sensor and manufacturing method

 #61
20180257931
2018-09-13

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #62
20180244514
2018-08-30

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #63
20180208457
2018-07-26

Microelectromechanical system device

 #64
20180201503
2018-07-19

Micro-electro-mechanical system (MEMS) structures and design structures

 #65
20180201502
2018-07-19

Micro-electro-mechanical system (MEMS) structures and design structures

 #66
20180179052
2018-06-28

Micro-electro-mechanical system (MEMS) structures and design structures

 #67
20180179048
2018-06-28

MEMS transducer for interacting with a volume flow of a fluid and method for manufacturing the same

 #68
20180155188
2018-06-07

Integrated semiconductor device and manufacturing method

 #69
20180141801
2018-05-24

Multilayer MEMS cantilevers

 #70
20180138391
2018-05-17

Piezoelectric MEMS microphone

 #71
20180093884
2018-04-05

Method of manufacturing MEMS switches with reduced switching voltage

 #72
20180086630
2018-03-29

Method for processing a monocrystalline substrate and micromechanical structure

 #73
20180072568
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #74
20180072567
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #75
20180072566
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #76
20180065847
2018-03-08

Method of manufacturing MEMS switches with reduced switching voltage

 #77
20180065840
2018-03-08

Substrate for sensor, physical quantity detection sensor, acceleration sensor, electronic apparatus, vehicle, and method of manufacturing substrate for sensor

 #78
20180057357
2018-03-01

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #79
20180050903
2018-02-22

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #80
20180016138
2018-01-18

Methods of manufacturing for MEMS switches with reduced switching voltage

 #81
20180016137
2018-01-18

Methods of manufacture for MEMS switches with reduced switching voltage

 #82
20180009658
2018-01-11

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #83
20170297910
2017-10-19

Oscillation frequency measuring system and method for a MEMS sensor

 #84
20170294274
2017-10-12

Method of manufacturing a switch

 #85
20170276931
2017-09-28

Coupling schemes for gimbaled scanning mirror arrays

 #86
20170247252
2017-08-31

Method of manufacturing a plurality of through-holes in a layer of first material

 #87
20170246611
2017-08-31

Method of manufacturing a plurality of through-holes in a layer of first material

 #88
20170233244
2017-08-17

MEMS automatic alignment high-and-low comb tooth and manufacturing method thereof

 #89
20170225942
2017-08-10

Active opening MEMS switch device

 #90
20170203960
2017-07-20

Method for manufacturing MEMS double-layer suspension microstructure, and MEMS infrared detector

 #91
20170192221
2017-07-06

Optomechanical non-reciprocal device

 #92
20170166439
2017-06-15

Metallizing MEMS devices

 #93
20170158490
2017-06-08

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #94
20170152887
2017-06-01

MEMS hinges with enhanced rotatability

 #95
20170133185
2017-05-11

Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

 #96
20170129771
2017-05-11

Semiconductor structure and manufacturing method thereof

 #97
20170121170
2017-05-04

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #98
20170088418
2017-03-30

Simplified MEMS device fabrication process

 #99
20170073213
2017-03-16

Comb MEMS device and method of making a comb MEMS device

 #100
20170066645
2017-03-09

Refractory seed metal for electroplated MEMS structures

 #101
20170022052
2017-01-26

Microchannel resonator and method for manufacturing same

 #102
20170022048
2017-01-26

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #103
20170015546
2017-01-19

Integrated semiconductor device and manufacturing method

 #104
20170001856
2017-01-05

Microstructure plating systems

 #105
20160355392
2016-12-08

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #106
20160353210
2016-12-01

Micromechanical structure comprising carbon material and method for fabricating the same

 #107
20160325986
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #108
20160325983
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #109
20160325982
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #110
20160322529
2016-11-03

Light sensitive switch for semiconductor package tamper detection

 #111
20160322314
2016-11-03

Light sensitive switch for semiconductor package tamper detection

 #112
20160264410
2016-09-15

Micro-electro-mechanical system (MEMS) structures and design structures

 #113
20160264406
2016-09-15

Micro-electro-mechanical system (MEMS) structures and design structures

 #114
20160264405
2016-09-15

Micro-Electro-Mechanical System (MEMS) structures and design structures

 #115
20160257556
2016-09-08

Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

 #116
20160257555
2016-09-08

Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

 #117
20160244579
2016-08-25

Microdevices and methods of manufacture

 #118
20160244321
2016-08-25

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #119
20160236929
2016-08-18

Method for manufacturing microcantilever

 #120
20160190245
2016-06-30

METHODS AND SYSTEMS FOR CHEMICALLY ENCODING HIGH-RESOLUTION SHAPES IN SILICON NANOWIRES

 #121
20160178895
2016-06-23

Coupling schemes for gimbaled scanning mirror arrays

 #122
20160145097
2016-05-26

Method of manufacturing a switch

 #123
20160099124
2016-04-07

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #124
20160096721
2016-04-07

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #125
20160091713
2016-03-31

Passivated microelectromechanical structures and methods

 #126
20160090292
2016-03-31

Method to improve cantilever process performance

 #127
20160083245
2016-03-24

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #128
20160060107
2016-03-03

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #129
20160060099
2016-03-03

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #130
20160055282
2016-02-25

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #131
20160052776
2016-02-25

MEMS DEVICE

 #132
20160047781
2016-02-18

III-V nitride resonate structure based photoacoustic sensor

 #133
20160035513
2016-02-04

Method of manufacture MEMS switches with reduced voltage

 #134
20160035512
2016-02-04

Method of manufacturing MEMS switches with reduced voltage

 #135
20160035511
2016-02-04

Method of manufacturing MEMS switches with reduced switching voltage

 #136
20160035510
2016-02-04

Method of manufacturing MEMS switches with reduced switching volume

 #137
20160031701
2016-02-04

Micromechanical structure and method for fabricating the same

 #138
20160031699
2016-02-04

Micro-electro-mechanical system (MEMS) structures and design structures

 #139
20150368090
2015-12-24

Micro-electro-mechanical system (MEMS) structures and design structures

 #140
20150353352
2015-12-10

Method of manufacturing apparatus for harvesting and storing piezoelectric energy

 #141
20150353342
2015-12-10

MEMS and method for forming the same

 #142
20150329355
2015-11-19

Method for processing product wafers using carrier substrates

 #143
20150315011
2015-11-05

MEMS STRUCTURE, ELECTRONIC APPARATUS, AND MOVING OBJECT

 #144
20150291413
2015-10-15

Method and system for CMOS based MEMS bump stop contact damage prevention

 #145
20150246809
2015-09-03

Devices with thinned wafer

 #146
20150232327
2015-08-20

Sensor and method for manufacturing a sensor

 #147
20150217995
2015-08-06

ARRANGEMENT OF THROUGH-HOLE STRUCTURES OF A SEMICONDUCTOR PACKAGE

 #148
20150203345
2015-07-23

Polymer anchored microelectromechanical system (MEMS) cantilever and method of fabricating the same

 #149
20150145074
2015-05-28

MEMS device

 #150
20150054100
2015-02-26

Method of forming a micro-electro-mechanical system (MEMS) structure

 #151
20150041932
2015-02-12

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #152
20150041927
2015-02-12

MEMS device with differential vertical sense electrodes

 #153
20150035110
2015-02-05

Pyroelectric aluminum nitride MEMS infrared sensor with selective wavelength infrared absorber

 #154
20150000402
2015-01-01

Oscillation frequency measuring system and method for a MEMS sensor

 #155
20140374857
2014-12-25

Cantilever beam structure where stress is matched and method of manufacturing the same

 #156
20140357006
2014-12-04

Method for making a suspended part of a microelectronic and/or nanoelectronic structure in a monolithic part of a substrate

 #157
20140339657
2014-11-20

Piezoelectric MEMS microphone

 #158
20140308771
2014-10-16

Method for forming micro-electro-mechanical system (MEMS) beam structure

 #159
20140299572
2014-10-09

Compliant micro device transfer head with integrated electrode leads

 #160
20140264644
2014-09-18

MEMS method and structure

 #161
20140260710
2014-09-18

Microstructure plating systems and methods

 #162
20140248737
2014-09-04

Method of manufacturing optical image stabilizer

 #163
20140231936
2014-08-21

Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

 #164
20140227818
2014-08-14

Semiconductor structure with lamella defined by singulation trench

 #165
20140225167
2014-08-14

Vertical electromechanical switch device

 #166
20140224018
2014-08-14

MEMS force sensors fabricated using paper substrates

 #167
20140202837
2014-07-24

LOW-COST PROCESS-INDEPENDENT RF MEMS SWITCH

 #168
20140197502
2014-07-17

Comb MEMS device and method of making a comb MEMS device

 #169
20140183669
2014-07-03

RESONANT SENSOR WITH ASYMMETRIC GAPPED CANTILEVERS

 #170
20140166463
2014-06-19

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #171
20140126031
2014-05-08

Method for fabricating a self-aligned vertical comb drive structure

 #172
20140064904
2014-03-06

Compliant micro device transfer head with integrated electrode leads

 #173
20140044937
2014-02-13

Microdevices and methods of manufacture

 #174
20140017844
2014-01-16

Integrated circuit switches, design structure and methods of fabricating the same

 #175
20130320467
2013-12-05

Method for assembling conductive particles into conductive pathways and sensors thus formed

 #176
20130309797
2013-11-21

Method for manufacturing MEMS device

 #177
20130284572
2013-10-31

Through-silicon via resonators in chip packages and methods of assembling same

 #178
20130240336
2013-09-19

Hybrid MEMS RF switch and method of fabricating same

 #179
20130234265
2013-09-12

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #180
20130220534
2013-08-29

Carbon nanotube based micro-tip structure and method for making the same

 #181
20130200473
2013-08-08

Micromechanical component and method for the manufacture of same

 #182
20130168782
2013-07-04

Micro-electro-mechanical system (MEMS) structures and design structures

 #183
20130156993
2013-06-20

Micro-electro-mechanical system (MEMS) structures and design structures

 #184
20130152688
2013-06-20

Micro-electro-mechanical sensing device and manufacturing method thereof

 #185
20130141769
2013-06-06

Micro structure, micro actuators, method of fabricating micro structure and micro actuators

 #186
20130140678
2013-06-06

INSULATOR LAYER BASED MEMS DEVICES

 #187
20130139377
2013-06-06

Method of manufacturing resonant transducer

 #188
20130115754
2013-05-09

MICRO MACHINING METHOD FOR A SUBSTRATE ON AN UNDERLAY

 #189
20130049539
2013-02-28

Apparatus for harvesting and storing piezoelectric energy and manufacturing method thereof

 #190
20130043213
2013-02-21

Method for producing single-crystal diamond movable structure

 #191
20130026590
2013-01-31

Sloped structure, method for manufacturing sloped structure, and spectrum sensor

 #192
20130008869
2013-01-10

Oblique parts or surfaces

 #193
20120319528
2012-12-20

Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

 #194
20120319527
2012-12-20

Methods of manufacturing a micro-electro-mechanical system (MEMS) structure

 #195
20120281286
2012-11-08

Optomechanical non-reciprocal device

 #196
20120146736
2012-06-14

MEMS vibrator, oscillator, and method for manufacturing MEMS vibrator

 #197
20120145988
2012-06-14

Nanoscale Apparatus and Sensor With Nanoshell and Method of Making Same

 #198
20120098136
2012-04-26

Hybrid MEMS RF switch and method of fabricating same

 #199
20120091547
2012-04-19

Resonator and production method thereof

 #200
20110318861
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #201
20110316101
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #202
20110316099
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #203
20110316098
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #204
20110316097
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #205
20110315528
2011-12-29

Methods of manufacture for micro-electro-mechanical system (MEMS)

 #206
20110315527
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #207
20110315526
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #208
20110314669
2011-12-29

Method of manufacturing a micro-electro-mechanical system (MEMS)

 #209
20110299842
2011-12-08

Optical image stabilizer and method of manufacturing the same

 #210
20110204478
2011-08-25

Insulator layer based MEMS devices

 #211
20110186942
2011-08-04

Controlling diamond film surfaces and layering

 #212
20110167526
2011-07-07

Microsprings Having Nanowire Tip Structures

 #213
20110163061
2011-07-07

Method Of Producing Microsprings Having Nanowire Tip Structures

 #214
20110068420
2011-03-24

Semiconductor structure with lamella defined by singulation trench

 #215
20110049651
2011-03-03

Three-dimensional MEMS structure and method of manufacturing the same

 #216
20110049649
2011-03-03

Integrated circuit switches, design structure and methods of fabricating the same

 #217
20100301430
2010-12-02

MEMS device and method of fabricating the same

 #218
20100264498
2010-10-21

Manufacturing a MEMS element having cantilever and cavity on a substrate

 #219
20100254547
2010-10-07

Piezoelectric MEMS microphone

 #220
20100240215
2010-09-23

Multi-sacrificial layer and method

 #221
20100219453
2010-09-02

Nanotube Device

 #222
20100173153
2010-07-08

BEAM-LIKE MATERIAL COMPRISING CARBON NANOTUBE AND MANUFACTURING METHOD THEREOF

 #223
20100144216
2010-06-10

Oblique parts or surfaces

 #224
20100140442
2010-06-10

Oblique parts or surfaces

 #225
20100136490
2010-06-03

Multi-scale cantilever structures having nano sized holes and method of preparing the same

 #226
20100112743
2010-05-06

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING VIBRATOR WHICH IS PROVIDED WITH SIDE INSULATING FILM AND INSULATING SEPARATION REGION FORMED BY THERMAL OXIDATION

 #227
20100089868
2010-04-15

Method for producing a micromechanical component having a filler layer and a masking layer

 #228
20100046079
2010-02-25

Polymer pattern and metal film pattern, metal pattern, plastic mold using thereof, and method of the forming the same

 #229
20100040848
2010-02-18

NANO MATERIAL CLUSTER STRUCTURE

 #230
20100038731
2010-02-18

NON-VOLATILE MEMORY DEVICE

 #231
20090311819
2009-12-17

Method for making micro-electromechanical system devices

 #232
20090275203
2009-11-05

Method for processing a thin film micro device on a substrate

 #233
20090260961
2009-10-22

MEMS switches with reduced switching voltage and methods of manufacture

 #234
20090233058
2009-09-17

Carbon nanotube structure and method for producing the same

 #235
20090212378
2009-08-27

Method for producing a micromechanical structural element and semiconductor arrangement

 #236
20090173950
2009-07-09

Controlling diamond film surfaces and layering

 #237
20090159996
2009-06-25

Method of producing microsprings having nanowire tip structures

 #238
20090130822
2009-05-21

Process for collective manufacturing of small volume high precision membranes and cavities

 #239
20080283373
2008-11-20

Assembly of a microswitch and of an acoustic resonator

 #240
20080268575
2008-10-30

Orientation-dependent etching of deposited AlN for structural use and sacrificial layers in MEMS

 #241
20080251877
2008-10-16

Methods for fabricating complex micro and nanoscale structures and electronic devices and components made by the same

 #242
20080138923
2008-06-12

Method of forming suspended structure

 #243
20080095996
2008-04-24

STRUCTURE AND METHOD FOR RELEASING STRESSY METAL FILMS

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20080020579
2008-01-24

Method For Manufacturing A Membrane In A (111) Surface Of A (100) Silicon Wafer

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Method of manufacturing suspension structure

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Method of manufacturing suspension structure and chamber

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Method of fabricating suspended structure

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20070158775
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Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch

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20070155184
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Method for producing a nanostructure such as a nanoscale cantilever

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20070145008
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Techniques of anisotropic wet etch micromachining for comb drive transducers and resonance frequency reduction

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20070141742
2007-06-21

Structure and method for releasing stressy metal films

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20070137308
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Multi-scale cantilever structures having nano sized holes and method of preparing the same

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20070075387
2007-04-05

Bi-directional released-beam sensor

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20070065963
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Method of manufacturing a micro-mechanical element

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Method of manufacturing a micromachined polymer beam structure

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20070037311
2007-02-15

Manufacturing method of microelectromechanical system

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2006-08-17

Method of manufacturing floating structure

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Bi-directional released-beam sensor

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2006-06-29

Weighted released-beam sensor

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2006-04-27

Oblique parts or surfaces

 #261
20050124159
2005-06-09

Deflectable microstructure and method of manufacturing the same through bonding of wafers

 #262
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2005-01-06

Method of making a microstructure using a circuit board

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Method of making acoustic devices with directional reinforcement

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Acoustic devices with directional reinforcement

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Detection of force applied by pick-up tool for transferring semiconductor devices

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Magnetoelastically actuated MEMS device and methods for its manufacture

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Doubly-clamped bean quartz micro-resonator

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2016-09-27

Dopant selective reactive ion etching of silicon carbide