Patents-Review.com
ClassID:

83937 ⎘

B81C1/00166 - CPC Classification

Classification description:

Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures Electrodes

Recent Application in this class:
#1
20260152381
2026-06-04

MEMS SOUND TRANSDUCER ELEMENT

 #2
20260118125
2026-04-30

SILICON MEMS GYROSCOPES WITH UPPER AND LOWER SENSE PLATES

 #3
20260116738
2026-04-30

MEMS DEVICE WITH RECESSED COMBS

 #4
20260103375
2026-04-16

MEMS DEVICE AND MANUFACTURING METHOD FOR MEMS DEVICE

 #5
20260071992
2026-03-12

THRESHOLD VOLTAGE ADJUSTABLE FIELD EFFECT TRANSISTOR BIOSENSOR USING TRI-LAYER ELECTRODES

 #6
20260027584
2026-01-29

METHODS OF OPERATING AND MANUFACTURING CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER WITH CONTOURED ELECTRODE

 #7
20250296835
2025-09-25

COMB ELECTRODE RELEASE PROCESS FOR MEMS STRUCTURE

 #8
20250240578
2025-07-24

MICRO-ELECTROMECHANICAL MICROPHONES AND METHODS OF FORMING THE SAME

 #9
20250002331
2025-01-02

COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES

 #10
20240418510
2024-12-19

INERTIAL SENSOR AND METHOD FOR FORMING THE SAME

 #11
20240391756
2024-11-28

MEMS SENSOR AND METHOD FOR FORMING THE SAME

 #12
20240336474
2024-10-10

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

 #13
20240199414
2024-06-20

METHOD FOR MANUFACTURING CURVED SURFACE SUPPORT STRUCTURE, AND HEMISPHERICAL RESONATOR GYROSCOPE

 #14
20240165663
2024-05-23

Capacitive micromachined ultrasonic transducer with contoured electrode

 #15
20240106357
2024-03-28

Vibration-Driven Energy Harvesting Element and Method for Manufacturing the Same

 #16
20240027488
2024-01-25

INERTIAL SENSOR AND FORMATION METHOD THEREFOR

 #17
20240017989
2024-01-18

MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE

 #18
20230418049
2023-12-28

TWO-LAYER OPTICAL BEAM STEERING DEVICE, SYSTEM, METHOD OF UTILIZATION, AND METHOD OF FABRICATION

 #19
20230416079
2023-12-28

MICROMECHANICAL COMPONENT FOR A SENSOR AND/OR MICROPHONE DEVICE

 #20
20230371383
2023-11-16

Pizoelectric MEMS device with electrodes having low surface roughness

 #21
20230249964
2023-08-10

COMB ELECTRODE RELEASE PROCESS FOR MEMS STRUCTURE

 #22
20230166966
2023-06-01

MEMS device with electrodes and a dielectric

 #23
20230136347
2023-05-04

METHOD OF MODIFYING A RESONANT FREQUENCY IN CANTILEVER SENSORS

 #24
20230135200
2023-05-04

CANTILEVER SENSOR WITH MODIFIED RESONANCE FREQUENCY

 #25
20230076161
2023-03-09

Silicon MEMS gyroscopes with upper and lower sense plates

 #26
20230064520
2023-03-02

MEMS device built on substrate with ruthenium based contact surface material

 #27
20230016416
2023-01-19

MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE

 #28
20230011561
2023-01-12

PIEZOELECTRIC MICROPHONE WITH ENHANCED ANCHOR

 #29
20220371883
2022-11-24

Method for preparing a MEMS micro mirror with electrodes on both sides

 #30
20220324699
2022-10-13

MICRO-ELECTRO-MECHANICAL SYSTEMS AND PREPARATION METHOD THEREOF

 #31
20220324698
2022-10-13

PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY

 #32
20220274828
2022-09-01

Nanosheet MEMs sensor device and method of manufacture

 #33
20220234885
2022-07-28

Flexible electrode and preparation method thereof

 #34
20220177301
2022-06-09

MEMS device with electrodes and a dielectric

 #35
20220162059
2022-05-26

Low-parasitic capacitance MEMS inertial sensors and related methods

 #36
20220152651
2022-05-19

Pulse train excitation for capacitive micromachined ultrasonic transducer

 #37
20220144628
2022-05-12

Modification to rough polysilicon using ion implantation and silicide

 #38
20220119247
2022-04-21

Comb electrode release process for MEMS structure

 #39
20220112074
2022-04-14

Semiconductor structure and manufacturing method thereof

 #40
20220033247
2022-02-03

Micro-electro-mechanical system silicon on insulator pressure sensor and method for preparing same

 #41
20210376767
2021-12-02

Method of manufacturing MEMS vibration element and MEMS vibration element

 #42
20210331912
2021-10-28

Multiple layer electrode transducers

 #43
20210304973
2021-09-30

MEMS device built on substrate with ruthenium based contact surface material

 #44
20210285917
2021-09-16

Bottom electrode material stack for micromachined ultrasonic transducer devices

 #45
20210278433
2021-09-09

Method for manufacturing three-dimensionally structured member, method for manufacturing acceleration pickup, acceleration pickup, and acceleration sensor

 #46
20210276857
2021-09-09

Structure of micro-electro-mechanical-system microphone and method for fabricating the same

 #47
20210268993
2021-09-02

Vehicle key and method of manufacturing the same

 #48
20210265557
2021-08-26

Pizoelectric MEMS device with electrodes having low surface roughness

 #49
20210221677
2021-07-22

Sensor device and method of fabrication

 #50
20210220873
2021-07-22

Contoured electrode for capacitive micromachined ultrasonic transducer

 #51
20210171339
2021-06-10

Cellular array electrostatic actuator

 #52
20210147224
2021-05-20

MEMS device manufacturing method and mems device

 #53
20210147221
2021-05-20

Manufacturing method of miniature fluid actuator

 #54
20210139322
2021-05-13

Micro-electromechanical (MEM) power relay

 #55
20210134532
2021-05-06

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUSES AND RELATED METHODS

 #56
20210122627
2021-04-29

Hybrid Metal and Carbon or Glassy Carbon MEMS u-ECOG Electrode and Microelectrode Structures

 #57
20210078859
2021-03-18

Physical quantity sensor manufacturing method, physical quantity sensor, electronic device, and vehicle

 #58
20210070612
2021-03-11

Method of making ohmic contact on low doped bulk silicon for optical alignment

 #59
20210070611
2021-03-11

Method of making ohmic contact on low doped bulk silicon for optical alignment

 #60
20210017016
2021-01-21

MEMS Sound Transducer Element

 #61
20200407217
2020-12-31

Low-parasitic capacitance MEMS inertial sensors and related methods

 #62
20200382876
2020-12-03

Piezoelectric microelectromechanical acoustic transducer having improved characteristics and corresponding manufacturing process

 #63
20200379004
2020-12-03

Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element

 #64
20200333284
2020-10-22

HIGH SURFACE AREA ELECTRODE FOR ELECTROCHEMICAL SENSOR

 #65
20200313073
2020-10-01

Method to protect electrodes from oxidation in a MEMS device

 #66
20200307992
2020-10-01

Electrostatic-type transducer and manufacturing method thereof

 #67
20200299126
2020-09-24

MEMS package, MEMS microphone and method of manufacturing the MEMS package

 #68
20200290867
2020-09-17

Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process

 #69
20200270123
2020-08-27

Modification to rough polysilicon using ion implantation and silicide

 #70
20200192081
2020-06-18

MEMS device having a tiltable suspended structure controlled by electromagnetic actuation

 #71
20200166155
2020-05-28

Micro fluid actuator

 #72
20200140265
2020-05-07

Fence structure to prevent stiction in a MEMS motion sensor

 #73
20200140264
2020-05-07

Manufacturing method of micro channel structure

 #74
20200131027
2020-04-30

3D stack configuration for 6-axis motion sensor

 #75
20200123001
2020-04-23

Haptic actuators fabricated by roll-to-roll processing

 #76
20200096336
2020-03-26

Methods for fabricating silicon MEMS gyroscopes with upper and lower sense plates

 #77
20200095119
2020-03-26

Method of making ohmic contact on low doped bulk silicon for optical alignment

 #78
20200084892
2020-03-12

Micro Devices Formed by Flex Circuit Substrates

 #79
20200080971
2020-03-12

Layered structure and method for fabricating same

 #80
20200048077
2020-02-13

Methods for increasing aspect ratios in comb structures

 #81
20190382257
2019-12-19

MEMS and method of manufacturing the same

 #82
20190362899
2019-11-28

Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods

 #83
20190273993
2019-09-05

Sensitivity compensation for capacitive MEMS device

 #84
20190248646
2019-08-15

MEMS devices with an element having varying widths

 #85
20190233276
2019-08-01

Forming an offset in an interdigitated capacitor of a microelectromechanical systems (MEMS) device

 #86
20190187101
2019-06-20

Method for fabricating a layered structure using surface micromachining

 #87
20190162753
2019-05-30

Sensor device and manufacturing method thereof

 #88
20190135613
2019-05-09

Micromechanical z-inertial sensor

 #89
20190128835
2019-05-02

Method of depositing electrodes and electrolyte on microelectromechanical system electrochemical sensors

 #90
20190104616
2019-04-04

Micro devices formed by flex circuit substrates

 #91
20190100429
2019-04-04

MEMS DEVICES AND PROCESSES

 #92
20190092624
2019-03-28

MEMS component and production method for a MEMS component

 #93
20190069094
2019-02-28

Microphone and manufacturing method therefor

 #94
20190062153
2019-02-28

Fence structure to prevent stiction in a MEMS motion sensor

 #95
20190035905
2019-01-31

Proof mass and polysilicon electrode integrated thereon

 #96
20190031499
2019-01-31

Forming an offset in an interdigitated capacitor of a microelectromechanical systems (MEMS) device

 #97
20190011288
2019-01-10

Paper based electronics platform

 #98
20190004084
2019-01-03

Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element

 #99
20180335358
2018-11-22

MEMS pressure sensing element

 #100
20180328957
2018-11-15

Microelectronic devices for isolating drive and sense signals of sensing devices

 #101
20180315572
2018-11-01

Current handling in legs and anchors of RF-switch

 #102
20180297838
2018-10-18

Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process

 #103
20180273375
2018-09-27

Physical quantity sensor manufacturing method, physical quantity sensor, electronic device, and vehicle

 #104
20180152793
2018-05-31

MEMS device and method for producing a MEMS device

 #105
20180144879
2018-05-24

Contact material for MEMS devices

 #106
20180115834
2018-04-26

Microphone and method of manufacturing the same

 #107
20180093884
2018-04-05

Method of manufacturing MEMS switches with reduced switching voltage

 #108
20180065847
2018-03-08

Method of manufacturing MEMS switches with reduced switching voltage

 #109
20180044174
2018-02-15

Integrated structure of mems pressure sensor and mems inertia sensor

 #110
20180029878
2018-02-01

Microelectromechanical device, a microelectromechanical system, and a method of manufacturing a microelectromechanical device

 #111
20180016138
2018-01-18

Methods of manufacturing for MEMS switches with reduced switching voltage

 #112
20180016137
2018-01-18

Methods of manufacture for MEMS switches with reduced switching voltage

 #113
20170369308
2017-12-28

Semiconductor structure for MEMS Device

 #114
20170362080
2017-12-21

Method for producing a rolled-up electrical or electronic component

 #115
20170297896
2017-10-19

Epi-poly etch stop for out of plane spacer defined electrode

 #116
20170297895
2017-10-19

System and method for a comb-drive MEMS device

 #117
20170294274
2017-10-12

Method of manufacturing a switch

 #118
20170217765
2017-08-03

System and method for a MEMS transducer

 #119
20170175283
2017-06-22

Method and system for electroplating a MEMS device

 #120
20170154734
2017-06-01

Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods

 #121
20160377569
2016-12-29

System and method for a MEMS transducer

 #122
20160272487
2016-09-22

Semiconductor pressure sensor and method of fabricating same

 #123
20160268927
2016-09-15

Comb drive with non-parallel overlapping comb fingers

 #124
20160241965
2016-08-18

MEMS microphone and method for forming the same

 #125
20160240320
2016-08-18

Curved RF electrode for improved Cmax

 #126
20160194198
2016-07-07

Semiconductor structures and fabrication method thereof

 #127
20160187370
2016-06-30

Sensor and its manufacturing method

 #128
20160173001
2016-06-16

Electrostatically deflectable micromechanical device

 #129
20160159638
2016-06-09

Microelectromechanical systems devices with improved reliability

 #130
20160152465
2016-06-02

MEMS capacitive pressure sensors

 #131
20160137485
2016-05-19

Epi-poly etch stop for out of plane spacer defined electrode

 #132
20160131680
2016-05-12

Capacitive physical quantity sensor

 #133
20160107879
2016-04-21

Electronic device having a first electrode formed on a movable suspended mass opposing a second electrode formed on a cover layer

 #134
20160090302
2016-03-31

Microfluidic device with integrated stirring structure and manufacturing method thereof

 #135
20160046482
2016-02-18

Methods of forming micro-electro-mechanical devices including a conductive feature extending through an escort ring

 #136
20160041009
2016-02-11

Micro-electromechanical apparatus having signal attenuation-proof function, and manufacturing method and signal attenuation-proof method thereof

 #137
20150368094
2015-12-24

Robust MEMS structure with via cap and related method

 #138
20150368092
2015-12-24

Scalable self-supported MEMS structure and related method

 #139
20150368091
2015-12-24

MEMS devices utilizing a thick metal layer of an interconnect metal film stack

 #140
20150360933
2015-12-17

Capacitive MEMS sensor and method

 #141
20150279602
2015-10-01

Systems, devices, and methods for reducing surface dielectric charging in a RF MEMS actuator element

 #142
20150210536
2015-07-30

MEMS capacitive pressure sensors

 #143
20150191347
2015-07-09

Method for manufacturing semiconductor device

 #144
20150145075
2015-05-28

MEMS devices utilizing a thick metal layer of an interconnect metal film stack

 #145
20150107998
2015-04-23

Printed digital microfluidic devices methods of use and manufacture thereof

 #146
20150024536
2015-01-22

Methods of manufacturing a MEMS device having a backplate with elongated protrusions

 #147
20150008543
2015-01-08

MEMS capacitive pressure sensors and fabrication method thereof

 #148
20150008541
2015-01-08

MEMS pressure sensors and fabrication method thereof

 #149
20140308738
2014-10-16

Microfluidic device with integrated stirring structure and manufacturing method thereof

 #150
20140248737
2014-09-04

Method of manufacturing optical image stabilizer

 #151
20140211366
2014-07-31

Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods

 #152
20140202837
2014-07-24

LOW-COST PROCESS-INDEPENDENT RF MEMS SWITCH

 #153
20140191341
2014-07-10

Method and apparatus for a semiconductor structure

 #154
20140145551
2014-05-29

VIBRATOR, MANUFACTURING METHOD OF VIBRATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT

 #155
20130277770
2013-10-24

MEMS devices and methods of forming the same

 #156
20130181302
2013-07-18

Method for making a suspended membrane structure with buried electrode

 #157
20130077951
2013-03-28

Cascaded electrostatic actuator

 #158
20130044363
2013-02-21

Micromechanical component, intermediate product produced by a manufacturing method, and manufacturing method for a micromechanical component

 #159
20120098144
2012-04-26

VERTICAL ELECTRODE STRUCTURE USING TRENCH AND METHOD FOR FABRICATING THE VERTICAL ELECTRODE STRUCTURE

 #160
20120056281
2012-03-08

High aspect ratio capacitively coupled MEMS devices

 #161
20110299842
2011-12-08

Optical image stabilizer and method of manufacturing the same

 #162
20110281389
2011-11-17

Method for manufacturing micromachine

 #163
20110279919
2011-11-17

Method for manufacturing a micromechanical component, and micromechanical component

 #164
20110209970
2011-09-01

SWITCH AND METHOD FOR MANUFACTURING THE SAME, AND RELAY

 #165
20110147177
2011-06-23

Structure, electronic device, and method for fabricating a structure

 #166
20110091722
2011-04-21

METHOD FOR PRODUCING SILICON-CONTAINING CERAMIC STRUCTURES

 #167
20110079863
2011-04-07

Micromechanical structure, method for manufacturing a micromechanical structure, and use of a micromechanical structure

 #168
20100289066
2010-11-18

Semiconductor device and method of fabricating the same

 #169
20100164024
2010-07-01

High aspect ratio all SiGe capacitively coupled MEMS devices

 #170
20100085622
2010-04-08

Micro-mirror actuator having encapsulation capability and method for the production thereof

 #171
20100066346
2010-03-18

Fabrication of microstructures integrated with nanopillars along with their applications as electrodes in sensors

 #172
20100046079
2010-02-25

Polymer pattern and metal film pattern, metal pattern, plastic mold using thereof, and method of the forming the same

 #173
20090298216
2009-12-03

Semiconductor device and method of fabricating the same

 #174
20090260961
2009-10-22

MEMS switches with reduced switching voltage and methods of manufacture

 #175
20090145629
2009-06-11

Micromachine and method for manufacturing the same

 #176
20070287231
2007-12-13

METHOD OF FORMING DECOUPLED COMB ELECTRODES BY SELF-ALIGNMENT ETCHING