B81C1/0019 - CPC Classification Index

#1

20260016683

2026-01-15

METHOD OF MANUFACTURING A LAYERED STRUCTURE FOR A MEMS APPARATUS AND MEMS APPARATUS WITH SUCH A LAYERED STRUCTURE

#2

20240270565

2024-08-15

COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A MEMS DEVICE

#3

20240092632

2024-03-21

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

#4

20220306454

2022-09-29

Composite spring structure to reinforce mechanical robustness of a MEMS device

#5

20220259038

2022-08-18

HIGH-VOLUME MILLIMETER SCALE MANUFACTURING

#6

20210375628

2021-12-02

MANUFACTURING METHOD FOR BONDED SUBSTRATE

#7

20210373322

2021-12-02

MEMS devices comprising spring element and comb drive and associated production methods

#8

20210292157

2021-09-23

Composite spring structure to reinforce mechanical robustness of a MEMS device

#9

20210221675

2021-07-22

Nano-electro-mechanical tags for identification and authentication

#10

20210221672

2021-07-22

Actuator and manufacture method thereof, operation method thereof, and movable device

#11

20200283291

2020-09-10

Suspended microelectromechanical system (MEMS) devices

#12

20200277184

2020-09-03

3D-structured sensors having stretchable multi-functional tactile electronic hairs

#13

20200025839

2020-01-23

Method for producing at least one three-dimensional component for the uni-, bi-, tri- or multi-directional measurement and/or generation of vector fields and three-dimensional component for the uni-, bi-, tri- or multi-directional measurement and/or generation of vector fields

#14

20190382264

2019-12-19

Fabrication process for a symmetrical MEMS accelerometer

#15

20190300362

2019-10-03

Deposition of protective material at wafer level in front end for early stage particle and moisture protection

#16

20190256353

2019-08-22

High-volume millimeter scale manufacturing

#17

20190161345

2019-05-30

Deposition of protective material at wafer level in front end for early stage particle and moisture protection

#18

20190094024

2019-03-28

Assembly processes for three-dimensional microstructures

#19

20190062154

2019-02-28

Three-dimensional micro devices and method for their production

#20

20190035905

2019-01-31

Proof mass and polysilicon electrode integrated thereon

#21

20180327931

2018-11-15

Fabrication method of functional micro/nano structures over large-area, flexible and high curvature surfaces, by drawing a fiber from a preform

#22

20180327255

2018-11-15

SYSTEMS AND METHODS FOR MULTI-SENSOR INTEGRATED SENSOR DEVICES

#23

20180106682

2018-04-19

Fabrication method for micromechanical sensors

#24

20170336437

2017-11-23

Fabrication process for a symmetrical MEMS accelerometer

#25

20170297898

2017-10-19

Scanning mirror device and a method for manufacturing it

#26

20170059321

2017-03-02

Method for manufacturing a MEMS element

#27

20160304341

2016-10-20

Methods of preparing nanodevices

#28

20160096729

2016-04-07

Photolithography Structures and Methods

#29

20160016792

2016-01-21

Methods of forming microstructure and electronic device having moveable component

#30

20150353342

2015-12-10

MEMS and method for forming the same

#31

20150336789

2015-11-26

Barium titanate nanowire their arrays and array based devices

#32

20150287607

2015-10-08

Method of making flexible, foldable, and stretchable devices

#33

20150232327

2015-08-20

Sensor and method for manufacturing a sensor

#34

20150183634

2015-07-02

Capacitive transducer and method of manufacturing the same

#35

20150158716

2015-06-11

Mechanism for forming MEMS device

#36

20150137303

2015-05-21

Mechanisms for forming micro-electro mechanical device

#37

20150061455

2015-03-05

Vibration device including support portion

#38

20140376071

2014-12-25

Micromechanical component, micromirror device, and manufacturing method for a micromechanical component

#39

20140264649

2014-09-18

Micromechanical acceleration sensor having conductor tracks and cavities

#40

20140191185

2014-07-10

Apparatus and method for fabricating nano resonator using laser interference lithography

#41

20140162392

2014-06-12

Method of forming a suspended structure and a transistor co-integrated on a same substrate

#42

20140044900

2014-02-13

Microfluidic device and microtube thereof

#43

20130209747

2013-08-15

Method and apparatus for building three-dimensional MEMS elements

#44

20130207511

2013-08-15

Method and apparatus for building three-dimensional MEMS elements

#45

20130205895

2013-08-15

Method and apparatus for building three-dimensional MEMS elements

#46

20130200957

2013-08-08

MEMS oscillator and manufacturing method thereof

#47

20130095593

2013-04-18

Gas sensor and manufacturing method thereof

#48

20120329251

2012-12-27

DOPED ELONGATED SEMICONDUCTORS, GROWING SUCH SEMICONDUCTORS, DEVICES INCLUDING SUCH SEMICONDUCTORS AND FABRICATING SUCH DEVICES

#49

20120161573

2012-06-28

Microstructure and electronic device

#50

20120161253

2012-06-28

Gas sensor and manufacturing method thereof

#51

20120140379

2012-06-07

Method for fabricating a multi-layer capacitor and a multi-layer capacitor

#52

20120122314

2012-05-17

MEMS element

#53

20110200434

2011-08-18

Magnetic microparticle and method for manufacturing such a microparticle

#54

20110073479

2011-03-31

Multi-step release method for electrochemically fabricated structures

#55

20110012478

2011-01-20

Method of making a thin film device

#56

20100327466

2010-12-30

Technique for fabricating microsprings on non-planar surfaces

#57

20100320548

2010-12-23

Silicon-Rich Nitride Etch Stop Layer for Vapor HF Etching in MEMS Device Fabrication

#58

20100309572

2010-12-09

PERIODIC DIMPLE ARRAY

#59

20100289060

2010-11-18

Method of fabricating free-form, high-aspect ratio components for high-current, high-speed microelectronics

#60

20100224957

2010-09-09

System for fabricating nanocoils using a wet etch technique

#61

20100187695

2010-07-29

OUT-OF-PLANE SPRING STRUCTURES ON A SUBSTRATE

#62

20100143848

2010-06-10

Patterning methods for stretchable structures

#63

20100133952

2010-06-03

Complex Microdevices and Apparatus and Methods for Fabricating Such Devices

#64

20100093158

2010-04-15

Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors and fabricating such devices

#65

20100051446

2010-03-04

Fabrication of suspended carbon micro and nanoscale structures

#66

20090239353

2009-09-24

Methods for forming multi-layer three-dimensional structures

#67

20090220710

2009-09-03

Process of making a microtube and microfluidic devices formed therewith

#68

20090073539

2009-03-19

Periodic dimple array

#69

20090053860

2009-02-26

Method for fabricating nanocoils

#70

20090047527

2009-02-19

Magnetic element and manufacturing method therefor

#71

20090046414

2009-02-19

Method for fabricating a multi-layer capacitor

#72

20090015903

2009-01-15

Complex Microdevices and Apparatus and Methods for Fabricating Such Devices

#73

20080217787

2008-09-11

Micro-electromechanical device and manufacturing method thereof

#74

20080135826

2008-06-12

Controlled nanowire in permanent integrated nano-templates and method of fabricating sensor and transducer structures

#75

20080105646

2008-05-08

Multi-step Release Method for Electrochemically Fabricated Structures

#76

20070252136

2007-11-01

Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors and fabricating such devices

#77

20070224720

2007-09-27

Manufacturing method of suspended microstructure

#78

20070202310

2007-08-30

Out-of-plane spring structures on a substrate

#79

20070165293

2007-07-19

Inductors fabricated from spiral nanocoils and fabricated using noncoil spiral pitch control techniques

#80

20070123054

2007-05-31

Methods for fabricating nanocoils

#81

20070052322

2007-03-08

Method of manufacturing a micromachined polymer beam structure

#82