83947 ⎘
Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems; Integrating an electronic processing unit with a micromechanical structure Monolithic integration, i.e. micromechanical structure and electronic processing unit are integrated on the same substrate
Monolithic Microelectromechanical Systems Based Spatial Light Modulators Including Ribbon-Type Modulators
#2Monolithic Microelectromechanical Systems Based Spatial Light Modulators with Two-dimensional Modulators
#3FOUNDRY-COMPATIBLE PROCESS FOR INTEGRATED MICRO-SPEAKER AND MICROPHONE
#4ULTRASONIC IMAGING DEVICES SYSTEMS AND METHODS
#5HIGHLY SENSITIVE THERMOELECTRIC-BASED INFRARED DETECTOR WITH HIGH CMOS INTEGRATION
#6METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
#7MEMS MICROPHONE AND MEMS ACCELEROMETER ON A SINGLE SUBSTRATE
#8MEMS DEVICE WITH INTEGRATED CMOS CIRCUIT
#9Method and structure for CMOS-MEMS thin film encapsulation
#10Ultrasonic imaging devices, systems and methods
#11SENSOR CHIP WITH A PLURALITY OF INTEGRATED SENSOR CIRCUITS
#12Device for protecting FEOL element and BEOL element
#13MEMS microphone and MEMS accelerometer on a single substrate
#14ANTENNA APPARATUS
#15Integrated digital force sensors and related methods of manufacture
#16Monolithic post complementary metal-oxide-semiconductor integration of thermoelectric-based infrared detector
#17Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing
#18ULTRASONIC IMAGING DEVICES, SYSTEMS AND METHODS
#19INTEGRATED MEMS-CMOS ULTRASONIC SENSOR
#20WAFER LEVEL VACUUM PACKAGING (WLVP) OF THERMAL IMAGING SENSOR
#21Method for processing a layer structure and microelectromechanical component
#22Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
#23INTERCONNECTION FOR MONOLITHICALLY INTEGRATED STACKED DEVICES AND METHODS OF FORMING THEREOF
#24Method for producing monolithic integration of piezoelectric micromachined ultrasonic transducers and CMOS
#25Microelectromechanical apparatus having hermitic chamber
#26CMOS cap for MEMS devices
#27Semiconductor device including a microelectromechanical structure and an associated integrated electronic circuit
#28Micromechanical device and corresponding production method
#29Method for integrating complementary metal-oxide-semiconductor (CMOS) devices with microelectromechanical systems (MEMS) devices using a flat surface above a sacrificial layer
#30Method and structure for CMOS-MEMS thin film encapsulation
#31Nano-electromechanical system (NEMS) device structure and method for forming the same
#32Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process
#33Method for processing a layer structure and microelectromechanical component
#34Micro-electro-mechanical device having two buried cavities and manufacturing process thereof
#35Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing
#36Electrical connection to a micro electro-mechanical system
#37Complementary metal-oxide-semiconductor (CMOS) micro electro-mechanical (MEMS) microphone and method for fabricating the same
#38Ultrasonic sensing device
#39Piezoelectric micromachined ultrasonic transducers and methods for fabricating thereof
#40Fence structure to prevent stiction in a MEMS motion sensor
#41CMOS-MEMS integration with through-chip via process
#42Absolute and differential pressure sensors and related methods
#43Device for protecting FEOL element and BEOL element
#44Integration scheme for microelectromechanical systems (MEMS) devices and complementary metal-oxide-semiconductor (CMOS) devices
#45INTEGRATED PIEZOELECTRIC MICROELECTROMECHANICAL ULTRASOUND TRANSDUCER (PMUT) ON INTEGRATED CIRCUIT (IC) FOR FINGERPRINT SENSING
#46Electrically controllable integrated switch
#47Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
#48CMOS thermal fluid flow sensing device employing a flow sensor and a pressure sensor on a single membrane
#49Method for integrating complementary metal-oxide-semiconductor (CMOS) devices with microelectromechanical systems (MEMS) devices using a flat surface above a sacrificial layer
#50Method of forming semiconductor package and semiconductor package
#51Integrated digital force sensors and related methods of manufacture
#52Antenna apparatus
#53Gas sensor MEMS structures and methods of fabrication thereof
#54Method for fabricating MEMS device integrated with a semiconductor integrated circuit
#55Integrated acoustic filter on complementary metal oxide semiconductor (CMOS) die
#56Display apparatus and method of manufacturing the same
#57Micro-structured organic sensor device and method for manufacturing same
#58Complementary metal oxide semiconductor (CMOS) ultrasonic transducers and methods for forming the same
#59Micro-electro-mechanical device having two buried cavities and manufacturing process thereof
#60Monolithic integration of piezoelectric micromachined ultrasonic transducers and CMOS and method for producing the same
#61Ultrasonic transducers in complementary metal oxide semiconductor (CMOS) wafers and related apparatus and methods
#62Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
#63Hermetically sealed package for mm-wave molecular spectroscopy cell
#64Semiconductor device including a microelectromechanical structure and an associated integrated electronic circuit
#65Method for manufacturing a thermoelectric-based infrared detector having a MEMS structure above a hybrid component
#66Device for protecting FEOL element and BEOL element
#67Method for processing a layer structure and microelectromechanical component
#68Fence structure to prevent stiction in a MEMS motion sensor
#69Nanopatterned biosensor electrode for enhanced sensor signal and sensitivity
#70Method for integrating complementary metal-oxide-semiconductor (CMOS) devices with microelectromechanical systems (MEMS) devices using a flat surface above a sacrificial layer
#71Ultrasonic sensing device
#72Manufacturing method for semiconductor structure
#73Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
#74Microelectromechanical system structure and method for fabricating the same
#75Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices
#76Nano-electromechanical system (NEMS) device structure and method for forming the same
#77Device arrangement
#78Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process
#79Isolated protrusion/recession features in a micro electro mechanical system
#80Systems and methods for genome mapping
#81Semiconductor structure and manufacturing method for the same
#82Method of fabricating a MEMS and/or NEMS structure comprising at least two elements suspended from a support at different distances from said support
#83Complementary metal oxide semiconductor (CMOS) ultrasonic transducers and methods for forming the same
#84Group III-N MEMS structures on a group IV substrate
#85MEMS device integrated with a semiconductor integrated circuit and manufacturing method thereof
#86Monolithic integrated device
#87Method for integrating complementary metal-oxide-semiconductor (CMOS) devices with microelectromechanical systems (MEMS) devices using a flat surface above a sacrificial layer
#88Ultrasonic transducers in complementary metal oxide semiconductor (CMOS) wafers and related apparatus and methods
#89Method and structure for CMOS-MEMS thin film encapsulation
#90Semiconductor structure and manufacturing method thereof
#91Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing
#92Integrating MEMS structures with interconnects and vias
#93Protection schemes for MEMS switch devices
#94Two-port SRAM connection structure
#95Process for manufacturing a semiconductor device including a microelectromechanical structure and an associated integrated electronic circuit and corresponding semiconductor device
#96CONVERTING ROTATIONAL MOTION TO LINEAR MOTION
#97Integration scheme for microelectromechanical systems (MEMS) devices and complementary metal-oxide-semiconductor (CMOS) devices
#98CMOS compatible capacitive absolute pressure sensors
#99Segmented electrode structure for quadrature reduction in an integrated device
#100Display apparatus and method of manufacturing the same
#101Strain and pressure sensing device, microphone, method for manufacturing strain and pressure sensing device, and method for manufacturing microphone
#102MEMS structure and method of fabricating the same
#103Support pillar
#104Vertical system integration
#105Two-dimensional array of CMOS control elements
#106Microelectromechanical system structure including thermal stability layer whose material has higher growth temperature, and method for fabricating the same
#107Method of forming micro electromechanical system sensor
#108Support pillar
#109Support pillar
#110Display element, display device, or electronic device
#111Semiconductor structure and manufacturing method thereof
#112MONOLITHIC ULTRASONIC IMAGING DEVICES, SYSTEMS AND METHODS
#113Ultrasonic imaging devices, systems and methods
#114Self-powered piezoelectric energy harvesting microsystem
#115Complementary metal oxide semiconductor (CMOS) ultrasonic transducers and methods for forming the same
#116MICROMECHANICAL COMPONENT HAVING INTEGRATED PASSIVE ELECTRONIC COMPONENTS AND METHOD FOR ITS PRODUCTION
#117Wafer Scale Monolithic CMOS-Integration of Free- and Non-Free-Standing Metal- and Metal Alloy-Based MEMS Structures in a Sealed Cavity
#118Method of manufacturing semiconductor devices with transistor cells and semiconductor device
#119Method and structure for CMOS-MEMS thin film encapsulation
#120INTEGRATED MEMS TRANSDUCER AND CIRCUITRY
#121Integrated capacitive humidity sensor
#122Integrated MEMS transducers
#123Integrated MEMS transducer and circuitry
#124Nano-electromechanical system (NEMS) device structure and method for forming the same
#125Membrane transducer structures and methods of manufacturing same using thin-film encapsulation
#126MEMS structure and method of fabricating the same
#127Micro feedback-chamber sensor and method of manufacturing such sensor
#128INTEGRATED MEMS-CMOS DEVICES AND INTEGRATED CIRCUITS WITH MEMS DEVICES AND CMOS DEVICES
#129Display device, method of manufacturing the same, display method, and wearable device
#130Pressure sensor and method for producing the pressure sensor
#131ELECTRONIC DEVICE AND MANUFACTURING METHOD THEREOF
#132Monolithic CMOS-MEMS microphones and method of manufacturing
#133METHODS FOR FABRICATING MICRO-DEVICES
#134MEMS structure with an etch stop layer buried within inter-dielectric layer
#135Complementary metal oxide semiconductor (CMOS) ultrasonic transducers and methods for forming the same
#136Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices
#137Semiconductor device and method including an intertial mass element
#138Method of increasing MEMS enclosure pressure using outgassing material
#139Ultrasonic transducers in complementary metal oxide semiconductor (CMOS) wafers and related apparatus and methods
#140Integrated circuit with a pressure sensor
#141Two-port SRAM connection structure
#142Integration of active devices with passive components and MEMS devices
#143Methods and structures for thin-film encapsulation and co-integration of same with microelectronic devices and microelectromechanical systems (MEMS)
#144Trapped sacrificial structures and methods of manufacturing same using thin-film encapsulation
#145Micromechanical pressure sensor device including, formed side-by-side in a micromechanical functional layer, first and second micromechanical functional regions that correspond to a pressure sensor and another sensor, and corresponding manufacturing method
#146Support pillar
#147Integration of active devices with passive components and MEMS devices
#148MEMS device and fabrication method
#149MEMS pressure sensor and method for forming the same
#150MEMS PRESSURE SENSOR AND METHOD FOR FORMING THE SAME
#151Device and method for protecting FEOL element and BEOL element
#152Monolithic ultrasonic imaging devices, systems and methods
#153Integrated circuit with sensor and method of manufacturing such an integrated circuit
#154Method of manufacturing an integrated circuit comprising a pressure sensor
#155Integration of pressure sensors into integrated circuit fabrication and packaging
#156Method of forming a resonator
#157MEMS device with a capping substrate
#158CMOS integrated moving-gate transducer with silicon as a functional layer
#159Electrically controllable integrated switch
#160Method for the fabrication of thin-film transistors together with other components on a substrate
#161Monolithic CMOS-MEMS microphones and method of manufacturing
#162PIEZOELECTRIC MICROPHONE WITH INTEGRATED CMOS
#163Method for MEMS structure with dual-level structural layer and acoustic port
#164Semiconductor package with air pressure sensor
#165Backside bulk silicon MEMS
#166Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices
#167Vacuum-cavity-insulated flow sensors
#168MEMS structure with improved shielding and method
#169Environmentally robust micro-wineglass gyroscope
#170Trapped sacrificial structures and methods of manufacturing same using thin-film encapsulation
#171Suspended membrane for capacitive pressure sensor
#172Membrane transducer structures and methods of manufacturing same using thin-film encapsulation
#173Methods and structures for thin-film encapsulation and co-integration of same with microelectronic devices and microelectromechanical systems (MEMS)
#174Integrated CMOS and MEMS sensor fabrication method and structure
#175Micromechanical system and method for manufacturing a micromechanical system
#176Method for manufacturing a micromechanical system
#177MEMS fabrication process with two cavities operating at different pressures
#178MEMS devices utilizing a thick metal layer of an interconnect metal film stack
#179Method of increasing MEMS enclosure pressure using outgassing material
#180Wafer scale monolithic CMOS-integration of free- and non-free-standing Metal- and Metal alloy-based MEMS structures in a sealed cavity
#181Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing
#182Cavity structures for MEMS devices
#183Method and structure of monolithically integrated absolute pressure sensor
#184System on a chip using integrated MEMS and CMOS devices
#185Ultrasonic transducers in complementary metal oxide semiconductor (CMOS) wafers and related apparatus and methods
#186Method and structure of three dimensional CMOS transistors with hybrid crystal orientations
#187MEMS device
#188Through-silicon via (TSV)-based devices and associated techniques and configurations
#189Complementary metal oxide semiconductor (CMOS) ultrasonic transducers and methods for forming the same
#190Method for producing a microelectromechanical device and microelectromechanical device
#191Methods of forming semiconductor structures including MEMS devices and integrated circuits on common sides of substrates, and related structures and devices
#192Process for producing a metal device housed in a closed housing within an integrated circuit, and corresponding integrated circuit
#193Micromechanical pressure sensor device and corresponding manufacturing method
#194Methods of forming semiconductor structures including MEMS devices and integrated circuits on opposing sides of substrates, and related structures and devices
#195Stress-controlled formation of TiN hard mask
#196Magnet placement for integrated sensor packages
#197Micro electromechanical system sensor and method of forming the same
#198Mechanism for forming MEMS device
#199Mechanisms for forming micro-electro mechanical device
#200Strain and pressure sensing device, microphone, method for manufacturing strain and pressure sensing device, and method for manufacturing microphone
#201Thin-film transistors incorporated into three dimensional MEMS structures
#202Monolithic ultrasonic imaging devices, systems and methods
#203Device, system and method for providing MEMS structures of a semiconductor package
#204Micromachine and method for manufacturing the same
#205Method of fabricating integrated semiconductor device and structure thereof
#206Integrated circuit provided with a device for detecting its spatial orientation and/or a modification of this orientation
#207Self-powered piezoelectric energy harvesting microsystem
#208Low temperature ceramic Microelectromechanical structures
#209Technique for forming a MEMS device
#210Method for embedding controlled-cavity MEMS package in integration board
#211Method of fabricating integrated structure for MEMS device and semiconductor device
#212MEMS device and fabrication method
#213Oscillation frequency measuring system and method for a MEMS sensor
#214Sensor device
#215MEMS structure with improved shielding and method
#216Method for forming MEMS structure with an etch stop layer buried within inter-dielectric layer
#217MEMS package structure
#218Fabricating polysilicon MOS devices and passive ESD devices
#219Semiconductor device and method of forming the same
#220Semiconductor pressure sensor and fabrication method thereof
#221Electronic device, method for producing the same, and oscillator
#222Monolithic ultrasonic imaging devices, systems and methods
#223Capacitive detection type electro-mechanical transducer
#224Display device having MEMS transmissive light valve and method for forming the same
#225Microelectromechanical resonators
#226Stacked semiconductor device and method of forming the same
#227Complementary metal oxide semiconductor (CMOS) ultrasonic transducers and methods for forming the same
#228Micromechanical acceleration sensor having conductor tracks and cavities
#229MEMS device with a capping substrate
#230Cavity structures for MEMS devices
#231Transducer, and manufacturing method of the transducer
#232Method for MEMS structure with dual-level structural layer and acoustic port
#233CMOS compatible silicon differential condenser microphone and method for manufacturing the same
#234Process for producing a metal device housed in a closed housing within an integrated circuit, and corresponding integrated circuit
#235CMOS integrated moving-gate transducer with silicon as a functional layer
#236Multi-axis integrated MEMS devices with CMOS circuits and method therefor
#237Method of forming a suspended structure and a transistor co-integrated on a same substrate
#238Hybrid integrated component
#239Backside bulk silicon MEMS
#240Display device provided with MEMS light valve and forming method thereof
#241Vacuum cavity-insulated flow sensors
#242Micromechanical structure, in particular sensor arrangement, and corresponding operating method
#243MEMS microphone and method for packaging the same
#244Semiconductor package with air pressure sensor
#245Hybrid integrated component and method for the manufacture thereof
#246Micro-electromechanical system devices
#247Integrated circuit with pressure sensor having a pair of electrodes
#248Structures and methods for electrically and mechanically linked monolithically integrated transistor and NEMS/MEMS device
#249Composite wafer semiconductor
#250Method for fabricating MEMS device with protection rings
#251Micromechanical inertial sensor and method for manufacturing same
#252Hybrid integrated component and method for the manufacture thereof
#253Method for manufacturing a hybrid integrated component
#254Electronic device
#255Micromachine and method for manufacturing the same
#256Methods for embedding controlled-cavity MEMS package in integration board
#257Chip with integrated circuit and micro-silicon condenser microphone integrated on single substrate and method for making the same
#258Sensor device and method
#259Strain and pressure sensing device, microphone, method for manufacturing strain and pressure sensing device, and method for manufacturing microphone
#260INTEGRATED MEMS DEVICE
#261Micro-electro-mechanical system (MEMS) structures and design structures
#262Micro-electro-mechanical system (MEMS) structures and design structures
#263Fully embedded micromechanical device, system on chip and method for manufacturing the same
#264Method for producing a microelectromechanical device and microelectromechanical device
#265Method for making micro-electro-mechanical system device
#266Stacked vias for vertical integration
#267Semiconductor device and method for manufacturing same
#268Micro electronic device having CMOS circuit and MEMS resonator formed on common silicon substrate
#269INTEGRATED CIRCUIT AND METHOD FOR FABRICATING THE SAME
#270Method for integrating MEMS microswitches on GaN substrates comprising electronic power components
#271Method of fabricating an integrated device
#272Method for fabricating integrated circuit
#273CMOS compatible MEMS microphone and method for manufacturing the same
#274Barrier structure
#275LOW TEMPERATURE BI-CMOS COMPATIBLE PROCESS FOR MEMS RF RESONATORS AND FILTERS
#276MEMS package structure
#277Embedded MEMS sensors and related methods
#278Method and structure of monolithetically integrated inertial sensor using IC foundry-compatible processes
#279Method of forming a die having an IC region adjacent a MEMS region
#280MEMS VASCULAR SENSOR
#281Integrated circuit with sensor and method of manufacturing such an integrated circuit
#282CAVITY STRUCTURES FOR MEMS DEVICES
#283MEMS and protection structure thereof
#284METHODS AND SYSTEMS FOR MEMS CMOS DEVICES HAVING ARRAYS OF ELEMENTS
#285Semiconductor device and wafer structure
#286Double side wafer process, method and device
#287Method and structure of monolithically integrated IC-MEMS oscillator using IC foundry-compatible processes
#288Micromechanical component
#289METHODS AND SYSTEMS FOR FABRICATION OF MEMS CMOS DEVICES IN LOWER NODE DESIGNS
#290Micro electro mechanical device and manufacturing method thereof
#291Integrated circuit comprising a device with a vertical mobile element integrated in a support substrate and method for producing the device with a mobile element
#292Micro-electromechanical system devices
#293Composite wafer semiconductor
#294SURFACE MOUNT MEMS DEVICE STRUCTURE AND FABRICATING METHOD THEREOF FOR CRYSTAL OSCILLATORS
#295Making of a microelectronic device including a monocrystalline silicon NEMS component and a transistor the gate of which is made in the same layer as the mobile structure of this component
#296Integrated device of the type comprising at least a microfluidic system and further circuitry and corresponding integration process
#297Method, apparatus, and system for micromechanical gas chemical sensing capacitor
#298Method for manufacturing semiconductor device including microstructure
#299Method of forming suspension object on monolithic substrate
#300Method for fabricating MEMS device