83968 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Etch mask forming Mask characterised by its behaviour during the etching process, e.g. soluble masks
Method for etching gaps of unequal width
#2Method of etching microelectronic mechanical system features in a silicon wafer
#3Method of etching microelectronic mechanical system features in a silicon wafer
#4Micro-electro-mechanical-systems processing method, and micro-electro-mechanical-systems processing apparatus
#5Wafer processing equipment having exposable sensing layers
#6MEMS device and fabrication method thereof
#7Photolithography Structures and Methods
#8Reducing MEMS stiction by deposition of nanoclusters
#9Method for producing a micromechanical component, and corresponding micromechanical component
#10Method of manufacturing a MEMS structure and use of the method
#11Method of manufacturing a MEMS structure
#12Process for fabrication of a micromechanical and/or nanomechanical structure comprising a porous surface
#13Lithium microbattery fabrication method
#14Method for fabricating a self-aligned vertical comb drive structure
#15Method for selectively covering a micro machined surface
#16Equipment and process for creating a custom sloped etch in a substrate
#17Managing trench depth in integrated systems
#18Managing trench depth in integrated systems
#19Systems and methods for mask reduction techniques
#20Wafer processing equipment having exposable sensing layers
#21Method for forming a microfabricated structure