B81C1/00388 - CPC Classification Index

ClassID:

83965 ⎘

B81C1/00388 - CPC Classification

Classification description:

Manufacture or treatment of devices or systems in or on a substrate Etch mask forming

Sub-classes:

B81C1/00396 » {Mask characterised by its composition, e.g. multilayer masks} 61
B81C1/00404 » {Mask characterised by its size, orientation or shape} 59
B81C1/00412 » {Mask characterised by its behaviour during the etching process, e.g. soluble masks} 16
B81C1/0042 » {Compensation masks in orientation dependent etching} 4
B81C1/00428 » {Etch mask forming processes not provided for in groups to } 46

Recent Application in this class:

20260043701

2026-02-12

PIEZOELECTRIC ELEMENT, PIEZOELECTRIC DEVICE, AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT

20230243710

2023-08-03

PIEZOELECTRIC ELEMENT, PIEZOELECTRIC DEVICE, AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT

20220267144

2022-08-25

Method for preparing micro-cavity array surface product with inclined smooth bottom surface based on air molding method

20210278433

2021-09-09

Method for manufacturing three-dimensionally structured member, method for manufacturing acceleration pickup, acceleration pickup, and acceleration sensor

20210198096

2021-07-01

ENHANCED CONTROL OF SHUTTLE MASS MOTION IN MEMS DEVICES

20210070608

2021-03-11

MEMS device with reduced electric charge, cavity volume and stiction

20200148531

2020-05-14

System and method for a mems transducer

20200131033

2020-04-30

Actuator layer patterning with topography

20200131031

2020-04-30

Actuator layer patterning with topography

#10

20200039819

2020-02-06

Localized functionalization of nanotextured surfaces

#11

20190267233

2019-08-29

Method for forming a functionalised assembly guide

#12

20190187337

2019-06-20

Method of forming nano-patterns on a substrate

#13

20180354780

2018-12-13

Enhanced control of shuttle mass motion in MEMS devices

#14

20180136382

2018-05-17

Wire grid polarizer and method of fabricating the same

#15

20170217768

2017-08-03

Electrically conductive patterns with wide line-width and methods for producing same

#16

20160266295

2016-09-15

Polarizer, method of manufacturing the polarizer and display panel having the polarizer

#17

20160161193

2016-06-09

Polymer-based microfabricated thermal ground plane

#18

20160085000

2016-03-24

Positive microcontact printing

#19

20160077263

2016-03-17

Wire grid polarizer and method of fabricating the same

#20

20150140717

2015-05-21

Method for manufacturing a structured surface

#21

20150125003

2015-05-07

System and method for a MEMS transducer

#22

20150048046

2015-02-19

Method for forming pattern, and polysiloxane composition

#23

20150021745

2015-01-22

Reactive ion etching

#24

20140295669

2014-10-02

Pattern forming method

#25

20140087509

2014-03-27

MEMs-based cantilever energy harvester

#26

20140042869

2014-02-13

Out-of plane travel restriction structures