83969 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Etch mask forming Compensation masks in orientation dependent etching
Method for forming a cavity and a component having a cavity
#2Method for forming a cavity and a component having a cavity
#3Method of fabricating a structure by anisotropic etching, and silicon substrate with an etching mask
#4Method of manufacturing a structure based on anisotropic etching, and silicon substrate with etching mask