83970 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Etch mask forming Etch mask forming processes not provided for in groups -
VERTICAL MECHANICAL STOPS TO PREVENT LARGE OUT-OF-PLANE DISPLACEMENTS OF A MICRO-MIRROR AND METHODS OF MANUFACTURE
#2PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL MIRROR DEVICE AND MICROELECTROMECHANICAL MIRROR DEVICE
#3HIGH-VOLUME MILLIMETER SCALE MANUFACTURING
#4Segmented pedestal for mounting device on chip
#5Segmented pedestal for mounting device on chip
#6Superhydrophobic and superoleophobic nanosurfaces
#7Actuator layer patterning with topography
#8High-volume millimeter scale manufacturing
#9Manufacturing method for semiconductor structure
#10Superhydrophobic and superoleophobic nanosurfaces
#11Substrate treatment method, computer storage medium and substrate treatment system
#12Block copolymer
#13Block copolymer
#14Block copolymer
#15Block copolymer
#16Block copolymer
#17Block copolymer
#18Block copolymer
#19Block copolymer
#20Method of manufacturing patterned substrate
#21Method of manufacturing patterned substrate
#22Exposure activated chemically amplified directed self-assembly (DSA) for back end of line (BEOL) pattern cutting and plugging
#23CMUT device and manufacturing method
#24Block copolymer
#25Block copolymer
#26PROCESS THAT ENABLES THE CREATION OF NANOMETRIC STRUCTURES BY SELF-ASSEMBLY OF BLOCK COPOLYMERS
#27Block copolymer
#28Block copolymer
#29Block copolymer
#30Block copolymer
#31Block copolymer
#32Block copolymer
#33Monomer and block copolymer
#34Block copolymer
#35Block copolymer
#36Laser micro/nano processing system and method
#37Direct current superposition curing for resist reflow temperature enhancement
#38Sequential infiltration synthesis for advanced lithography
#39Method of forming MEMS device
#40Method for providing a template for a self-assemblable polymer for use in device lithography
#41Superhydrophobic and superoleophobic nanosurfaces
#42Removable templates for directed self assembly
#43Laser micro/nano processing system and method
#44Sequential infiltration synthesis for advanced lithography
#45Method of mask forming and method of three-dimensional microfabrication
#46Methods for forming openings in a substrate and apparatuses with these openings and methods for creating assemblies with openings