MEMS ELECTROSTATIC ACTUATOR BLADE CONFIGURATIONS AND METHODS OF MANUFACTURE

Zero Power Micro-Chemomechanical Hydrogen Sensor

MICROELECTROMECHANICAL SYSTEMS DEVICE AND MANUFACTURING METHOD THEREOF

ELECTROSTATIC ACTUATOR

Method for Fabricating a Hermetically Sealed Contact and Hermetically Sealed Contact

WAFER-LEVEL PACKAGING STRUCTURE, MANUFACTURING METHOD THEREFOR, AND SENSOR

MEMS RESONATOR

MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

MEMS ELEMENT AND PIEZOELECTRIC ACOUSTIC DEVICE

LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) DESIGN AND MANUFACTURING FLOW

MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME

ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING SAME AND PREPARATION METHOD THEREFOR

CAPACITIVE MICROPHONE SENSOR DESIGN AND FABRICATION METHOD FOR ACHIEVING HIGHER SIGNAL TO NOISE RATIO

MEMS resonator

MICROMECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MICROMECHANICAL COMPONENT FOR A SENSOR OR MICROPHONE DEVICE

MEMS resonator

Capacitive microphone sensor design and fabrication method for achieving higher signal to noise ratio

Microelectromechanical system and process of making it

Micromechanical component for a sensor device

Capacitive microphone sensor design and fabrication method for achieving higher signal to noise ratio

Microelectromechanical structure including a functional element situated in a cavity of the microelectromechanical structure

MEMS sensor with compensation of residual voltage

Capacitive micromachined ultrasonic transducer and method of fabricating the same

Capacitive micro structure

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF MANUFACTURING THE SAME

Physical quantity detection device, manufacturing method for physical quantity detection device, electronic apparatus, and moving object

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

Method for manufacturing low contact resistance semiconductor structure

Composite spring for robust piezoelectric sensing

Method for protecting a MEMS unit against infrared investigations and MEMS unit

Capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods

Low contact resistance semiconductor structure and method for manufacturing the same

Thin film metal silicides and methods for formation

MEMS microphone having reduced leakage current and method of manufacturing the same

Vibration transducer

Method of manufacturing MEMS switches with reduced switching voltage

Method of manufacturing MEMS switches with reduced switching voltage

Methods of manufacturing for MEMS switches with reduced switching voltage

Methods of manufacture for MEMS switches with reduced switching voltage

Selective conductive coating for MEMS sensors

Method of manufacturing a switch

MEMS sensor with compensation of residual voltage

Multi-faced component-based electromechanical device

CHARGE STABILIZED DIELECTRIC FILM FOR ELECTRONIC DEVICES

Mechanical resonator with a spring-mass system comprising a phase-change material

Mechanical resonator with a spring-mass system comprising a phase-change material

Thin film metal silicides and methods for formation

Method of manufacturing a switch

Fully depleted region for reduced parasitic capacitance between a poly-silicon layer and a substrate region

Capacitive pressure sensors

Micro-electromechanical apparatus having signal attenuation-proof function, and manufacturing method and signal attenuation-proof method thereof

Method of manufacture MEMS switches with reduced voltage

Method of manufacturing MEMS switches with reduced voltage

Method of manufacturing MEMS switches with reduced switching voltage

Method of manufacturing MEMS switches with reduced switching volume

METHOD FOR REDUCING DISCHARGE DEFECTS AND ELECTRODE DELAMINATION IN PIEZOELECTRIC OPTICAL MEMS DEVICES

MEMS device with constant capacitance

Micro-electro-mechanical-system device with guard ring and method for making same

Semiconductor structure with TRL and handle wafer cavities

MEMS microphone with dual-back plate and method of manufacturing the same

Capacitive pressure sensors and fabrication methods thereof

Reducing the effect of glass charging in MEMS devices

MEMS backplate, MEMS microphone comprising a MEMS backplate and method for manufacturing a MEMS microphone

MEMS microphone with reduced parasitic capacitance

SIGNAL BOOSTING APPARATUS AND METHOD OF BOOSTING SIGNALS

Thin film device and method for manufacturing thin film device

Method for fabricating micro-electro-mechanical systems (MEMS) device

Micromechanical sensor apparatus with a movable gate, and corresponding production process

Micro-electro-mechanical systems (MEMS) device and method for fabricating the same

Strengthened micro-electromechanical system devices and methods of making thereof

Self-aligned nano-scale device with parallel plate electrodes

Electrostatic actuator and driving method thereof

Microstructure and microstructure manufacture method

Method for manufacturing a micromachined device and the micromachined device made thereof

Self-aligned nano-scale device with parallel plate electrodes

METHOD OF DOPING AND APPARATUS FOR DOPING

Micro-electro-mechanical-system device with guard ring and method for making same

Methods for Nanostructure Doping

Method of producing microelectromechanical device with isolated microstructures

MEMS switches with reduced switching voltage and methods of manufacture

Microstructure and microstructure manufacture method

MICRO-ELECTRO MECHANICAL SYSTEM DEVICE AND METHOD OF FORMING COMB ELECTRODES OF THE SAME

Microfluidic device with controlled substrate conductivity

Microfluidic device with controlled substrate conductivity

Method for producing a MEMS device

Creation of hermetically sealed dielectrically isolating trenches

Method for producing insulation structures

Method for reducing harmonic distortion in comb drive devices

Method of manufacturing electrical parts

Method for reducing harmonic distortion in comb drive devices

MEMS resonator

MEMS resonator

Method for making vias using a doped substrate