83996 ⎘
Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device
Sub-classes:MEMS GAS SENSOR AND ARRAY THEREOF, AND GAS DETECTION AND PREPARATION METHOD
#2Micro-nano incremental mechanical surface treatment method
#3Method for coating microstructured components
#4MEMS device with sloped support
#5Structured gap for a MEMS pressure sensor