84004 ⎘
Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device Magnetic properties
MICROELECTROMECHANICAL SYSTEMS (MEMS) ACTUATOR WITH MAGNETIC LATCHING AND METHODS FOR MANUFACTURING AND USING THE SAME
#2Micro-electromechanical device having a soft magnetic material electrolessly deposited on a palladium layer coated metal beam
#3Specialized diamond materials for NMR applications
#4Methods of forming sensor integrated packages and structures formed thereby
#5Forming magnetic microelectromechanical inductive components
#6Forming magnetic microelectromechanical inductive components
#7Method of making a MEMS gyroscope having a magnetic source and a magnetic sensing mechanism
#8Micro-electromechanical device having a soft magnetic material electrolessly deposited on a metal layer