84005 ⎘
Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device Treatment for improving the physical properties not provided for in groups -
METHOD FOR PRODUCING A MEMS MIRROR ARRAY, AND MEMS MIRROR ARRAY
#2Microfluidic chip and fabrication method
#3ENHANCED CONTROL OF SHUTTLE MASS MOTION IN MEMS DEVICES
#4OPTICALLY TRANSPARENT MICROMACHINED ULTRASONIC TRANSDUCER (CMUT)
#5MOx-based gas sensor and manufacturing method thereof
#6Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof
#7Enhanced control of shuttle mass motion in MEMS devices
#8Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof
#9Method for manufacturing a micromechanical timepiece part and said micromechanical timepiece part
#10Methods and apparatus for MEMS devices with increased sensitivity
#11Centrifugal microfluidic device
#12Micro-electro mechanical system (MEMS) device having a blocking layer formed between closed chamber and a dielectric layer of a CMOS substrate
#13Method of manufacturing a switch system
#14METHOD FOR MANUFACTURING MEMS STRUCTURES
#15Mechanical quantity sensor and method of manufacturing the same
#16Electrical conditioning of MEMS device and insulating layer thereof
#17Process for modifying the properties of a thin layer and substrate applying said process
#18Electrical conditioning of MEMS device and insulating layer thereof
#19Electrochemical miniaturization of organic micro-and nanostructures
#20Method of altering the properties of a thin film and substrate implementing said method
#21Method and apparatus for fabrication of passivated microfluidic structures in semiconductor substrates