84011 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Preserve existing structures from alteration, e.g. temporary protection during manufacturing Avoid thermal destruction
SENSING ELEMENT AND RELATED METHODS
#2SENSING ELEMENT AND RELATED METHODS
#3Integrating diverse sensors in a single semiconductor device
#4Manufacturing method of MEMS sensor
#5Optical circuit switch mirror array crack protection
#6Integrating diverse sensors in a single semiconductor device
#7Integrated MEMS device
#8Method for manufacturing an inkjet print head
#9Device and method for manufacturing the same