84006 ⎘
Manufacture or treatment of devices or systems in or on a substrate Preserve existing structures from alteration, e.g. temporary protection during manufacturing
Sub-classes:Semiconductor package with coated side walls and method of manufacture
#2Process for encapsulating a microelectronic device comprising injection of noble gas through a material permeable to this noble gas
#3MEMS device and method of formation thereof
#4Method of fabricating a semiconductor device having recessed bonding site
#5Method for producing a micromechanical component