84013 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Preserve existing structures from alteration, e.g. temporary protection during manufacturing Methods for preserving structures not provided for in groups -
SEMICONDUCTOR COMPONENT AND METHOD FOR MANUFACTURING A SEMICONDUCTOR COMPONENT
#2Device for protecting FEOL element and BEOL element
#3MEMS device manufacturing method and mems device
#4Device for protecting FEOL element and BEOL element
#5Process for the exposure of a region on one face of an electronic device
#6Device for protecting FEOL element and BEOL element
#7Vent Attachment System For Micro-Electromechanical Systems
#8Integration of active devices with passive components and MEMS devices
#9Micro-optical bench device with highly/selectively-controlled optical surfaces
#10Device and method for protecting FEOL element and BEOL element
#11Vent Attachment System For Micro-Electromechanical Systems
#12Mechanisms for forming micro-electro mechanical system device
#13Mechanisms for forming micro-electro mechanical system device
#14MICROELECTROMECHANICAL SYSTEM DEVICE AND SEMI-MANUFACTURE AND MANUFACTURING METHOD THEREOF
#15Constrained oxidation of suspended micro- and nano-structures
#16Protection of cavities opening onto a face of a microstructured element
#17Method for manufacturing an electronic assembly; an electronic assembly, a cover and a substrate
#18METHOD OF PERFORMING DOUBLE-SIDED PROCESSES UPON A WAFER
#19Method for stripping sacrificial layer in MEMS assembly
#20Self-shadowing MEM structures
#21Self-shadowing MEM structures
#22Self-shadowing MEM structures